
Search by keywords or author
Journals >Piezoelectrics & Acoustooptics
Export citation format
A Comprehensive Review on the Development and Applications of Passive Acoustics Based on Piezoelectric Ultrasonic Transducers
MAO Yuchen, SHEN Jiandong, LIU Tao, YANG Jiaqian, DOU Hanjie, ZHANG Wangyang, and MU Xiaojing
This article delves into the applications of Micro-Electro-Mechanical Systems (MEMS) in the field of passive acoustics, with a particular focus on the principles of piezoelectricity, commonly used piezoelectric materials, and the design of sensing structures. The article begins by elucidating the fundamental concepts oThis article delves into the applications of Micro-Electro-Mechanical Systems (MEMS) in the field of passive acoustics, with a particular focus on the principles of piezoelectricity, commonly used piezoelectric materials, and the design of sensing structures. The article begins by elucidating the fundamental concepts of piezoelectricity, followed by an introduction to several key piezoelectric materials such as quartz, PZT (lead zirconate titanate), and ZnO (zinc oxide), which are widely employed in MEMS technology due to their superior piezoelectric properties. Subsequently, the article thoroughly analyzes sensing structures like cantilever beams and thin films, which efficiently convert acoustic energy into electrical signals. The article also specifically introduces three representative MEMS acoustic devices: MEMS microphones, MEMS hydrophones, and MEMS acoustic emission sensors, detailing their working principles and applications across various domains. Finally, the article summarizes the applications of MEMS acoustic devices in fields such as consumer electronics, industrial inspection, environmental monitoring, military, and medical applications, and provides an outlook on their future development trends..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 617 (2024)
MEMS Acoustic Sensor for Pipeline Intrusion Location Detection
LIU Tao, DOU Hanjie, LI Jun, LI Zhihao, ZHANG Jixuan, YANG Jiaqian, ZHANG Mingyang, and MU Xiaojing
Pipeline intrusion and damage will cause serious environmental pollution and significant property losses. Pipeline damage positioning technology based on acoustic technology has become a trend in technological development. This paper proposes a MEMS acoustic sensor based on PMUT, which achieves acoustic impedance matchPipeline intrusion and damage will cause serious environmental pollution and significant property losses. Pipeline damage positioning technology based on acoustic technology has become a trend in technological development. This paper proposes a MEMS acoustic sensor based on PMUT, which achieves acoustic impedance matching and high-reliability packaging through Alumina-Epoxy Resin filling. Two MEMS acoustic sensors are installed in the pipeline intrusion positioning detection system, and the pipeline is knocked to simulate the intrusion scene, and then the acoustic signal propagated in the pipeline is collected and analyzed. The results show that the propagation speed of the acoustic signal in the pipeline is 2 449 m/s, and the relative positioning error of the pipeline intrusion positioning detection method based on acoustic signals is less than 2%, which proves the feasibility of MEMS acoustic sensors for pipeline intrusion positioning monitoring..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 634 (2024)
Gear Fault Detection System Based on MEMS Acoustic Emission Sensor
ZHANG Jixuan, DOU Hanjie, LIU Tao, LI Zhihao, YANG Xiao, ZHANG Mingyang, MAO Yuchen, and MU Xiaojing
Acoustic emission sensors are widely used in real-time health detection of equipment. The traditional piezoelectric ceramic transducers have the problems of large volume, high energy consumption, difficult integration and high cost. In this paper, a hexagonal piezoelectric film acoustic emission sensor based on ScAlN iAcoustic emission sensors are widely used in real-time health detection of equipment. The traditional piezoelectric ceramic transducers have the problems of large volume, high energy consumption, difficult integration and high cost. In this paper, a hexagonal piezoelectric film acoustic emission sensor based on ScAlN is designed. The volume is Ø18 mm×6 mm. The sensitivity of surface wave and longitudinal wave is higher than 60 dB[Ref.V/(m/s)]in the bandwidth of 40-500 kHz. After the design and packaging of the matching layer, the gear fault detection system is built, which can effectively distinguish the normal gear and the broken tooth signal. The test results show that the piezoelectric film acoustic emission sensor based on Micro-Electro-Mechanical Systems (MEMS) has both high sensitivity and miniaturization, and has high reliability and accuracy in gear fault diagnosis..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 638 (2024)
Medium and High Frequency Self-Powered System Based on Array-Type Piezoelectric Energy Harvester
ZHAO Chenxi, WU Pengfan, QIU Yu, LIU Hongtao, LIU Yu, SONG Yihui, and MU Xiaojing
With the development of the Internet of Things (IoT), wireless self-powered sensing has become an important technical means for monitoring the airframe state and flight environment. However, airframe vibrations are characterized by a wide distribution range, high excitation frequencies, and a broad frequency domain, maWith the development of the Internet of Things (IoT), wireless self-powered sensing has become an important technical means for monitoring the airframe state and flight environment. However, airframe vibrations are characterized by a wide distribution range, high excitation frequencies, and a broad frequency domain, making it challenging for a single piezoelectric energy collector to capture energy effectively. To address these issues, this paper develops a self-powered sensing system based on an array-type piezoelectric energy collector. The system comprises an array-type piezoelectric energy harvester, a power management circuit, a sensing node, a low-power Bluetooth module, and a microcontroller. The piezoelectric energy harvester utilizes a piezoelectric thick-film scheme, achieving the highest average output power density of 4 mW·cm-3·g-2 at 693 Hz (resonant frequency) under 2 g acceleration. The power management circuit features an improved rectifier design and an undervoltage lockout (UVLO) circuit, enabling efficient energy transfer and release. The charging speed is 1.3 times faster than that of an ordinary rectifier, and the maximum output power reaches 1.32 mW. Combined with a microcontroller for timing control, the system achieves dynamic balance, allowing for the transmission of data readings at fixed intervals over an extended period of time..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 644 (2024)
