• Chinese Optics Letters
  • Vol. 23, Issue 4, (2025)
Qin Dongxu
Author Affiliations
  • USTC
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    Abstract

    Two-photon polymerization lithography is a technique that provides hundreds of nanometer resolution and full geometric freedom. Several X-ray polymer refractive lenses created by this technique were characterized using differential phase contrast imaging (DPCI) by a microfocus X-ray grating interferometer. The beam deflection angle and wavefront phase shift of the X-ray beam through the lens were obtained. Comparative test using synchrotron radiation source showed that the system could measure the surface shape of X-ray refractive lenses, with an accuracy of 0.4 μm. This study is important for improving the fabrication process and focusing performance of X-ray refractive lenses.
    Manuscript Accepted: Oct. 8, 2024
    Posted: Oct. 24, 2024