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Study on the Design of Miniaturized Dual Band SAW Filter
PENG Xiong, PENG Xiao, DU Xuesong, TANG Xiaolong, CHEN Tingting, JIANG Pingying, MA Jinyi, and TANG Mi
In view of the demand of the miniaturized dual band SAW filter, the design technology of SAW filter with two ports and two passbands is studied. By building a dual band SAW filter acoustic-electric co-simulation platform including two groups of coupled mode (COM) parameters, the performance of the filter is analyzed anIn view of the demand of the miniaturized dual band SAW filter, the design technology of SAW filter with two ports and two passbands is studied. By building a dual band SAW filter acoustic-electric co-simulation platform including two groups of coupled mode (COM) parameters, the performance of the filter is analyzed and optimized. A dual-passband SAW filter packaged in CSP2520 has been successfully developed. The center frequency of the filter is 1 995 MHz and 2 185 MHz respectively, the passband bandwidths are both 40 MHz, the insertion loss is less than 3 dB, and the isolation between passbands is greater than 30 dB. The test results are consistent with that of the simulation..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 583 (2020)
Design of High-frequency Detection System for SAW Immunosensor
LI Xiaoyu, YIN Jiawei, SHI Xingyuan, LIU Yuqi, and SUN Kexue
The surface acoustic wave(SAW) immunosensor is a new kind of biosensor. A high-frequency detection system for SAW immune sensor is designed in this work. The system uses the phase-locked loop(PLL) to control the output signal frequency and the input signal frequency tracking lock. By measuring the frequency change, theThe surface acoustic wave(SAW) immunosensor is a new kind of biosensor. A high-frequency detection system for SAW immune sensor is designed in this work. The system uses the phase-locked loop(PLL) to control the output signal frequency and the input signal frequency tracking lock. By measuring the frequency change, the system can complete the detection of the acoustic surface wave immunosensor, and the results are displayed on the LCD screen. The test results show that the detection system can accurately measure the sensing signal within the frequency range of 156~162 MHz, and the maximum measurement error of the system is only 0.85%, which meets the actual engineering needs and can be widely used in the high-frequency detection field of surface acoustic wave immunosensor..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 589 (2020)
Design and Simulation of Digital-control Selectable Microstrip Filter Bank
CAO Liangzu, FU Xianmin, CAI Bingbing, and LI Zijing
A digita-control selectable microstrip filter bank with a wide frequency range has been designed, and the single gating of the filter bank is realized by using the microwave switch. The harmonic characteristic of a resonator loaded with a capacitor is analyzed. Each bandpass filter is designed as a comb line structure A digita-control selectable microstrip filter bank with a wide frequency range has been designed, and the single gating of the filter bank is realized by using the microwave switch. The harmonic characteristic of a resonator loaded with a capacitor is analyzed. Each bandpass filter is designed as a comb line structure and its structural parameters are optimized by using an advanced design system (ADS). The proposed digital-control filter bank is composed of two microwave switches chips with decoders and four microstrip filters. The simulation results show that the on-off state of each filter is controlled by three-bit binary codes which can realize the gating of each filter with a frequency range from 500 MHz to 2 000 MHz..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 593 (2020)
Design of Multi-frequency Acoustic Source with Piezoelectric PVDF Film Array
HU Ming, KONG Deyi, XIE Dongyue, TANG Xiaoning, and XU He
A multi-frequency acoustic source device composed of PVDF and resin matrix is designed in this work. The PVDF piezoelectric thin film is driven by a four-line excitation circuit with the adjustable amplitude ranged from 0 to 2 000 V, and the frequency ranged from 100 Hz to 2 000 Hz. By adjusting the frequency and ampliA multi-frequency acoustic source device composed of PVDF and resin matrix is designed in this work. The PVDF piezoelectric thin film is driven by a four-line excitation circuit with the adjustable amplitude ranged from 0 to 2 000 V, and the frequency ranged from 100 Hz to 2 000 Hz. By adjusting the frequency and amplitude of the signal that excites the PVDF film, the frequency spectrum of the sound source can be controlled. The measurement results of spectrum analyzer show that the spectrum of sound source can be adjusted dynamically according to the input signal and the mixed analog noise with multi-frequency peaks can be generated.With the increase of excitation voltage, the sound pressure level of noise source increases obviously. The multi-frequency acoustic source device is promising to be applied to the measurement of the property detection of sound-absorbing materials..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 598 (2020)
Inertia Impact Linear Piezoelectric Motor Based on Cantilever Structure
HE Tixi, YANG Zhenzhong, CHENG Ziyang, TANG Yuzhu, and HAO Sai