Design and Optimization of Wideband Temperature-Compensated Surface Acoustic Wave Filters
TAN Fazeng, LI Hualin, MA Jinyi, CHEN Wenyuan, HU Minglang, DU Xuesong, and ZHAN Xuekui
This paper presents a design method for wideband temperature-compensated surface-acoustic-wave filters. By analyzing the effects of varying Euler angles of LiNbO3 substrates, distinct electrode materials, and thicknesses on the surface-acoustic-wave resonator frequency response and spurious wave suppression, the most fThis paper presents a design method for wideband temperature-compensated surface-acoustic-wave filters. By analyzing the effects of varying Euler angles of LiNbO3 substrates, distinct electrode materials, and thicknesses on the surface-acoustic-wave resonator frequency response and spurious wave suppression, the most favorable Euler angles and electrode configuration for a wideband temperature-compensated surface-acoustic-wave filter are determined. The fabricated wideband temperature-compensated surface-acoustic-wave filter exhibits a temperature coefficient greater than -18.9 × 10-6/°C, a -3 dB relative bandwidth of 7.84%, and an insertion loss of 0.93 dB; additionally, it demonstrates effective out-of-band rejection..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 651 (2024)
Design Method for a Miniaturized High-Performance FBAR Duplexer
ZHANG Zhixin, CHEN Chang’e, HAN Xixi, SHI Xianglong, WEI Jiagui, SU Bo, FAN Baijie, and LIN Shuchao
To meet the miniaturization requirements of duplexers in RF front-end applications, this paper employs a comprehensive approach, incorporating techniques such as topology design, matching network design, chip layout design, and package design. Consequently, a miniaturized high-performance film bulk acoustic wave resonaTo meet the miniaturization requirements of duplexers in RF front-end applications, this paper employs a comprehensive approach, incorporating techniques such as topology design, matching network design, chip layout design, and package design. Consequently, a miniaturized high-performance film bulk acoustic wave resonator (FBAR) duplexer was developed. The duplexer operates in the receive band frequency range of 1 805-1 880 MHz and the transmit band frequency range of 1 710-1 785 MHz. The insertion loss in both the RX and TX bands is less than 3.0 dB,with RX rejection in the TX band and TX rejection in the RX band exceeding 50 dB. Additionally, the isolation is greater than 50 dB. The product dimensions are 2.0 mm×1.6 mm×0.9 mm. The duplexer demonstrates characteristics of miniaturization, low insertion loss, high rejection, and high isolation, meeting system performance requirements..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 655 (2024)
Low Loss Dual-Band Wideband Filter Based on SIR
ZHANG Menglu, SUN Xinying, RONG Chuicai, XU Yun, and LIAO Yubo
In this study, a dual-frequency microstrip bandpass filter with a folded step impedance resonator structure is proposed. The filter is miniaturized by a novel parallel electrical coupling method, and the zero-degree feed structure is introduced to generate transmission zero points to improve the out-of-band suppressionIn this study, a dual-frequency microstrip bandpass filter with a folded step impedance resonator structure is proposed. The filter is miniaturized by a novel parallel electrical coupling method, and the zero-degree feed structure is introduced to generate transmission zero points to improve the out-of-band suppression performance. The experimental results show that the filter has a compact structure, low loss, and good out-of-band rejection performance. The center frequency of the passband is 2.4 GHz and 5.2 GHz, respectively. The in-band performance is good, and the minimum insertion loss is 0.72 dB and 0.69 dB, respectively..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 660 (2024)
Design of Miniaturized Anti-Pulse Dielectric Filter
JIANG Tingli, WEI Junjie, MA Rui, and NIE Xieping
The large volume of traditional high-power cavity and LC filters does not meet the miniaturization and lightweight requirements for communication equipment applications. In this paper, a high-power dielectric filter is designed using microwave ceramic material with a high Qf value and a high dielectric constant, signifThe large volume of traditional high-power cavity and LC filters does not meet the miniaturization and lightweight requirements for communication equipment applications. In this paper, a high-power dielectric filter is designed using microwave ceramic material with a high Qf value and a high dielectric constant, significantly reducing the filter size. A three-dimensional field co-simulation is employed, along with parameter extraction, to streamline the design process, and a power capacity analysis is performed. The filter demonstrates characteristics of small size, low loss, high suppression, and pulse resistance, successfully meeting the necessary requirements after production testing..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 664 (2024)
Design of Integrated S-band Ceramic Dielectric Filter
