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Development of High Performance
TC-FBARLIU Ya, CHEN Feng, HUANG Jing, HUANG Long, LYU Junhao, SUN Mingbao, and MA Jinyi
In this paper, a high performance temperature compensation thin film bulk acoustic resonator (TC-FBAR) filter is developed. The COMSOL software is used to model and simulate the resonator with high performance thermal compensation structure, and the model is modified on the basis of the conventional one-dimensional MasIn this paper, a high performance temperature compensation thin film bulk acoustic resonator (TC-FBAR) filter is developed. The COMSOL software is used to model and simulate the resonator with high performance thermal compensation structure, and the model is modified on the basis of the conventional one-dimensional Mason equivalent circuit model, and then the filter is simulated and optimized in ADS, finally, the TC-FBAR filter with stepped structure is realized. The temperature compensation FBAR filter chip is fabricated by using the cavity structure. On the basis of the conventional TC-FBAR, the air bridge and convex structure are prepared, thus the high performance TC-FBAR filter with dual air bridge structure is obtained. The test results show that the center frequency of the filter is 2.43 GHz, the minimum insertion loss is 1.02 dB, 1 dB bandwidth is 70.5 MHz, and frequency temperature coefficient is 1.82×10-6/℃..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 795 (2023)
Research on Improving Internal Frequency Consistency of Surface Acoustic Wave Filters Prepared by Piezoelectric-on-Insulator
WafersPAN Qi, and MI Jia
The frequency dispersion of the surface acoustic wave (SAW) filters prepared by Piezoelectric-on-Insulator (POI) wafer under conventional photolithography process is investigated in this paper. The results show that the chromatism of the piezoelectric single crystal thin film is the fundamental reason for the deterioraThe frequency dispersion of the surface acoustic wave (SAW) filters prepared by Piezoelectric-on-Insulator (POI) wafer under conventional photolithography process is investigated in this paper. The results show that the chromatism of the piezoelectric single crystal thin film is the fundamental reason for the deterioration of frequency consistency. In this work, we used bottom anti-reflection coating (BARC) technology to suppress the reflection from the wafer and partitioned the exposure regions to compensate different color blocks. Both the ways can effectively improve the frequency consistency of the SAW filters. The proportion of maximum device quantity in 2 MHz is improved from 48.81% in conventional exposure process to 53.57% in BARC technology and 70.24% in partition exposure progress..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 800 (2023)
Miniaturized Low-Pass Double Notch Filter Based on Spoof Surface Plasmon Polaritons
ZHANG Sheng, YU Mengjie, XIE Xin, LI Dani, CAO Weiwei, and CHENG Deqiang
In this paper, a novel miniaturized low-pass double notch filter composed of single-sided composite periodic spoof surface plasmon polaritons(SSPPs) waveguides and interdigital resonators was proposed. The mode conversion structure in the conventional SSPPs filters was removed, which effectively reduced the size of theIn this paper, a novel miniaturized low-pass double notch filter composed of single-sided composite periodic spoof surface plasmon polaritons(SSPPs) waveguides and interdigital resonators was proposed. The mode conversion structure in the conventional SSPPs filters was removed, which effectively reduced the size of the filter, thus realizing the miniaturization of the filter. Furthermore, by introducing two interdigital resonators on the SSPPs transmission line and three ones on the bottom metal plate separately, thereby generating two transmission zeros and achieving two independently tunable notches. The simulated and measured results show that the proposed filter has high transmission efficiency with the cutoff frequency of 8.3 GHz, return loss in the band of less than 16.6 dB, and the notch suppression of 20 dB..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 804 (2023)
Design of Fan-Shaped SAW Filter for ETC
SystemsWU Yan, JIANG Daojun, SHI Jianfeng, ZHANG Xianhong, DU Xuesong, and ZHANG Ling
This paper introduces the design method of a surface acoustic wave filter for electronic toll collection system (ETC). The filter adopts 3-1-3 segment capacitance-weighted structure and electrode width control(EWC) transducer unit structure. The substrate material is 128°Y-X lithium niobate. Through optimizing theThis paper introduces the design method of a surface acoustic wave filter for electronic toll collection system (ETC). The filter adopts 3-1-3 segment capacitance-weighted structure and electrode width control(EWC) transducer unit structure. The substrate material is 128°Y-X lithium niobate. Through optimizing the filter peripheral matching inductance, the transducer reflection finger structure and film thickness, we design a filter with center frequency of 40 MHz, small insertion loss of -7.5 dB and high stopband suppression. Breaking through the conventional surface acoustic wave filter design method for the first time, the design method of the transducer full withdraw weighting in the fan-shaped structure is adopted, and the finally fabricated devices meet the use requirements of ETC project..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 809 (2023)