An inertial impact linear piezoelectric motor based on cantilever beam was designed to meet the requirements of optical fiber scanning and positioning during the observation of large sky area multi-target fiber spectroscopic telescope (LAMOST).The driving mechanism of the motor was also investigated.In order to avoid rAn inertial impact linear piezoelectric motor based on cantilever beam was designed to meet the requirements of optical fiber scanning and positioning during the observation of large sky area multi-target fiber spectroscopic telescope (LAMOST).The driving mechanism of the motor was also investigated.In order to avoid resonance, the first order resonance frequency of the vibrator was obtained by finite element simulation.The prototype motor was designed and fabricated, and an experimental platform was set up to validate the working principle and evaluate the performance of the motor.The results show that when the preload was 0.2 N and the driving signal was half of the sawtooth wave offset, the voltage peak-to-peak value was 60 V(600 Hz),the no-load velocity of the prototype motor reached 1.83 mm/s. The displacement resolution of the motor was 0.8 μm when the driving voltage peak-to-peak value was 15 V.The maximum load of 0.18 N and stroke of 40.5 mm were obtained under the driving signal peak-to-peak value of 60 V(600 Hz) and the preload of 0.4 N. The performance parameters of the motor meet the requirements of LAMOST′s fiber positioner scanning..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 603 (2020)
The Study on the Influence of Thermal Shock for Stability of Quartz Crystal Resonators
YIN Xiaosan, and XU Junjun
The influence of reflow soldering, one of the instantaneous thermal shocks, on the frequency stability of quartz crystal resonators is analyzed and studied. Based on the existing research experience and the frequency recoverability after reflow soldering, it is deduced that the film stress is the main influence factor The influence of reflow soldering, one of the instantaneous thermal shocks, on the frequency stability of quartz crystal resonators is analyzed and studied. Based on the existing research experience and the frequency recoverability after reflow soldering, it is deduced that the film stress is the main influence factor of frequency stability after reflow soldering.Through experiments,it is found that the frequency stability of resonators after reflow soldering can be effectively improved when the sputtering power of the thin film is reduced to 200 W or the annealing temperature of the thin film is increased to 350 ℃, and the frequency deviation after reflow soldering decreases by about (4~5)×10-6. The micro Raman spectrometer is used to analyze quartz wafers before and after reflow soldering, and it is found that the Raman characteristic peak of quartz wafers shift obviously toward the high frequency after reflow soldering. It is inferred that the compressive stress of the quartz wafers increase by about 8 MPa because of the increase of the tensile stress of thin film caused by its thermal expansion.With the increase of the cooling time, the thin films shrink and the pressure stress of quartz wafers decreases and the frequency gradually recovers. The results show that the change of film stress is the mechanism of reflow soldering on the frequency stability of resonators..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 607 (2020)
Study on an Auto-parametric Resonance Piezoelectric Energy Harvester with Mass Block-Spring Subsystem
CHEN Zhongcheng, XIE Xiaodong, and XIE Jin
In this paper, a two-degree-of-freedom parametrically excited piezoelectric energy harvester is proposed by mounting a spring between the piezoelectric beam and the end mass block. Using the extended Hamiltonian principle, the dynamics equation of the harvester is established. The simulation results show that as the piIn this paper, a two-degree-of-freedom parametrically excited piezoelectric energy harvester is proposed by mounting a spring between the piezoelectric beam and the end mass block. Using the extended Hamiltonian principle, the dynamics equation of the harvester is established. The simulation results show that as the piezoelectric beam in straight state, the motions of the piezoelectric beam subsystem and the mass block-spring subsystem affect each other, and the stiffness of the spring and the mass of mass block have an important influence on the performance of the harvester. When the natural frequency of mass block-spring is twice that of piezoelectric beam, the harvester is of an auto-parametric resonance, the excitation threshold of the harvester is the minimum; meanwhile the bandwidth of energy harvesting will be extended..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 611 (2020)
Research Progress of High Performance Acoustic Filter Technologies
LI Hui, MI Jia, HU Shaoqing, LI Zuohan, and QIU Hailian
Acoustic filter is one of the core components in current RF front-end modules. With the in-depth advancement of the fifth generation(5G) mobile communication technology, the technical requirements for filters have also been continuously improved. In recent years, with the support of some new architectures, new materialAcoustic filter is one of the core components in current RF front-end modules. With the in-depth advancement of the fifth generation(5G) mobile communication technology, the technical requirements for filters have also been continuously improved. In recent years, with the support of some new architectures, new materials and advanced modeling technologies, the acoustic filter technology has continuously made breakthroughs, and many high-performance acoustic filters have also been continuously developed out. In this paper, the research status of some representative high-performance surface acoustic wave(SAW) and bulk acoustic wave (BAW) filter technologies including UltraSAW, LowDriftTM and NoDriftTM, IHP SAW, XBARTM, XBAW filters,etc. is presented and reviewed. Finally, the technical issues of acoustic filters that will be faced in the future are briefly summarized..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 617 (2020)
Study on Surface Acoustic Wave Interrogation System Based on a Six-port Resonator
HE Hong, and ZHAO Zuo