WEI Junjie, JIANG Tingli, and MA Rui
This study proposes a three-order dielectric filter design method using the CST 3D electromagnetic simulation software package. The transmission zero is generated by a cascade three-section (CT) cross-coupling structure between the source and second resonator, or load and third resonator to achieve high suppression reqThis study proposes a three-order dielectric filter design method using the CST 3D electromagnetic simulation software package. The transmission zero is generated by a cascade three-section (CT) cross-coupling structure between the source and second resonator, or load and third resonator to achieve high suppression requirements at higher frequencies. The second and third resonators’ open-end electrodes are connected to form a three-order filter structure to achieve low loss performance. The short-circuit end of the four resonators is shortened to expand the electrode debugging area to simplify filter debugging complexity. The integrated dielectric filter sample was fabricated using ceramic material with a dielectric constant of 45.99, and subsequently tested. The proposed dielectric filter had a 1 dB bandwidth of 117 MHz in the 2 084-2 104 MHz passband frequency range. The insertion loss (IL) was less than 1.2 dB, and the passband standing wave ratio was less than 1.28. The attenuation was 34.35 dB at a higher frequency of 2.2 GHz and 31.04 dB at a lower frequency of 1.6 GHz, and the size was 10.41 mm×3.7 mm×4.57 mm. Finally, it was confirmed that the test results were in good agreement with the simulation results..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 670 (2024)
A Novel Resonator Structure Suitable for Narrowband Filter
CHEN Siyi, XU Yutong, LI Nian, and CHEN Feng
Filters are essential components in the signal transmission process, serving to screen and filter transmitted signals. In this paper, we propose a novel resonator structure designed for narrow-band filters. The electromechanical coupling coefficient is reduced by stacking heterogeneous piezoelectric films with oppositeFilters are essential components in the signal transmission process, serving to screen and filter transmitted signals. In this paper, we propose a novel resonator structure designed for narrow-band filters. The electromechanical coupling coefficient is reduced by stacking heterogeneous piezoelectric films with oppositely oriented c-axes. First, the fundamental principle of the new narrow-band resonator structure is explained through finite element simulations. Furthermore, the traditional Mason circuit model is modified to account for the structure of the proposed resonator. Two transformers associated with four-port transmission lines are employed for the electrical modeling. A comparison of circuit simulation and finite element simulation results is presented to verify the accuracy of the equivalent circuit model. Finally, a basic narrow-band filter is constructed using the widely recognized ladder-type topology. The transmission characteristics of the filter are obtained through simulation, confirming the reliability of the narrow-band filter design..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 675 (2024)
Novel Structure for SuppressingTransverse Leakage in SAW Devices and Its Application
LI Shiguo, CHU Mengqun, HU Chengji, ZHENG Zeyu, DU Xuesong, DONG Jiahe, LU Chuan, LI Hualin, CHEN Yanguang, WANG Hongbin, MA Jinyi, and XIAO Qiang
Transverse leakage is a significant issue in Surface Acoustic Wave (SAW) filters and duplexers that utilize 42°YX-lithium tantalate(42LT) substrates. This leakage increases insertion loss, reduces bandwidth, and flattens the roll-off, negatively impacting the performance of SAW devices. In this paper, we propose aTransverse leakage is a significant issue in Surface Acoustic Wave (SAW) filters and duplexers that utilize 42°YX-lithium tantalate(42LT) substrates. This leakage increases insertion loss, reduces bandwidth, and flattens the roll-off, negatively impacting the performance of SAW devices. In this paper, we propose a wider dummy structure to suppress transverse leakage. The effectiveness of this structure is verified through finite element method (FEM) simulations. Furthermore, we extend this wider dummy structure to Band 40 and Band 41 SAW filters. Experimental results demonstrate that the structure enables SAW devices to achieve lower insertion loss, broader bandwidth, and steeper roll-off characteristics. Additionally, this novel structure has the potential to be applied to other SAW filter bands..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 680 (2024)
High Frequency Stability Analog Temperature Compensated Crystal Oscillator
HE Xudong, ZHANG Yifan, and DONG Chao
This study proposes a high frequency stability analog temperature compensated crystal oscillator. A combination of temperature sensors, first-, third-, fourth-, and fifth-order function voltagegenerators, adders, and other unit circuits were utilized to generate the temperature compensation voltage VC. This wassubsequeThis study proposes a high frequency stability analog temperature compensated crystal oscillator. A combination of temperature sensors, first-, third-, fourth-, and fifth-order function voltagegenerators, adders, and other unit circuits were utilized to generate the temperature compensation voltage VC. This wassubsequently input into the varactor diode in the VCO to compensate for the temperature vs. frequency of AT-cut quartz crystal. In comparison with traditional direct analog temperature compensation schemes, the proposed chipoffered a lower volume and resolved the frequency mutation issue that occurs in indirect digital temperature compensation schemes. The chip was fabricated using 0.18 μm processwith a compact area of only 1.5 mm×1.2 mm. Measurement results demonstrated that the compensation accuracy was within ±0.28×10-6 and the 1 kHz phase noise was lower than -143 dBc/Hz across a -40 to 85 ℃ temperature range..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 685 (2024)