Design of Compact MEMS RF Filters with High-Selectivity
XU Aiguo, and MEI Di
In this paper, a compact and high-selectivity RF filter based on MEMS technique is designed. Compared with the traditional micro-electro-mechanical system(MEMS)filter, the proposed filter adopts a stepped impedance resonator (SIR) to reduce the size of device, and uses field distribution of the resonator to form a compIn this paper, a compact and high-selectivity RF filter based on MEMS technique is designed. Compared with the traditional micro-electro-mechanical system(MEMS)filter, the proposed filter adopts a stepped impedance resonator (SIR) to reduce the size of device, and uses field distribution of the resonator to form a compact cross-coupling which eliminates the traditional flying rod and structure, and the compact layout of the device is achieved while improving the selectivity of the filter. The surface metal resonator cavity of the filter is grounded by the metalized through silicon via, forming a quarter-wavelength resonant structure. The filter with different performance and structural parameters are designed and analyzed, and simulated by the three-dimensional electromagnetic simulation software. The results show that the filter size is 10 mm×10 mm×0.4 mm, the stationary wave is less than 1.3 dB, the insertion loss is less than 3.5 dB, and the out-of-band rejection is larger than 30 dB at 2.5-2.7 GHz and 3.4-3.5 GHz..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 813 (2023)
Dual Band Acoustooptic Tunable Filter with Large Aperture Angle
ZHANG Zehong, WANG Zhilin, HE Xiaoliang, and LIU Ling
This paper introduces the design method and testing results of a dual-band acousto-optic tunable filter with large aperture angle. This tunable filter has the function of simultaneously filtering out visible light and mid-waves, its high-frequency band is responsible for filtering out visible light (450-750 nm), and thThis paper introduces the design method and testing results of a dual-band acousto-optic tunable filter with large aperture angle. This tunable filter has the function of simultaneously filtering out visible light and mid-waves, its high-frequency band is responsible for filtering out visible light (450-750 nm), and the low-frequency band is responsible for filtering out mid-waves (3 000-4 500 nm). This filter employs tellurium dioxide crystals as the acousto-optic medium material, with an incident angle of 20°, an ultrasonic angle of 98.55° for the visible light band, and an ultrasonic angle of 99.65° for the mid-wave band. When the interaction lengths are 3 mm for the visible wave band and 23.1 mm for the mid-wave band, both the visible light and mid-wave bands achieve an aperture angle of greater than 6°..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 818 (2023)
Study on Optical Transmission and Refractive Index Sensitivity Characteristics of NovelSensing Fibers
YANG Guohua, TAO Yifei, XU Yuan3, DING Cao, and XIE Quanhua
To increase the sensitivity of fiber-optic evanescent wave sensors, a sensing optic fiber with novel structure was proposed in this paper. The sensing optical fiber was by fabricated by cascading of a traditional plastic optical fiber, a novel step optical fiber (with a refractive index increasing step from the fiber cTo increase the sensitivity of fiber-optic evanescent wave sensors, a sensing optic fiber with novel structure was proposed in this paper. The sensing optical fiber was by fabricated by cascading of a traditional plastic optical fiber, a novel step optical fiber (with a refractive index increasing step from the fiber core to the cladding) and another traditional plastic optical fiber together. The new step optical fiber was the sensitive area of the evanescent wave sensor. The fiber core was made of polymethyl methacrylate, and the cladding was made of a mixture of polysulfone and GeO2. The optical transmission characteristics of the prepared optical fiber were analyzed by using geometrical optics. The optical transmission characteristics and its sensitivity of the prepared optical fiber to the external refractive index were investigated. The results highlight that when the GeO2 doping content in the cladding of the new step optical fiber was 1.5 wt% and the coating thickness was 200 μm, the sensing fiber showed good spectral transmission quality and high refractive index response sensitivity..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 823 (2023)
Temperature Compensation Method for MEMS Pressure