SAW resonators are widely used in various wireless sensor applications. In order to achieve high update rate and high precision SAW measurement, a low-cost resonant SAW interrogation system is proposed in this paper. By using a low-cost six-port interferometer, the frequency of a passive SAW resonator can be measured aSAW resonators are widely used in various wireless sensor applications. In order to achieve high update rate and high precision SAW measurement, a low-cost resonant SAW interrogation system is proposed in this paper. By using a low-cost six-port interferometer, the frequency of a passive SAW resonator can be measured accurately and quickly. By using delay line, the frequency measurement value can be simplified to the phase measurement value which can be evaluated in real time through the six-port network, that is, the frequency estimation can be obtained by comparing the introduced phase shift with the non-delayed signal. The results show that compared with the conventional design, the proposed design can provide a high update rate and lower system cost without complex signal processing. The experiment on 2.4 GHz frequency band has proved the feasibility and superiority of the proposed design, the accuracy is high and the measurement time is only about 3 μs..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 623 (2020)
Preparation and Application of Composite AlN Piezoelectric Films
CHEN Yunxiang, ZHAO Xuemei, ZHENG Zeyu, TAO Yi, WU Ping, TIAN Yarui, ZHANG Yongchuan, and XU Donghui
The piezoelectric AlN thin films were prepared using middle frequency(MF,40 kHz) magnetron reactive sputtering process with dual s-gun structure. The electrode Mo thin films were made using DC magnetron sputtering process. The Au / Cr bottom electrode films and Al/Cr top electrode films were prepared by using pulse DC The piezoelectric AlN thin films were prepared using middle frequency(MF,40 kHz) magnetron reactive sputtering process with dual s-gun structure. The electrode Mo thin films were made using DC magnetron sputtering process. The Au / Cr bottom electrode films and Al/Cr top electrode films were prepared by using pulse DC magnetron sputtering process to sputter gold (Au), chromium (Cr), aluminum (Al) targets. The AlN, Mo and Au thin films were analyzed by X-ray diffraction(XRD). The results show that the (002) crystal surface of the composite aluminum nitride AlN piezoelectric film, the (110) surface of Mo film and the (111) surface of Au film have excellent preferred orientations, indicating that the Al/Cr/AlN/Au/Cr/YAG composite piezoelectric film can be used to develop Ku-band and K-band bulk acoustic wave microwave delay lines (BAWDL), and the insertion losses are as low as 43.7 dB and 54.6 dB, respectively..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 628 (2020)
Strapdown Gravity Passive Navigation System
CAI Tijing, and HUANG Junxiang
In order to meet the needs of long-term, high-precision and low-cost navigation of underwater vehicles, a strapdown gravity passive navigation system is composed of a single-axis rotating strapdown inertial navigation system(SINS) based on laser gyro, a log, a depth gauge, a strapdown gravimeter based on fiber optic gyIn order to meet the needs of long-term, high-precision and low-cost navigation of underwater vehicles, a strapdown gravity passive navigation system is composed of a single-axis rotating strapdown inertial navigation system(SINS) based on laser gyro, a log, a depth gauge, a strapdown gravimeter based on fiber optic gyroscope and a digital gravity anomalies. The position of the carrier is given by a single-axis rotating SINS based on laser gyro; An underwater strapdown gravity measurement system is formed of a strapdown gravimeter based on fiber optic gyroscope, log and depth gauge, the position information provided by the axis-rotating strapdown inertial navigation system, the speed information provided by the log and the water depth information provided by the depth gauge are used as observations, the extended Kalman filter is applied to estimate the specific force of accelerometer in the local-level frame, the low-pass filtering is used to obtain the gravity value and the gravity anomaly value in real time; according to the digital gravity anomaly map stored in the computer, the relative extreme value method is used to calculate the position of the carrier. At the end of 2019, the strapdown gravity passive navigation system carried out a long-term shipboard experiment, and the experiment data of the system was processed offline. The experiment results show that: the carrier position error is less than 1 grid size of gravity anomaly map in the matching sea region..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 631 (2020)
Analysis and Study on the Accelerometer of Rate-bias Laser Inertial Measurement Unit
XU Binghua, ZHU Zhanxia, XIE Bo, and YUAN Jianping
The directional accuracy of the rate-bias laser inertial measurement unit(IMU) is not only related to the laser gyroscope but also has a great relationship with the accelerometer. Therefore, the study of the index system of accelerometer is of great significance to improve the performance and accuracy of the rate-bias The directional accuracy of the rate-bias laser inertial measurement unit(IMU) is not only related to the laser gyroscope but also has a great relationship with the accelerometer. Therefore, the study of the index system of accelerometer is of great significance to improve the performance and accuracy of the rate-bias laser IMU. This paper analyzes the influence of accelerometer on directional accuracy from the initial alignment and direction hold. The zero deviation error and random walk of accelerometers will lead to the error of initial alignment heading angle. In order to obtain high precision heading keeping accuracy, the drift trend of the three accelerometers needs to be consistent. The experimental results show that the bias stability of the accelerometer is increased by 4 times, and the statistical accuracy of the initial alignment heading angle is improved by 30%. Under the same accuracy of accelerometer, the heading keeping accuracy of the rate-bias laser IMU with the same accelerometer drift trend have a 57% improvement than that of the rate-bias laser IMU with the inconsistent accelerometer drift trend..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 635 (2020)
Finite Element Analysis and Experiment of Multi-directional Composite Ultrasonic Transducer
GAO Changbin, XUE Jinxue, MA Wenju, LONG Zhili, and ZHAO Heng