Design and Implementation of K-Band Miniaturized Four-Channel Antenna Interface Unit
ZHONG Minghai
To meet the miniaturization requirements of airborne RF front ends, a K-band four-channel antenna interface unit was designed based on the System in Package (SiP) technology. A secondary superheterodyne frequency conversion framework was adopted in the proposed unit. Thus, the unit was mainly composed of two silicon-baTo meet the miniaturization requirements of airborne RF front ends, a K-band four-channel antenna interface unit was designed based on the System in Package (SiP) technology. A secondary superheterodyne frequency conversion framework was adopted in the proposed unit. Thus, the unit was mainly composed of two silicon-based dual-channel integrated SiP modules and two integrated phase-locked loop SiP modules. The silicon-based frequency conversion SiP module realized the stacking of different functional circuit packages with the Package on Package (PoP) architecture. It ensured good electromagnetic compatibility and achieved output spurious suppression. Moreover, the stacked silicon-based packages were implanted in the ceramic package via BGA to achieve highly reliable airtightness. Based on SiP technology, the volume of the four-channel antenna interface unit was merely 58.2 mm×40.3 mm×11.0 mm. Along with achieving excellent electrical performance, the volume and weight of the proposed unit were significantly reduced by more than 86% compared to a traditional antenna interface unit. Hence, the proposed unit has significant application potential on platforms with rigorous lightweight and miniaturization demands, such as airborne and missile-borne platforms..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 690 (2024)
Gold-Removal Process of Ceramic Packaged SAW Filter
TANG Panliang, LI Yafei, HUANG Ying, ZHANG Junchong, LENG Junlin, and MA Jinyi
The paper presents a tin-plating solution to remove gold using a carrier board for ceramic packaged SAW filters. Batch mounting of filters can be achieved using a tin-plating carrier board with external expansion solder pads. Meanwhile, reflow is performed on the heating table to dissolve the gold layer of the filter pThe paper presents a tin-plating solution to remove gold using a carrier board for ceramic packaged SAW filters. Batch mounting of filters can be achieved using a tin-plating carrier board with external expansion solder pads. Meanwhile, reflow is performed on the heating table to dissolve the gold layer of the filter pad. After removing the tin-plating filter, the solder on the surface of the pads is suctioned off using a vacuum tin gun to remove the gold. A detailed introduction to the solder-pad design of the carrier board is provided herein. The abovementioned operation is monitored using an infrared thermometer. After gold removal, the device is analyzed based on the pad surface and solder joint interface. Subsequently, verification via an environmental test is performed to confirm that the gold plating layer on the solder pad surface is completely removed and that the device demonstrates high reliability. The results provide a reference for the design of the gold-removal process for ceramic sealed devices..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 695 (2024)
Bonding-Surface-Cleaning Technology for Preparing Piezoelectric Single-Crystal Thin-Film Wafer
LIU Shanqun, DING Yuchong, CHEN Zheming, SHI Zibin, LONG Yong, ZOU Shaohong, YU Guiqiu, and ZHANG Li
High performance thin-film SAW filters demands strict requirements for the cleanliness of the bonding surface of the prepared piezoelectric single-crystal thin-film wafer. Currently, the most commonly used conventional cleaning technology do not efficiently remove pollutants, which generates residual particles after ioHigh performance thin-film SAW filters demands strict requirements for the cleanliness of the bonding surface of the prepared piezoelectric single-crystal thin-film wafer. Currently, the most commonly used conventional cleaning technology do not efficiently remove pollutants, which generates residual particles after ion implantation, thus resulting in numerous bubbles or voids on the bonded wafers. In this study, the conventional cleaning technology is improved. A two-step cleaning process using a sulfuric peroxide mixture for cleaning and a brushing technique using a new composite cleaning solution is proposed in this study. After performing the two-step cleaning process, the number of particles on the surface of the wafer reduced from 148 000 to 23, pollutants such as dirt and particles on the bonding surface are effectively removed, and the quality of the bonded wafers improved significantly. The developed cleaning technology has been applied to prepare piezoelectric LTOI single-crystal thin-film wafer materials..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 700 (2024)
Study on Dielectric Properties of (Ba,Sr)TiO3-Based Capacitor Ceramics Doped with MgNb2O6
CHEN Yingyi, CHEN Lei, PENG Daohua, CHEN Jiatian, CHEN Yinghe, HUANG Xinyou, and NIU Jien