SensorsLIU Qiang, WEI Guiling2, HUANG Jing, GUO Wenxin, HE Xiangjun, and SUN Shenghou
Aiming at the problem of temperature drift of micro-electro-mechanical system(MEMS) piezoresistive pressure sensor affected by ambient temperature, based on the analysis of the common temperature compensation methods, a temperature compensation model of pressure sensor based on the particle swarm optimization radial baAiming at the problem of temperature drift of micro-electro-mechanical system(MEMS) piezoresistive pressure sensor affected by ambient temperature, based on the analysis of the common temperature compensation methods, a temperature compensation model of pressure sensor based on the particle swarm optimization radial basis function (PSO-RBF) is proposed in this paper. Combined with the sample data collected in the calibration experiment, the nonlinear mapping relationship between the calibration pressure and the output voltage and temperature of the sensitive element is established, and the temperature compensation is realized. The results show that the proposed algorithm has better compensation prediction effect than the traditional least squares method, cubic spline interpolation method, standard RBF, PSO-BP, ELM neural network and other methods, and does not need to normalize the sample data, which has good engineering practice significance..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 828 (2023)
Study on Large Displacement Piezoelectric Stack Actuator for Resonant Diaphragm Pump
JIANG Xin, ZHU Yuchuan, and ZHANG Mingming
Aiming at the problems of small reciprocating motion displacement and low displacement amplification ratio in the existing resonant diaphragm pumps driven by piezoelectric vibrators, a piezoelectric stack actuator with large displacement is designed in this paper. The piezoelectric stack is used as an electro-mechanicaAiming at the problems of small reciprocating motion displacement and low displacement amplification ratio in the existing resonant diaphragm pumps driven by piezoelectric vibrators, a piezoelectric stack actuator with large displacement is designed in this paper. The piezoelectric stack is used as an electro-mechanical converter to improve the response speed, and a rectangular spring structure is adopted to ensure the stability of the system and improve the first order natural frequency of the system. The mathematical model of piezoelectric stack actuator is established, the displacement amplification ratio and natural frequency of each order are analyzed, and the related performance of the prototype is tested. The experimental results show that the output displacement of the piezoelectric stack actuator is 154 μm and the displacement magnification is 18.11 times under the sinusoidal signal with the input excitation amplitude of 60 V and frequency of 510 Hz. The piezoelectric stack actuator has high response speed and large output displacement, and can be used to improve the output performance of resonant diaphragm pump..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 833 (2023)
Valveless Piezoelectric Pump with Semi-Cylinder Bluff-Bodies in Conical Cavity
YAN Tianxiang, LONG Zhiwen, LI Chengqi, CHEN Hucheng, and QIN Jianhua
To improve the flow rate of the valveless piezoelectric pump with semi-cylinder bluff-bodies, combined with the unequal flow resistance characteristic of conical cavity, a valveless piezoelectric pump with semi-cylinder bluff-bodies in a conical cavity was designed in this paper, and the theoretical formula of its flowTo improve the flow rate of the valveless piezoelectric pump with semi-cylinder bluff-bodies, combined with the unequal flow resistance characteristic of conical cavity, a valveless piezoelectric pump with semi-cylinder bluff-bodies in a conical cavity was designed in this paper, and the theoretical formula of its flow rate was established. The flow velocity distribution of pump cavity was simulated numerically. The resistance characteristics of this pump and the valveless piezoelectric pump with semi-cylinder bluff-bodies were compared. The simulation results show that the valveless piezoelectric pump with semi-cylinder bluff-bodies in a conical cavity can achieve unidirectional fluid transportation, and its transportation capacity is better than that of the valveless piezoelectric pump with semi-cylinder bluff-bodies. The prototypes of two pumps were made, and the flow rate and pressure difference tests were conducted. The experimental results show that under 220 V driving voltage, the maximum flow rate and pressure difference of the valveless piezoelectric pump with semi-cylinder bluff-bodies in a conical cavity are 30.96 g/min and 394 Pa, respectively. Compared with the valveless piezoelectric pump with semi-cylinder bluff-bodies, both the flow rate and pressure difference have been improved..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 839 (2023)
[in Chinese]
NanogeneratorLI Chunlong, HUANG Hui, JU Dengfeng, LIU Hongjing, LIU Kewen, and GAO Lingxiao