The ultrasonic transducer is the core actuator of microelectronic packaging technology. In order to solve the problems of low bonding efficiency, uneven bonding surface and insecure bonding point of traditional one-dimensional longitudinal vibration ultrasonic transducer, the finite element model of transducer is estabThe ultrasonic transducer is the core actuator of microelectronic packaging technology. In order to solve the problems of low bonding efficiency, uneven bonding surface and insecure bonding point of traditional one-dimensional longitudinal vibration ultrasonic transducer, the finite element model of transducer is established by ANSYS simulation software for modal analysis and harmonic response analysis. A kind of 40 kHz multi-directional composite sandwich piezoelectric ultrasonic transducer that can realize axial longitudinal vibration, horizontal bending vibration and vertical pitching vibration at the same time is designed. Among them, the piezoelectric part consists of a whole ring and a 1/4 ring ceramic sheet which can be excited separately. The impedance frequency characteristic curves of longitudinal vibration, bending vibration and pitching vibration of the transducer are obtained by the physical test of the impedance analyzer. The results show that the test values are basically consistent with that of the simulation analysis, and the structural performance parameters meet the bonding requirements, which verify the rationality of the structure..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 640 (2020)
Design and Simulation of a Novel SAW Triaxial Acceleration Sensor
GUO Xinrong, ZHANG Yongwei, TAN Qiulin, and ZHANG Wendong
In this paper, a novel triaxial SAW acceleration sensor is proposed. The model of the sensor is established and the finite element simulation is carried out. The displacement and strain distribution of the sensor structure under different acceleration loads are obtained. The sensor design adopts a four-terminal five-beIn this paper, a novel triaxial SAW acceleration sensor is proposed. The model of the sensor is established and the finite element simulation is carried out. The displacement and strain distribution of the sensor structure under different acceleration loads are obtained. The sensor design adopts a four-terminal five-beam structure. The influences of temperature drift on the response of x and y axial acceleration sensors are eliminated and the decoupling of each axial acceleration is realized through the design of the resonator position and the algorithm. The feasibility of the overall design of the proposed three-axis acceleration sensor is verified from theory and simulation. The modal analysis of the sensor is carried out to obtain the natural frequency of the sensor to avoid the resonance damage. The results show that the modal analysis of the sensor structure provides a certain basis for avoiding the damage to the sensor in practical application..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 644 (2020)
Research on the Suppression Method of Temperature Transience Effect Error of Fiber Optic Gyroscope
LI Yang, HUANG Xin, LU Binbin, and ZHANG Dengwei
In the strapdown inertial navigation system composed of interferometric fiber optic gyroscopes, the drift term caused by the temperature transience effect during the startup of fiber optic gyroscope is the main error source of navigation error and has become a limitation to further improve the performance of high-preciIn the strapdown inertial navigation system composed of interferometric fiber optic gyroscopes, the drift term caused by the temperature transience effect during the startup of fiber optic gyroscope is the main error source of navigation error and has become a limitation to further improve the performance of high-precision fiber optic gyroscope systems. In this paper, through theoretical analysis and modeling of the temperature transience effect during the startup process of the fiber optic gyroscope, a method for suppressing the error of the temperature transience effect of the fiber optic gyroscope based on lookup table is proposed, and the evaluation method of the error of the fiber optic gyroscope temperature transience effect is also proposed. The experimental results show that the suppression method can reduce the drift probability error of the fiber optic gyroscope from 0.02 ~0.50 (°)/h to less than 0.01 (°)/h at the environmental temperature of -40~+60 ℃, corresponding to the navigation circular probability error reducing from 1.4~35 n mile/h to less than 0.8 n mile/h, which effectively suppresses the error of the start-up temperature transience effect of the fiber optic gyro and greatly improves system performance..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 649 (2020)
Preparation and Property Study on Sr2Nb2O7 Textured Ceramics by Template Grain Growth
SHI Yulin, WU Chao, WANG Dan, WANG Hongliang, WU Xiaojun, and CHEN Qiang
The textured Sr2Nb2O7 ceramic with high anisotropy was prepared by template grain growth(TGG) method, its anisotropy in crystal structure, dielectric and piezoelectric properties were systematically investigated. The results show that the textured Sr2Nb2O7 ceramic grow preferentially along the orientation, and the graiThe textured Sr2Nb2O7 ceramic with high anisotropy was prepared by template grain growth(TGG) method, its anisotropy in crystal structure, dielectric and piezoelectric properties were systematically investigated. The results show that the textured Sr2Nb2O7 ceramic grow preferentially along the <0l0> orientation, and the grain orientation factor is calculated to be 0.78.The Curie temperature of the textured Sr2Nb2O7 ceramics is 1 328 ℃, and its piezoelectric and dielectric properties exhibit obvious anisotropic characteristics. The piezoelectric constant of SNO┴ sample is 2.8 pC/N and the resistivity is 5.6×104 Ω· cm at 650 ℃..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 655 (2020)
Research on Robust Sliding Mode Observer for TWUSM Vibration Modes
JING Kai, LING Xiaping, and DONG Yan