MgNb2O6-doped (Ba0.71Sr0.29)TiO3((Ba,Sr)TiO3)-based capacitor ceramics were prepared by solid-state method. The influence of MgNb2O6(MNO) doping amount on the dielectric properties, phase composition, and microstructure of (Ba,Sr)TiO3-based ceramics were investigated by X-ray diffraction (XRD) and scanning electronic mMgNb2O6-doped (Ba0.71Sr0.29)TiO3((Ba,Sr)TiO3)-based capacitor ceramics were prepared by solid-state method. The influence of MgNb2O6(MNO) doping amount on the dielectric properties, phase composition, and microstructure of (Ba,Sr)TiO3-based ceramics were investigated by X-ray diffraction (XRD) and scanning electronic microscopy (SEM), among other tests. The results showed that the relativity permittivity of (Ba,Sr)TiO3-based capacitor ceramics decreased; dielectric loss increased, then decreased, and finally increased; the resistivity first decreased, then increased, and finally decreased; and withstand voltage strength (Eb) first decreased firstly, then increased, and finally decreased when MNO doping amount increased. When the doping amount of MNO was 2.0 wt%, the (Ba,Sr)TiO3 ceramics had a maximum dielectric constant of 1 670 and minimum dielectric loss of 0.005 6. When the doping amount of MNO was 8.0 wt%, (Ba,Sr)TiO3 ceramics had a maximum resistivity of 65.23×1010 Ω·cm and maximum withstand voltage strength of 7.7 kV/mm (DC). When the doping amount of MNO was 10.0 wt%, (Ba,Sr)TiO3 ceramics exhibited less percentage of capacitance variation with temperatures of +0.18% and -28.29%. (Ba,Sr)TiO3 ceramics doped with MNO had a perovskite structure. The doping of MNO can decrease capacitance variation with temperature..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 704 (2024)
Study on Phase Transitional Behavior and Temperature Stability of Piezoelectric Properties of K0.5Na0.5NbO3-xLiNbO3 Piezoelectric Ceramics
XIAO Rongzhen, XU Peng, and YAN Xiaobin
In this study, lead-free piezoelectric ceramics, based on the K0.5Na0.5NbO3-xLiNbO3 (KNN-xLN) system, were fabricated using a conventional method. The influence and mechanism of lithium niobate (LN) doping on the phase structure and temperature-dependent piezoelectric properties of KNN ceramics were meticulously investIn this study, lead-free piezoelectric ceramics, based on the K0.5Na0.5NbO3-xLiNbO3 (KNN-xLN) system, were fabricated using a conventional method. The influence and mechanism of lithium niobate (LN) doping on the phase structure and temperature-dependent piezoelectric properties of KNN ceramics were meticulously investigated through dielectric temperature spectroscopy and X-ray diffraction (XRD) analysis. Our findings reveal that LN has a solubility limit in KNN of less than 10 mol%. Within this limit, incorporating LN induces a shift in the Curie temperature (TC) of KNN-xLN ceramics toward higher temperatures, while the transition from orthorhombic to tetragonal phases (TO-T) is pushed to lower temperatures simultaneously. At room temperature, the ceramics exhibit the coexistence of orthorhombic and tetragonal phases, significantly amplifying their piezoelectric performance. An elevated TC improves the temperature stability of the ceramics’ piezoelectric properties; specifically, with an LN doping level of approximately 8 mol%, TC reaches approximately 479 ℃, and the piezoelectric properties of this component ceramic after 470 ℃ heat treatment remain 71% at room temperature. Beyond the solubility threshold, excess LN is prone to forming a secondary phase with potassium, and the residual LN, influenced by its pronounced pyroelectric effect, results in an apparent increase in the d33 coefficient of the ceramics as the heat treatment temperature increases..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 710 (2024)
Study of the Vibration State of 3-2 Ceramic-Air Composites
JING Sujie, YU Zhaoxian, WANG Hongwei, SHAO Zhen, and LI Linnuo
Type 3-2 ceramic-air composites were developed to improve the structure of type 1-3 piezoelectric composites. Type 3-2 piezoelectric materials are composites of PZT-5A and air. In this study, the possible vibration patterns of a type 3-2 piezoelectric material were first investigated through modal analysis using the ANType 3-2 ceramic-air composites were developed to improve the structure of type 1-3 piezoelectric composites. Type 3-2 piezoelectric materials are composites of PZT-5A and air. In this study, the possible vibration patterns of a type 3-2 piezoelectric material were first investigated through modal analysis using the ANSYS finite element simulation software. Then, the steady state response of the sensitive element under sinusoidal signal excitation was analyzed based on the harmonic response. The effect of the ceramic volume percentage of the piezoelectric material on its vibrational characteristics was investigated, along with the variation of the vibrational displacement with frequency. Finally, a physical sample of a type 3-2 piezoelectric material was experimentally prepared, and the vibration condition of a piezoelectric oscillator was measured using a laser vibrometer to verify the simulation data. The results showed that under the excitation of a sinusoidal signal, the piezoelectric crystal column experienced length-stretching vibration, and the maximum value of the vibration displacement was 3.840 nm. Changing the ceramic volume occupancy ratio did not significantly affect the vibration displacement..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 716 (2024)
Bi-Directional Distance Detection Method Based on Dynamic pMUT
TAO Jinyan, LI Jiadong, DAI Ye, SHANG Wenling, WANG Danrui, FENG Changkun, HU Yimin, YAO Shutao, and TA Guifeng
Ultrasonic sensors are widely used inmobile robots for spatial perception. To extend the spatial perception range, current mobile robots often adopt a multi-sensor approach, resulting in a sensing system that is large in volume, high in power consumption, and complex in design. In this paper, wepropose a detection methUltrasonic sensors are widely used inmobile robots for spatial perception. To extend the spatial perception range, current mobile robots often adopt a multi-sensor approach, resulting in a sensing system that is large in volume, high in power consumption, and complex in design. In this paper, wepropose a detection method based on a dynamic piezoelectric micromachined ultrasonic transducer (pMUT) that realizes bi-directional detection with a single device, effectively doubling the measurement range while maintaining a compact size and low power consumption. This method leverages the two-way vibration characteristics of the piezoelectric film to capture ultrasonic echoes in both directions, enabling distance measurements in two directions. Results indicate that the one-way measurement range remains unchanged with this method, while distances to obstacles in both directions can be accurately measured, reflecting their corresponding directions under dynamic conditions. This method simplifies the sensing system and is expected to play an important role in obstacle avoidance for measurement..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 722 (2024)