A method based on ferroelectric dipole to enhance surface charge density of triboelectric generator was proposed. By using the ferroelectric properties of polyvinylidene fluoride (PVDF), a positive charge trap was formed in the triboelectric layer to enhance the electric generating performance of the triboelectric mateA method based on ferroelectric dipole to enhance surface charge density of triboelectric generator was proposed. By using the ferroelectric properties of polyvinylidene fluoride (PVDF), a positive charge trap was formed in the triboelectric layer to enhance the electric generating performance of the triboelectric material, so as to improve the surface charge density of the triboelectric nanogenerator. The PVDF film was fabricated by casting and uniaxial tensile process, and integrated into the triboelectric nanogenerator with vertical separation structure. The influences of the embedding direction, thickness and polarization intensity of the PVDF film on the output of the triboelectric nanogenerator were systematically studied. The results showed that the embedded PVDF piezoelectric film with a thickness of 100 μm and a maximum polarization electric field of 90 MV/m increased the peak power of the triboelectric nanogenerator by 2.6 times. This work has provided a new insight into regulating the properties of the triboelectric nanogenerator..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 845 (2023)
A Calculation Method for Horizontal Component of Oceanic Gravity Disturbance Vector
CAI Tijing, and WANG Wei
The gravity vector measurement contains information about the gravity direction (i.e., the deflection of the plumb line), which is crucial for determining the geoid. To obtain the horizontal component of oceanic gravity disturbance vector, a two-step method based on the strapdown inertial navigation system/global navigThe gravity vector measurement contains information about the gravity direction (i.e., the deflection of the plumb line), which is crucial for determining the geoid. To obtain the horizontal component of oceanic gravity disturbance vector, a two-step method based on the strapdown inertial navigation system/global navigation satellite system(SINS/GNSS) combined system is proposed for determining the horizontal component of the oceanic gravity disturbance vector. Firstly, the strapdown inertial navigation algorithm and Kalman filter are used to estimate and compensate for accelerometer bias and attitude angle errors. Then, based on the accurately estimated accelerometer bias and attitude angle errors, the calculation equation of the horizontal component of the gravity disturbance vector is presented. The model of the horizontal component of the gravity disturbance vector is described by using a second-order Markov random process and separated from the bias of the accelerometer. The forward-smoothing Kalman filter is used to accurately estimate the horizontal component of the gravity disturbance. The offline calculation of ship-borne test data shows that the internal coincidence accuracy of the horizontal component of the oceanic gravity disturbance vector is better than 2 mGal(1 Gal=1 cm/s2)..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 855 (2023)
Study on Linearization Control of Piezoelectric Actuator Based on Sliding Mode Controller
LING Jincheng, LIU Zhiqiang, ZHOU Zhenhua, and ZHOU Minrui
Aiming at the problem that the traditional Bouc-Wen model cannot accurately characterize the intrinsic hysteresis asymmetry of piezoelectric actuators thus caused the limited control precision, in this paper, a hysteresis modeling method based on the combination of traditional Bouc-Wen model and Hammerstein model is prAiming at the problem that the traditional Bouc-Wen model cannot accurately characterize the intrinsic hysteresis asymmetry of piezoelectric actuators thus caused the limited control precision, in this paper, a hysteresis modeling method based on the combination of traditional Bouc-Wen model and Hammerstein model is proposed. The control strategy based on the sliding mode control using Kalman state estimation is used to improve the control accuracy. First, the parameters of the hysteresis model combined with the traditional Bouc-Wen model and the Hammerstein structure are identified by using particle swarm optimization (PSO). Then, the Kalman observer is built based on the state space matrix of the second-order system. According to the state prediction of Kakman observer, the feedback compensation is made by using sliding mode law and the feedforward compensation is made by establishing the inverse model, forming a feedforwar-feedback composite compensation. The numerical simulation shows that the nonlinear model can well describe and predict the dynamic output of piezoelectric ceramic actuator in the range of 0-100 V peak value and 0-100 Hz excitation frequency. The displacement of the actuator is between 0 and 6 μm, the average hysteresis error of the traditional Bouc-Wen model is 0.654 95 μm and 0.186 39 μm, respectively, at 50 Hz, based on the traditional Bouc-Wen model and Hammerstein structure, the room mean square (RMS) error of feedforward proportion integration differentiation (PID) compensation is 0.088 5 μm, and the RMS error of feedforward sliding mode composite control compensation is 0.047μm, which is only 0.78% of the maximum output displacement, the maximum tracking error is only 0.153 μm, and the precision is improved by 78%, indicating that the proposed hysteresis model based on traditional Bouc-Wen model and Hammerstein structure and its compensation control algorithm are helpful to realize high-speed and wide-frequency ultra-precision positioning control of piezoelectric ceramic actuator..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 859 (2023)