Considering that the control accuracy of travelling-wave rotating ultrasonic motors(TWUSMs) is directly related to the two-phase vibration modes of the stator, but which are not easy to measure, a sliding mode observer(SMO) with parameter robustness is proposed to optimize the stator vibration modes. Firstly, the influConsidering that the control accuracy of travelling-wave rotating ultrasonic motors(TWUSMs) is directly related to the two-phase vibration modes of the stator, but which are not easy to measure, a sliding mode observer(SMO) with parameter robustness is proposed to optimize the stator vibration modes. Firstly, the influences of the two-phase vibration modes of the stator and the travelling wave to the control accuracy of TWUSMs are analyzed.Secondly, the SMO with vibration modes is established using the measurable current and voltage signals, and then its stability and robustness are proved under the time-varying parameters. Finally, the proposed sliding mode observer with vibration mode is verified through simulation and experiment. The results show that the SMO can accurately estimate the two-phase vibration modes and has the parameters robustness. In addition, based on the observation results, the driving voltage is improved, and the stator vibration mode is optimized, thereby reducing output torque ripple and improving motor control accuracy..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 659 (2020)
Experimental Research on Water Cooling Closed-Loop Driven Piezoelectric Pump
WEI Lingjiao, ZHAO Yanan, and LIANG Jingtao
A heat transfer system of water cooling closed-loop driven by the piezoelectric pump is designed in this paper. The piezoelectric pump adopts a dual-chamber series structure, and the water flow of the pump reaches 330 mL/min at the driving voltage of 150 V. In order to quantitatively analyze the influence of the vapor A heat transfer system of water cooling closed-loop driven by the piezoelectric pump is designed in this paper. The piezoelectric pump adopts a dual-chamber series structure, and the water flow of the pump reaches 330 mL/min at the driving voltage of 150 V. In order to quantitatively analyze the influence of the vapor phase on the heat transfer performance of the water cooling closed-loop driven by the piezoelectric pump, an experimental investigation was carried out to study the influences of different filling ratio on the start-up and steady-state operating characteristics of the piezoelectric pump driven closed-loop. The experimental results show that the piezoelectric pump in the closed-loop can only be started at a fluid filling ratio of great than 0.895. When the filling ratio is great than 0.930, the presence of a small amount of vapor phase has little influence on the operating performance of the piezoelectric pump and the heat transfer system and the thermal resistance of the system is lower than 0.2 ℃/W..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 663 (2020)
Research Progress on Improving Delay Resolution of Ultrasonic Phased Array System
XU Haosheng, ZENG Wei, YANG Shaohui, and ZENG Deping
The flexible and controllable synthetic beams can be obtained and various phase control effects such as dynamic focusing, deflection, and sound beam formation can be realized by performing phase delay control on each array element in the ultrasonic array transducer based on theultrasonic phased array technology. The prThe flexible and controllable synthetic beams can be obtained and various phase control effects such as dynamic focusing, deflection, and sound beam formation can be realized by performing phase delay control on each array element in the ultrasonic array transducer based on theultrasonic phased array technology. The precision focusing delay is the core of ultrasonic phased array dynamic focusing. It is necessary to control the phase delayaccurately whether in ultrasonic phased array transmission delay control or reception delay compensation. The article introduces The development history and research status of the delay resolution of ultrasonic phased array system at home and abroadis introduced, and the advantages and disadvantages of each methodare analyzed..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 668 (2020)
Study on Ar+ Etching of Crystal-Ion-Sliced Lithium Niobite Single Crystal Thin Film
FANG Yuanping, LUO Wenbo, HAO Xin, BAI Xiaoyuan, ZENG Huizong, SHUAI Yao, and ZHANG Wanli
The lithium niobite (LNO) single crystal thin film prepared by high-energy ion implantation and stripping has excellent electro-optical, acousto-optic properties, and is in urgent need in the fields of radio frequency devices and optical waveguides. However, the high-energy ion implantation leads to the existence of a The lithium niobite (LNO) single crystal thin film prepared by high-energy ion implantation and stripping has excellent electro-optical, acousto-optic properties, and is in urgent need in the fields of radio frequency devices and optical waveguides. However, the high-energy ion implantation leads to the existence of a damage layer on the surface of the LNO single crystal film, which results in the degradation of film quality and device performance. A method for removing damaged layer of LNO single crystal thin film by Ar+ etching is proposed in this paper. Based on the simulation of high-energy ion implantation, the influence of etching parameters on the etching rate and surface morphology are analyzed by scanning electron microscope and atomic force microscope, and the etching parameters of the damaged layer of LNO film are determined. The X-ray diffraction analysis shows that the full-width at half maximum height of the rocking curve of the LNO film with Ar+ etching is reduced to near that of the LNO single crystal material before implantation. The results of the piezoelectric force microscopy tests show that the LNO single crystal film after removing the damage layer has a more consistent piezoelectric response..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 674 (2020)
Effect of Intense Pulsed Gamma Radiationon Properties of Piezoelectric Ceramics
MAO Shiping, YANG Jing, ZHANG Zuwei, CHEN Qinghua, WANG Dengpan, ZHAO Defeng, and FENG Bo