Ring-Shaped Piezoelectric Driver Capable of Driving Two Types of Rotors
LI Zheng, WANG Haibo, WANG Kaiwen, GAO Shuai, and SUN Hexu
In order to meet the multi-direction motion needs of micromotors, a piezoelectric actuator with bidirectional motion was studied, and its performance was analyzed. The actuator could drive both linear and cylindrical actuators, which makes this piezoelectric actuator suitable for multiple working environments. This papIn order to meet the multi-direction motion needs of micromotors, a piezoelectric actuator with bidirectional motion was studied, and its performance was analyzed. The actuator could drive both linear and cylindrical actuators, which makes this piezoelectric actuator suitable for multiple working environments. This paper first describes the basic structure and principle of a piezoelectric actuator. An actuator model was established, and the deformation mode of the piezoelectric actuator was analyzed using the finite element method. Experimental results showed that the optimal operating frequency of the piezoelectric actuator was 2.27 kHz, and the optimal driving voltage amplitude was 150 V. Under an excitation signal, the maximum speed of the linear piezoelectric driver reached 249 mm/s, and the maximum load capacity was 20 N. The piezoelectric actuator could realize bidirectional motion and stable output..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 729 (2024)
Research on a Four-Legged Piezoelectric Mobile Robot Based on Inertial Actuation
LI Yunfei, ZHU Xijing, LI Jing, and GAO Guodong
In this study, based on the modular design concept, an L-type piezoelectric actuator is applied to the development of a piezoelectric mobile robot. The mobile robot is composed of four circumferentially distributed L-type piezoelectric actuators and connecting platforms. This contribution representsa simple and compactIn this study, based on the modular design concept, an L-type piezoelectric actuator is applied to the development of a piezoelectric mobile robot. The mobile robot is composed of four circumferentially distributed L-type piezoelectric actuators and connecting platforms. This contribution representsa simple and compact structuredesigned to achieve a significant range of high-precision motion in a 2-DOF plane. The mobile robot was processed and assembled, and a test platform was developed to investigate its motion output characteristics. Experimental results demonstratedthat the proposed mobile robot showed a good comprehensive performance including high precision, speed, and stability, and strong carrying capacity. Its motion resolution, maximum motion speed, and carrying capacitywere 1 μm, 46 mm/s, and 75 g, respectively. Finally, the proposed mobile robot has broad application prospects in terms of micro and nano operations, wafer defect detection, and ultra-precision machining..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 741 (2024)
Modeling and Performance Analysis of Piezoelectric Energy Harvester with Force Amplification Function
XIE Jianhong, LIU Liexin, and ZHU Liqing
To improve the energy conversion efficiency of piezoelectric energy harvesters, a piezoelectric stack was coupled into a force amplification framework to construct a piezoelectric energy harvester with a force amplification function. Based on the constitutive equation of the piezoelectric effect, theoretical modeling, To improve the energy conversion efficiency of piezoelectric energy harvesters, a piezoelectric stack was coupled into a force amplification framework to construct a piezoelectric energy harvester with a force amplification function. Based on the constitutive equation of the piezoelectric effect, theoretical modeling, finite element simulations, and analyses were performed on a single piezoelectric stack. Based on the Euler Bernoulli beam principle, a theoretical model of the force amplification factor for the framework was established. The sensitivity analysis method of Sobol was used to determine the geometric parameters of the sensitive force amplification factor for the framework. A genetic algorithm and finite element modeling were applied to optimize the structure of the force amplification framework. Based on the optimal structure of the force amplification framework, a lumped parameter theoretical model of a piezoelectric energy harvester was established, and a numerical analysis was carried out. The results showed that under non-resonant excitation, the effective output voltage and maximum output power of the piezoelectric energy harvester were 3.022 V and 543.375 μW, respectively, which were 7.74 and 58.5 times the effective output voltage and maximum output power of the piezoelectric stack alone, respectively. Compared with the piezoelectric stack alone, the piezoelectric energy harvester could significantly improve the output voltage and output power under non-resonant excitation..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 747 (2024)
Study on Flexural Vibration of Lithium Niobate Beam with an Inversion Layer
LIU Chong, HUANG Dejin, CHEN Hui, and MA Tingfeng