Study on Composite Control System for Piezoelectric Ceramic Positioning Platform
[in Chinese], [in Chinese], [in Chinese], and [in Chinese]
A composite control system based on feedforward compensation is proposed to address the issue of reducing the accuracy of piezoelectric ceramic positioning platforms due to the inherent hysteresis characteristics of piezoelectric ceramics. Firstly, a feedforward model is established. A segmented Prandtl Ishlinskii modeA composite control system based on feedforward compensation is proposed to address the issue of reducing the accuracy of piezoelectric ceramic positioning platforms due to the inherent hysteresis characteristics of piezoelectric ceramics. Firstly, a feedforward model is established. A segmented Prandtl Ishlinskii model is proposed and applied to increase the fitting accuracy while avoiding complex solving processes,and a hysteresis inverse model with a modeling error rate of up to 0.69% is obtained. Secondly,a series proportional integral (PI) digital circuit,a sinusoidal excitation circuit,and a capacitor conversion circuit were designed for the feedback loop,further improving the control accuracy of the piezoelectric ceramic positioning platform. The test is carried out according to the national test standard GB/T 38614-2020.The measurement results show that the forward repetitive positioning accuracy and reverse repetitive positioning accuracy of the piezoelectric ceramic positioning platform are 0.013 1 μm and 0.015 5 μm,respectively, and the accuracy of the platform is 0.033 5 μm under the control of the designed composite control system. After calculating the reverse difference,the hysteresis error is 0.013%.Compared with the piezoelectric ceramic positioning platform with only feedforward control,the control accuracy has improved by 79.57%..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 866 (2023)
Research on a Tristable Piezoelectric-Electromagnetic CompositeEnergy Harvesters
PENG Zhaoyang, SONG Fang, and XIONG Yuzhong
In order to improve the energy conversion performance and conversion efficiency of the bistable piezoelectromagnetic complex energy harvester(BPEEH), a novel tristable piezoelectromagnetic complex energy harvester(TPEEH) is proposed on the basis of the typical BPEEH, which has a novel electromagnetic power generation dIn order to improve the energy conversion performance and conversion efficiency of the bistable piezoelectromagnetic complex energy harvester(BPEEH), a novel tristable piezoelectromagnetic complex energy harvester(TPEEH) is proposed on the basis of the typical BPEEH, which has a novel electromagnetic power generation device to further constitute the tristable system compared with the traditional BPEEH. In this paper, a mathematical model of the TPEEH structural device is developed and numerical analysis is performed to obtain the potential energy change function of the harvester system. Based on this, the effects of external excitation frequency, magnet spacing, and circuit load resistance on the output voltage and power of this collector were further verified experimentally. The experimental results show that the TPEEH collector has a maximum output voltage of 6.348 9 V under this condition when the magnetic distance is 16 mm, the external magnetic spacing is 26 mm, and the external excitation frequency is 10.2 Hz, while the collector obtains a maximum output power of 0.08 W when the external load resistance is 500 Ω. Therefore, compared with the conventional BPEEH collector, the TPEEH collector has the advantages of lower acquisition resonant frequency, wider acquisition band, and higher output voltage and power, which further improves the energy conversion performance and efficiency..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 872 (2023)
Theoretical Model and Simulation of Improved 1-3 Piezoelectric Composite
WANG Jiacheng, ZHANG Jinying, ZHONG Chao, and QIN Lei