The acceleration piezoelectric sensor is a commonly used vibration measurement device in reactor, and its key component is piezoelectric ceramic material. In the environment of intense nuclear radiation, the neutrons and gamma rays interact with the nuclei and electrons in the piezoelectric ceramics respectively, resulThe acceleration piezoelectric sensor is a commonly used vibration measurement device in reactor, and its key component is piezoelectric ceramic material. In the environment of intense nuclear radiation, the neutrons and gamma rays interact with the nuclei and electrons in the piezoelectric ceramics respectively, resulting in microscopic damage. Such damage will change the molecular scale and mesoscopic scale, even macroscopic performance, including piezoelectric properties and apparent morphology information of materials, which will bring hidden trouble to the service performance of devices. The effects of long-time and high-dose gamma ray irradiation on the properties of piezoelectric ceramics have been studied, but the effects of short-time and high-dose gamma irradiation on the properties of piezoelectric ceramics has little study. In this paper, the piezoelectric ceramic materials were irradiated with high-dose rate gamma on the radiation device, and then the piezoelectric properties and apparent morphology of the materials before and after irradiation were tested. The influence of high-dose rate irradiation on the properties of piezoelectric ceramics was analyzed through the test results..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 678 (2020)
Timber Axial Pressure Damage Monitoring Based on Piezoceramic Sensor
LIU Xiaoyu, RAO Yulong, ZHANG Jicheng, and XIAO Jiahao
Under the action of compressive load, the wooden structure will cause insufficient bearing capacity and internal damage. However, there are few methods for non-destructive health monitoring of the wood structures.In this paper, the feasibility of damage monitoring of timber under axial and local pressure was studied baUnder the action of compressive load, the wooden structure will cause insufficient bearing capacity and internal damage. However, there are few methods for non-destructive health monitoring of the wood structures.In this paper, the feasibility of damage monitoring of timber under axial and local pressure was studied based on the piezoceramic sensor. The piezoelectric sensors were mounted on the surface of the timber, by using the active sensing method of stress wave; one sensor was used as the signal transmitter and the other as the signal receiver; when the timber structure was damaged, the detected stress wave decreased correspondingly. Based on the attenuation of the stress wave, the wavelet packet energy method can be used to convert it into damage indicators to monitor structural damage.The results show that the amplitude of the piezoelectric signal has a strong correlation with the degree of wood damage, and the wood non-destructive monitoring method has good feasibility..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 681 (2020)
Analysis of Influence of Cantilever Beam Substrate on Output Response of Piezoelectric Energy Harvester
WU Xinzhe, YAN Shouyang, GAO Zhiqiang, HAN Jing, and JIAO Guotai
The material and structure of the cantilever beam have an important influence on the output response of piezoelectric energy harvester. In order to study the influences of different substrate materials on the contact piezoelectric energy harvesters under the low wind speed of 1.5~5.8 m/s. In this paper, the flexible PVThe material and structure of the cantilever beam have an important influence on the output response of piezoelectric energy harvester. In order to study the influences of different substrate materials on the contact piezoelectric energy harvesters under the low wind speed of 1.5~5.8 m/s. In this paper, the flexible PVDF piezoelectric cantilever beam structures with substrates of PVC, 304 stainless steel, 1060 aluminum and H68 brass are selected for comparative experiments and analysis. The results show that the output power of the cantilever structure based on 304 stainless steel substrate has the largest output power. Moreover, by calculating the structural parameters of beams with different substrate materials, it is found that the structural stiffness and amplitude reduction factor are the main factors affecting the output performance of piezoelectric energy harvester under low wind speed conditions. Under the same working conditions, when the structural stiffness of the beam is smaller, the starting wind speed of the contact piezoelectric energy harvester is lower, and the exciting force frequency of wind-induced vibration is higher. The smaller the amplitude reduction factor, the greater the output power of the cantilever beam..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 686 (2020)
Fatigue Simulation Analysisand Experimental Study on Ring Piezoelectric Vibrator
TIAN Xiaochao, WANG Haigang, WANG Hu, WU Yue, ZHANG Sida, and YANG Zhigang
As the core component of piezoelectric drive mechanism, the working state and fatigue strength of piezoelectric vibrator directly determine the working performance and service life of the system. In this paper, the ANSYS software is used to simulate the fatigue of the ring piezoelectric vibrator, and the cloud chart ofAs the core component of piezoelectric drive mechanism, the working state and fatigue strength of piezoelectric vibrator directly determine the working performance and service life of the system. In this paper, the ANSYS software is used to simulate the fatigue of the ring piezoelectric vibrator, and the cloud chart of vibration mode and the maximum stress point are obtained. The influences of different structural parameters on the fatigue life of piezoelectric vibrator are studied, and the data of bimorph and single crystal piezoelectric vibrators are compared. The results show that the metal material 65Mn has the best anti fatigue performance. Reducing the diameter of the vibrator or increasing the thickness of the vibrator can improve its fatigue life, while applying too high voltage amplitude will reduce the service life of the vibrator, and the fatigue life of the bimorph piezoelectric vibrator is longer than that of the single crystal piezoelectric vibrator. The fatigue life experiment on the ring piezoelectric vibrator is carried out. The results show that the selected batch of vibrator can fully meet the requirements of use..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 692 (2020)