A new type of lithium niobate beam with an inversion layer was investigated in this study. The symbols for the piezoelectric constants of this inversion layer were the opposite of those of a regular layer. Thus, the bending vibration of the lithium niobate beam could be excited by an electric field in the thickness dirA new type of lithium niobate beam with an inversion layer was investigated in this study. The symbols for the piezoelectric constants of this inversion layer were the opposite of those of a regular layer. Thus, the bending vibration of the lithium niobate beam could be excited by an electric field in the thickness direction. The displacement and potential were expressed in a power series form along the thickness and width directions of the beam, and one-dimensional equations of the bending motion of the lithium niobate beam were derived. These one-dimensional equations were used to analyze the dispersion relationship of the wave propagating along the length direction of the beam in order to verify its accuracy. The dispersion curves obtained from these one-dimensional equations coincided with those obtained using the three-dimensional theory in a small wavenumber range. The output power density and output efficiency of a beam-type piezoelectric energy harvester were analyzed using the one-dimensional equations. The results were compared with those derived using the two-dimensional and three-dimensional theories. The results indicated that the results obtained from the one-dimensional equations were very close to those obtained using the three-dimensional equations, suggesting their great application potential in the field of piezoelectric devices..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 755 (2024)
Numerical Simulation of Monitoring Rust Expansion of Prestressed Concrete Using Piezoelectric Wave Method
PENG Zhong, LIANG Yabin, FU Wen, YAN Xiaowei, and JIANG Tianyong
Inherent to the influence of multiple factors, including environmental conditions and service time, prestressed steel strands corrode over time. This leads to concrete rust expansion and crackingand poses a critical threat to structural durability. To monitor the extent of cracking in this context, this study proposes Inherent to the influence of multiple factors, including environmental conditions and service time, prestressed steel strands corrode over time. This leads to concrete rust expansion and crackingand poses a critical threat to structural durability. To monitor the extent of cracking in this context, this study proposes a finite element simulation method based on piezoelectric wave propagation. Using Abaqus, a micro-scale model comprising mortar, aggregate, structural rebars, prestressed steel strands, and piezoelectric ceramics was constructed. By analyzing the electromechanical coupling process, concrete crack development induced by steel strand rust expansion was comprehensively monitored. The findings demonstrated that as corrosion progressed from the onset to mild stages, the piezoelectric signal-peak voltage increased by 13.4%, while the first wave reception time decreased by 1.2%. From the mild to accelerated corrosion stages, and up to the theoretical corrosion rate stage, influenced by corrosion-induced cracks, the peak voltage decreased, and the first wave reception time extended. Specifically, the voltage decreased by 6.6% and 48.6%, and first wave reception time increased by 6.0% and 29.8%, respectively. Based on the results of validation experiments, with discrepancies of less than 0.32 mV, the reliability of the proposed piezoelectric wave propagation method for monitoring prestressed concrete rust expansion using finite element models was confirmed..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 762 (2024)
Acousto-Optic Properties and Applications of GaP Crystal
WU Wei, HAO Jianhua, LINGHU Meiao, ZHU Ji, ZHOU Jianguo, GAO Weisong, and TAN Jiangli
GaP crystal is an excellent material for developing acousto-optic modulators (AOMs) because it possesses a high acousto-optic (AO) figure of merit, outstanding sound velocity, and a low acoustic attenuation coefficient. In this study, important GaP crystal AO parameters were tested and evaluated. A high-speed fiber AOMGaP crystal is an excellent material for developing acousto-optic modulators (AOMs) because it possesses a high acousto-optic (AO) figure of merit, outstanding sound velocity, and a low acoustic attenuation coefficient. In this study, important GaP crystal AO parameters were tested and evaluated. A high-speed fiber AOM with an optical pulse rise time of 6.6 ns, a high-frequency AOM with shift frequency of 1.5 GHz, and a large-bandwidth fiber AOM with 3 dB shift bandwidth of 125 MHz based on GaP crystal were developed..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 771 (2024)
Quantitative Identification of Surface Cracks by Laser Ultrasound Using Empirical Wavelet Transform
HAI Lianghao, ZHAO Jiyuan, WANG Chenwei, YAN Jiangtao, and GUO Miao
Laser ultrasonic detection technology is used in the field of additive manufacturing to quantitatively identify surface cracks in metal additive parts. However, the laser ultrasonic signal has serious multi-mode mixing, a complex waveform, and a low signal-to-noise ratio. An empirical wavelet transform technique is proLaser ultrasonic detection technology is used in the field of additive manufacturing to quantitatively identify surface cracks in metal additive parts. However, the laser ultrasonic signal has serious multi-mode mixing, a complex waveform, and a low signal-to-noise ratio. An empirical wavelet transform technique is proposed to decompose the laser ultrasonic signal and use the difference between the peaks and troughs of the defect echoes of surface waves to quantitatively identify surface cracks in metal additive parts. The time-frequency characteristics of a laser ultrasonic signal were analyzed, and its surface wave modes were decomposed and adaptively extracted using an empirical wavelet transform. The differences between the peaks and troughs of the original signal and a surface wave signal extracted using the empirical wavelet transform were analyzed in the time range with or without a crack reflected echo. Then, the scanning position-differences between the peaks and troughs of the original signal and the surface wave signal were determined. The comparison showed that the latter could better determine the starting and ending positions of a crack. The absolute error of the crack detection results was less than 0.4 mm, and the relative error was less than 6.00%. This method was effective and feasible for feature extraction and the quantitative identification of laser ultrasonic signals, and it provides a powerful tool for the non-contact detection of surface crack defects in metal additive parts produced in a complex additive manufacturing environment..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 776 (2024)