For the application requirements of high electromechanical coupling coefficient and curved surface transducers, this paper proposes an improved 1-3 piezoelectric composite composed of piezoelectric ceramics, epoxy resin, and silicone rubber three-phase composites. Based on Newnhams series, parallel analysis, the theoreFor the application requirements of high electromechanical coupling coefficient and curved surface transducers, this paper proposes an improved 1-3 piezoelectric composite composed of piezoelectric ceramics, epoxy resin, and silicone rubber three-phase composites. Based on Newnhams series, parallel analysis, the theoretical model of the composite is derived, and the numerical calculations are conducted using Matlab. The effects of structural parameters of improved 1-3 piezoelectric composite on the thickness electromechanical coupling coefficient, equivalent density, and thickness frequency constant. The results show that when the volume fraction of ceramic-epoxy composite phase ranges from 0.2 to 0.5, and when the volume fraction of piezoelectric ceramics in ceramic-epoxy composite phase ranges from 0.6 to 0.7, the improved 1-3 piezoelectric composite has better performance parameters; The finite element simulation of composites are conducted using ANSYS software. The simulation results are compared with the theoretical calculation, and showed good consistency, verifying the accuracy of the theoretical model in evaluating material properties..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 878 (2023)
Research and Development of an Air-Coupled Ultrasonic Transducer
TU Xinyu, LOU Chenggan, JIN Hangchao, ZHONG Kai, CHEN Changjie, and LOU Jiangbo
The use of air-coupled ultrasonic transducers and the air medium presents issues with impedance mismatching, which can significantly reduce electro-acoustic conversion efficiency. To address this problem, this article introduces a novel acoustic matching layer made of hollow phenolic resin microspheres embedded in an eThe use of air-coupled ultrasonic transducers and the air medium presents issues with impedance mismatching, which can significantly reduce electro-acoustic conversion efficiency. To address this problem, this article introduces a novel acoustic matching layer made of hollow phenolic resin microspheres embedded in an epoxy resin matrix. The acoustic characteristics of this matching layer were thoroughly tested and analyzed. The test results indicate that the hollow phenolic resin microsphere matching layer demonstrates lower sound velocity and higher insertion loss compared to the hollow glass microsphere matching layer. Building upon these findings, an air-coupled ultrasonic transducer was developed. Two matched transducers were subjected to testing, and both the time-domain and frequency-domain characteristics of the received signals were analyzed, and compared their performance with the hollow glass microsphere matched layer transducers. The results revealed that compared with the hollow glass microsphere matching layer, the hollow phenolic resin microsphere matching layer can reduce the in-band undulation of the transducer, expand the -6 dB bandwidth of the transducer by more than 2 times, and reduce the tailing of the received signal in the time domain..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 892 (2023)
Design of New Piezoelectric Ceramic Driving Power Based on PB58
WANG Jie, and QIN Huibin
The piezoelectric ceramic driving power is a key component of the micro-displacement system. In order to meet the system's application requirements for high stability and high precision, a new drive power supply based on the PB58 high-voltage operational amplifier is designed in this paper. The STM32 microcontrolleThe piezoelectric ceramic driving power is a key component of the micro-displacement system. In order to meet the system's application requirements for high stability and high precision, a new drive power supply based on the PB58 high-voltage operational amplifier is designed in this paper. The STM32 microcontroller is used to control the input signal, receive and monitor the output signal status. The combination of feedback zero point compensation and noise gain compensation greatly improves the stability of the amplifier circuit. A system is set up and the testing and analysis were conducted. Ultimately, it was proven that the power supply system has the excellent characteristics of high stability, fast response speed, and high output power..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 898 (2023)
Design of Ultra-Wideband Multi-Input Multi-Output Slot Antenna with High Isolation Fed by Coplane Waveguide
YUE Zhihua, DU Chengzhu, and YANG Fuhui
