• Chinese Optics Letters
  • Vol. 23, Issue 6, (2025)
Liu Xiaofei, Chen Ruohui, Lu Yilin, Zhu Chenxu, Qiu Yang, Zhao Xingyan, Zheng Shaonan, Zhong Qize, Cui Bo, Dong Yuan, Hu Ting
Author Affiliations
  • Shanghai University
  • University of Waterloo
  • show less

    Abstract

    Defects are induced during the fabrication process of a metalens inevitably, which will affect its yield and optical performances. Thus, the investigations on the fabrication defects are becoming increasingly important for mass-production of metalenses. In this letter, optical performances of near-infrared metalenses with four types of fabrication defects are investigated. The results show that the process-induced defects affect the focusing efficiency at λ = 940 nm obviously, but have less impact on the quality of the focal spot. This work providing the fabrication guidance for the large-scale manufacturing of metalenses in future.
    Manuscript Accepted: Dec. 18, 2024
    Posted: Jan. 13, 2025