Liu Xiaofei, Chen Ruohui, Lu Yilin, Zhu Chenxu, Qiu Yang, Zhao Xingyan, Zheng Shaonan, Zhong Qize, Cui Bo, Dong Yuan, Hu Ting
Abstract
Defects are induced during the fabrication process of a metalens inevitably, which will affect its yield and optical performances. Thus, the investigations on the fabrication defects are becoming increasingly important for mass-production of metalenses. In this letter, optical performances of near-infrared metalenses with four types of fabrication defects are investigated. The results show that the process-induced defects affect the focusing efficiency at λ = 940 nm obviously, but have less impact on the quality of the focal spot. This work providing the fabrication guidance for the large-scale manufacturing of metalenses in future.