An ultra-wideband (UWB) multi-input multi-output (MIMO) slot antenna with high isolation was designed in this paper in order to meet the requirements of ultra-wideband transmission for high rate wireless communication. It was fed by coplane waveguide (CPW) and printed on FR4 dielectric substrate with a relative permittAn ultra-wideband (UWB) multi-input multi-output (MIMO) slot antenna with high isolation was designed in this paper in order to meet the requirements of ultra-wideband transmission for high rate wireless communication. It was fed by coplane waveguide (CPW) and printed on FR4 dielectric substrate with a relative permittivity of 4.4. By cutting the corners to the antenna floor, the good impedance matching has been realized. The measured impedance bandwidth of the antenna is from 2.88 GHz to 11.18 GHz, and the fractional bandwidth reaches 118.1%. In order to reduce the coupling degree, the neutralization line structure is used between the two radiating elements of the antenna, which realizes the high isolation of the antenna. The experimental results show that in the working frequency band, the port isolation degree of the antenna is more than 20 dB. The envelope correlation coefficient (ECC) is less than 0.002 and the diversity gain (DG) is greater than 9.996 dB. The antenna has good diversity performance and is suitable for UWB wireless communication systems..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 903 (2023)
Ultrasonic Transducer Based on High-Performance Lead-Frees(K0.5Na0.5)NbO3-Based Ceramic
CHEN Xingfei, HUANG Yao, LI Xiaobing, SUN Fenglong, YANG Zhaoping, LI Yao, LUO Laihui, and ZHOU Changjiang
The (K0.5Na0.5)NbO3 ceramics, as an important high-performance lead-free piezoelectric material system, are expected to promote the lead-free development of medical ultrasound imaging transducers. The study on the effective doping modification of KNN ceramics was carried out. The KNN-based piezoelectric ceramics with eThe (K0.5Na0.5)NbO3 ceramics, as an important high-performance lead-free piezoelectric material system, are expected to promote the lead-free development of medical ultrasound imaging transducers. The study on the effective doping modification of KNN ceramics was carried out. The KNN-based piezoelectric ceramics with excellent piezoelectric properties were prepared by solid phase sintering method. The piezoelectric constant and the electromechanical coupling coefficient were up to 400 pC/N and 55%, respectively. Based on its high piezoelectricity and low acoustic impedance, a high-resolution and large-bandwidth medical ultrasound transducer with high-resolution and large-bandwidth was prepared. The transducer has an axial resolution of 47 μm, a bandwidth of 93%@-6 dB and a center frequency of 18.0 MHz. Using the prepared transducer to perform B-mode ultrasound imaging on a human tissue model, the high-resolution structure images of tubular tissue have been obtained. The results indicate that the KNN system ceramics are a kind of material with excellent comprehensive performance for medical high-frequency ultrasound imaging..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 910 (2023)
Experimental Analysis of Rotary Positioning Platform Driven by Single Piezoelectric Ceramic
MA Pengfei, CUI Liangyu, ZHONG Junjie, and HAN Jianxin
In order to achieve precise micro and nano-level rotation, a pure rotational micro-positioning platform driven by a single piezoelectric ceramic was designed based on a flexure hinge. The platform utilizes circular array flexible beams to realize motion guidance and decoupling, and increases the rotation range of the mIn order to achieve precise micro and nano-level rotation, a pure rotational micro-positioning platform driven by a single piezoelectric ceramic was designed based on a flexure hinge. The platform utilizes circular array flexible beams to realize motion guidance and decoupling, and increases the rotation range of the moving platform through a lever mechanism. Firstly, the restraining effect of the circular array flexible beam on the axial drift of the moving platform is verified through finite element simulation. Subsequently, the experiment is conducted to examine and analyze the motion characteristics of the flexible beam. The test results indicate that the mechanism exhibits good rotational accuracy, the axis drift is 0-0.23 μm in the positive direction of x axis and 0-4.59 μm in the negative direction of y axis, the rotation radian is up to 916 μrad, and the rotation accuracy is 0.53 μrad. The overall error after compensating for axial drift is 4.9% at most..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 917 (2023)
SC Cut Quartz Crystal Resonators with B Mode Self-Suppression
LI Peng, CHEN Pingping, and LU Xiao
The oven controlled crystal oscillators (OCXO) with SC cut quartz crystal overtone resonator require a band-pass circuits containing inductances to suppress B mode oscillation, which is unfavorable for the miniaturization of OCXOs. In this paper, the vibration model and the calculation model of equivalent circuit paramThe oven controlled crystal oscillators (OCXO) with SC cut quartz crystal overtone resonator require a band-pass circuits containing inductances to suppress B mode oscillation, which is unfavorable for the miniaturization of OCXOs. In this paper, the vibration model and the calculation model of equivalent circuit parameters of quartz crystal resonators were established in this paper. The discrepancy of normal current density distribution of the B mode and the C mode inside the electrode is used to tailor the electrode, and the B mode suppression electrode was designed to adjust the piezoelectric coupling efficiencies of two modes. A 19.2 MHz 3rd overtone SC cut crystal resonator with B mode suppression was successfully designed. The results show that the proposed method is helpful for miniaturizing OCXOs with SC cut quartz overtone resonator and achieving higher performance..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 922 (2023)