Piezoelectric Actuator and Its Application in Hydraulic Valve
HUA Shunming, ZHANG Yu, PENG Yu, LIU Lijun, and XU Shaofeng
The high speed on-off valve, servo valve and other piezoelectric hydraulic valves with piezoelectric actuator as the core have the advantages of high frequency response, good inching performance, and compact structure and so on. They are one of the new valve control types, and have attracted the continuous attention ofThe high speed on-off valve, servo valve and other piezoelectric hydraulic valves with piezoelectric actuator as the core have the advantages of high frequency response, good inching performance, and compact structure and so on. They are one of the new valve control types, and have attracted the continuous attention of researchers at home and abroad. First of all, the classification and characteristics of piezoelectric actuators for valves are introduced. According to the working principle, they are divided intotwo categories of direct push and step-by-step, and four types. Secondly, the research progress of four typical types of piezoelectric valves, namely pilot type, direct drive type, nozzle flapper type and switch type, are summarized, and their representative structures and performance characteristics are analyzed. The results show that with the increasing demand for precision and intelligence of hydraulic valve in the future, the application prospect of piezoelectric hydraulic valve is broader. Therefore, in addition to the development of high-performance dielectric materials, some key piezoelectric driving and control technologies such as micro displacement amplification and hysteresis compensation control are still worth exploring deeply..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 697 (2020)
Adaptive Mechanical Switching Circuit for Piezoelectric Energy Harvesting
HUANG Yao, QIN Gang, and LIU Weiqun
The piezoelectric energy harvesting device relies on the energy extraction circuit, the energy extraction efficiency of traditional standard circuit is not high, and the synchronous switch circuit can effectively improve the energy extraction efficiency. In this paper, the use of viscous material as the moving electrodThe piezoelectric energy harvesting device relies on the energy extraction circuit, the energy extraction efficiency of traditional standard circuit is not high, and the synchronous switch circuit can effectively improve the energy extraction efficiency. In this paper, the use of viscous material as the moving electrode of adaptive mechanical switch structure is proposed. It does not require additional electronic devices and can adapt to the displacement amplitude of the cantilever beam to harvest higher power. The sinusoidal excitation and noise excitation are used to analyze the parameters of the viscous material. The results show that when the excitation is different, the parameter selection of the viscous material is also different, which also proves the performance of the adaptive mechanical switch..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 704 (2020)
Internal Mode Control of Piezoelectric Ceramic Actuator Based on H-like Model
SHANG Aipeng, WANG Zhenyan, and HE Yidan
Aiming at the problem that the rate-dependent characteristics of piezoelectric ceramic actuators seriously reduce the control accuracy of the application side,the internal model control strategy based on the Hammerstein-like model is studied in this paper. The nonlinear part is represented by the least squares support Aiming at the problem that the rate-dependent characteristics of piezoelectric ceramic actuators seriously reduce the control accuracy of the application side,the internal model control strategy based on the Hammerstein-like model is studied in this paper. The nonlinear part is represented by the least squares support vector machine model, and the dynamic linear part is represented by the autoregressive traversal model. On this basis, the inverse model of the system is constructed, and then the internal model controller is designed to realize the tracking control of the piezoelectric ceramic actuator. Finally, it is verified by the experimental platform. The experimental results show that the relative error of the expected signal within 100 Hz of real-time tracking is less than 10%, which proves the effectiveness of the designed internal model control scheme..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 708 (2020)
Fatigue Analysis of Folded Piezoelectric Vibrator Based on Displacement Load
ZHAO Chunming, GONG Lijiao, ZHOU Tianshuo, ZHANG Xin, and ZHANG Pengfei
Under displacement load, in order to predict the fatigue life of the folding piezoelectric vibrator due to the thickness of the bonding layer, a theoretical analysis of the bonding layer was carried out and a finite element model of the folding piezoelectric vibrator was established. The sinusoidal displacement loads aUnder displacement load, in order to predict the fatigue life of the folding piezoelectric vibrator due to the thickness of the bonding layer, a theoretical analysis of the bonding layer was carried out and a finite element model of the folding piezoelectric vibrator was established. The sinusoidal displacement loads are applied under three different working modes of 85.5 Hz, 105.8 Hz and 153.2 Hz, and the static analysis of the model was performed. The analysis results were transmitted to the nCode DesignLife software for fatigue analysis. The results show that when the thickness of the adhesive layer was 0.07 mm, the stress values of the elastic layer and the piezoelectric layer were the minimum. From the analysis of fatigue life, the structural damage was concentrated in the piezoelectric ceramic layer. At 105.8 Hz, the fatigue life of the piezoelectric layer was 5.317×107, at 85.5 Hz and 153.2 Hz, the fatigue life of the piezoelectric layer is 8.82×106 and 1.624×106 respectively. Therefore, in the practical application of folded piezoelectric vibrators, it is necessary to comprehensively consider the thickness of the bonding layer, the displacement load and the fatigue life of the piezoelectric ceramics in order to achieve the maximum power output..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 713 (2020)