Research Progress in Lithium Niobate Bonding Technology for Optoelectronic Devices
KONG Hui, SHEN Hao, ZHANG Zhongwei, QIAN Yu, PU Siqi, XU Qiufeng, and WANG Qinfeng
Lithium niobate, as an excellent multifunctional crystal material, has been widely used in the fields of optics, acoustics, electricity and electronics. Some studies have shown that in the application of integrated optoelectronic devices, lithium niobate wafer bonding can increase the transmission frequency of the deviLithium niobate, as an excellent multifunctional crystal material, has been widely used in the fields of optics, acoustics, electricity and electronics. Some studies have shown that in the application of integrated optoelectronic devices, lithium niobate wafer bonding can increase the transmission frequency of the device, reduce losses, and achieve high integration density. This paper summarizes the research status of lithium niobate wafer bonding technology at home and abroad in recent years, introduces the analysis methods of bonding strength, and the latest progress of lithium niobate bonded wafers in integrated optoelectronic devices, and looks forward to the future development of lithium niobate bonding technology..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 926 (2023)
Signal Identification Method of Vibration Sensor System for Environmental Condition Monitoring
WANG Zhansheng, SHEN Xiaoming, ZENG Yizhe, ZENG Xiangbao, and XIE Tingyu
To address the problem of low accuracy in identifying intrusion events in environmental states in the vibration systems, this paper proposes a SCN-based neural network structure for recognizing perimeter intrusion vibration sensor signals. Firstly, four types of perimeter intrusion signals are collected by building a vTo address the problem of low accuracy in identifying intrusion events in environmental states in the vibration systems, this paper proposes a SCN-based neural network structure for recognizing perimeter intrusion vibration sensor signals. Firstly, four types of perimeter intrusion signals are collected by building a vibration sensor system. Then, the wavelet noise reduction is used to pre-process the signals. After that, the energy features, over-average rate and PAR features of the signals are extracted. Finally, four intrusion events of climbing, touching, impacting and shearing events are recognized by a stochastic configuration network (SCN) neural network. The recognition accuracy of the training set reached 92.7%, and the average recognition accuracy of the test set reached 90.7%. The experimental results show that the proposed method can effectively identify the perimeter intrusion signals..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 935 (2023)
Study on Irradiation Characteristics of Acousto-Optic Tunable Filter
LI Yu
This paper introduces the irradiation characteristics of the acousto-optic tunable filter device, the key acousto-optic medium tellurium dioxide crystals and the transducer lithium niobate crystals in the device. The radiation experiments included neutron irradiation (neutron fluence of1.5×1012 n/cm2@1MEV equivaleThis paper introduces the irradiation characteristics of the acousto-optic tunable filter device, the key acousto-optic medium tellurium dioxide crystals and the transducer lithium niobate crystals in the device. The radiation experiments included neutron irradiation (neutron fluence of1.5×1012 n/cm2@1MEV equivalent electrons) and ionizing radiation (total dose of 6×103 Gy(Si)). High-resolution X-ray diffraction (HRXRD) analysis of tellurium dioxide and lithium niobate crystals before and after irradiation showed no change in their X-ray diffraction peaks, indicating that their lattice constants remained unchanged. However, their rocking curves became wider, indicating that the absorbed radiation energy increased internal stresses within the crystals. An impedance analyzer was used to measure the electromechanical coupling coefficient of lithium niobate before and after irradiation, showing that irradiation reduced the electromechanical coupling coefficient by about 1%. Four different wavelengths of lasers, including 1064nm, were used to test the filtering function and diffraction efficiency of the acousto-optic tunable filter devices. The tests indicated that the filtering function was normal, and irradiation caused about a 2% reduction in diffraction efficiency, suggesting that the impact of irradiation on the acousto-optic tunable filters was minimal, making them suitable for deep space exploration under irradiation conditions..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 04, 2024
- Vol. 45, Issue 6, 941 (2023)