Study on Device and Method of Stabilizing Growth Interface of Czochralski Method
ZHOU Yimin, HE Ye, CEN Wei, CHEN Chuangui, and DENG Jiangtao
In order to solve the problem of unstable interface in the conventional Czochralskysingle crystal growth interface, on the basis of the conventional automatic control theory of the single crystal equal diameter, through raw material supplement device, the crystal raw materials equal to the crystal grow amount being addIn order to solve the problem of unstable interface in the conventional Czochralskysingle crystal growth interface, on the basis of the conventional automatic control theory of the single crystal equal diameter, through raw material supplement device, the crystal raw materials equal to the crystal grow amount being added constantly into the crucible to stable the height of crystal growth liquid surface. Then, the real-time diameter change of the crystal is measured by the optical amplifier and charge coupled device (CCD) imaging device, and the crystal rotation speed is adjusted by this rate of change, and finally the crystal growth interface is always maintained in a relatively stable ideal state to ensure that the crystal shape conforms to the setting requirements and the internal quality in the crucible stable crystal growth on the surface of the liquid height is not changed, and then through the optical amplifier and CCD imaging device measuring crystal diameter variation in real time, in order to adjust the crystal rotation rate, eventually make crystal growth interface is always maintained in a relatively stable state of ideal, ensure crystal conform to the requirements of the set and the internal quality of excellent shape..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 718 (2020)
Analysis of Effect of Installation Error on Alignment Accuracy of Single-Axial Rotation
LIU Xin, JIA Jichao, LI Kun, ZHAO Ruixing, and DONG Shubing
Aiming at the problem of initial alignment of the laser gyroscope single-axial rotation inertial navigation system, the error parameters of the inertial device affecting the alignment accuracy are analyzed, the effect of gyroscope installation error on the alignment accuracy and accelerometer bias estimation is analyzeAiming at the problem of initial alignment of the laser gyroscope single-axial rotation inertial navigation system, the error parameters of the inertial device affecting the alignment accuracy are analyzed, the effect of gyroscope installation error on the alignment accuracy and accelerometer bias estimation is analyzed and the simulation is carried out.The simulation result indicates that the gyroscope installation error can bring alignment error and accelerometer bias error. The alignment accuracy can be improved through calibrating accurately the gyroscope installation error angles..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 721 (2020)
Research on Navigation and Localization Algorithm Based on IMU/Vision Fusion
DONG Bolin, and CHAI Xu
Aiming at the problem that the image blurring and feature loss during fast motion or rotation of the mobile robots with visual sensors occur so that the feature matching fails resulting in the decrease of accuracy and precision of system localiztion and mapping, a schemefusing the depth camera(RGB~~D) with inertial meaAiming at the problem that the image blurring and feature loss during fast motion or rotation of the mobile robots with visual sensors occur so that the feature matching fails resulting in the decrease of accuracy and precision of system localiztion and mapping, a schemefusing the depth camera(RGB_D) with inertial measurement unit(IMU) is proposed in this paper, in which the ORB SLAM2 algorithm is used to estimate the pose, and the IMU information is used as a constraint to compensate for the lack of camera data. The measurement data of the two sensors are nonlinearly optimized by the loose coupling method based on extended Kalman filter. The experimental results of data set show that the method can effectively improve the positioning accuracy and system mapping effect of the robot..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 724 (2020)
Design and Simulation of Piezoelectric Energy Harvesting Circuit Based on Coupled Inductance
ZHOU Tianshuo, GONG Lijiao, ZHAO Chunming, and YANG Jianxin
The environmental vibration energy collection technology of piezoelectric materials has the characteristics of large energy density, no electromagnetic interference, and easy collection. In this paper, a self-powered piezoelectric vibration energy acquisition circuit is proposed, that is, a synchronous charge extractioThe environmental vibration energy collection technology of piezoelectric materials has the characteristics of large energy density, no electromagnetic interference, and easy collection. In this paper, a self-powered piezoelectric vibration energy acquisition circuit is proposed, that is, a synchronous charge extraction and voltage reversal circuit based on coupled inductance (SCET&VII), standard energy harvesting (SEH) circuit based on electronic simulation software LTspice, and synchronous charge extraction (SECE) circuit were analyzed and compared by using LTspice. The results show that under the same vibration excitation condition, the output power of SCET&VII interface circuit under load is 2.65 times that of SEH and 1.76 times that of SECE, and the power output is not affected by the load. At the same time, the energy self-sufficiency of switching action in energy collection is realized..
Piezoelectrics & Acoustooptics
- Publication Date: Apr. 21, 2022
- Vol. 42, Issue 5, 729 (2020)