Research on Highly Sensitive Micro-Pressure Sensing Technology Based on Fiber-Optic Fabry-Pérot Interferometer
YANG Di, XING Meihua, LIU Qinpeng, LIU Bo, and YAN Cheng
Fiber optic sensors are increasingly used in the field of battery safety monitoring. Because of the difficulty measuring the tiny air pressure changes inside an energy storage battery, this study utilized a structural model of a fiber optic Fabry-Prot (FP) cavity end-face coating. The relationships between the film thiFiber optic sensors are increasingly used in the field of battery safety monitoring. Because of the difficulty measuring the tiny air pressure changes inside an energy storage battery, this study utilized a structural model of a fiber optic Fabry-Pérot (FP) cavity end-face coating. The relationships between the film thickness, effective radius, and cavity length were studied, and their mutual constraints and theoretical foundations were explored in depth. A miniaturized fiber optic micro-pressure sensor with high sensitivity and high accuracy was designed. This micro-pressure sensor had a sensitivity of -239.836 nm/MPa and linearity of 0.998. It showed good linearity and stability in a pressure range of 100 kPa. The sensor was compact, simple, and inexpensive to fabricate and had high sensitivity and excellent pressure response characteristics..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 787 (2024)
Fiber Bragg Grating Elastic Diaphragm Sensor for Accurate Detection of Liquid Level
DU Feng, YAO Jiannan, TAO Yifei, XU Yuan, DING Chao, and LIU Yang
To detect liquid levels accurately, a liquid-level sensor is fabricated by coupling fiber Bragg grating (FBG) and an elastic diaphragm. The sensor is composed of two FBGs (FBG~~1 and FBG~~2), an elastic diaphragm, an elastic rubber sealing gasket, a hollow tube (an air duct), and an FBG fixing device. The FBG fixing deTo detect liquid levels accurately, a liquid-level sensor is fabricated by coupling fiber Bragg grating (FBG) and an elastic diaphragm. The sensor is composed of two FBGs (FBG_1 and FBG_2), an elastic diaphragm, an elastic rubber sealing gasket, a hollow tube (an air duct), and an FBG fixing device. The FBG fixing device is composed of polymethyl methacrylate. FBG_1 and FBG_2 are fixed to the surfaces of elastic diaphragms. FBG_1 is used to monitor the liquid level and temperature. FBG_2 is encapsulated in a stainless-steel capillary tube to detect the temperature and mitigate the adverse effect of liquid-phase temperature changes on liquid-level measurement. The effect of the elastic-diaphragm thickness on liquid-level measurement is experimentally investigated to improve the linearity of the sensor’s liquid-level measuring capabilities. Additionally, we investigate the effect of the liquid-level change rate and external vibration on the liquid-level measurement accuracy. The results show that under an elastic-diaphragm thickness of 2 mm, the sensor’s linear range for detecting the liquid level is 0-380 cm, with a sensitivity of (19.65±6.3) pm/cm. The sensor can accurately monitor the liquid level within a liquid-level change rate of 0-100 cm/min and an external vibration intensity of 0-5.27 mm/s, with a maximum detection error of 7.2%..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 794 (2024)
Sensing-Performance Analysis of Quasi-Distributed FBG Steel Strands and Experimental Study on Deformation Monitoring of RPC Beams
SHEN Quanxi, CAO Yang, XIONG Chengyang, HUANG Jiazhu, LIU Rong, and ZHU Wanxu
To address the monitoring of the stress state of prestressed steel strands in prestressed concrete structures, a groove preloading encapsulation quasi-distributed FBG technology is proposed to solve the low survival rate and insufficient monitoring range of FBG. The sensing performance of quasi-distributed FBG steel stTo address the monitoring of the stress state of prestressed steel strands in prestressed concrete structures, a groove preloading encapsulation quasi-distributed FBG technology is proposed to solve the low survival rate and insufficient monitoring range of FBG. The sensing performance of quasi-distributed FBG steel strands and their monitoring effect on the stress state of concrete structures are investigated via cyclic tension and prestressed RPC-beam loading tests. The results show that the survival rate of the FBG is 100%, the strain sensitivity is 0.001 18-0.001 20 nm/με, the strain transfer rate β≥0.98, the linearity ≤2.096%, the hysteresis ≤1.043%, the repeatability ≤3.615%, and the total uncertainty ≤3.881%. The quasi-distributed FBG steel strand accurately identifies the damage process of the RPC beams. The cracking loads of 45% fptk, 65% fptk, and 75% fptk prestressed RPC beams are 100, 130, and 140 kN, respectively, and the yield loads of the corresponding longitudinal bars are 260, 280, and 300 kN, respectively. The deflection of RPC beams and the strain of steel strands indicate a parabolic distribution, with maximum deflections of 27.691, 20.153, and 14.602 mm, respectively, and maximum strains of 4 163.025 με, 3 715.126 με, and 1 658.487 με, respectively. The quasi-distributed FBG provides ideas for the overall monitoring of prestressed structures..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 801 (2024)
Addressing Receiving Strategy and Circuit System Design of 8+8 Ultrasonic Sensor Array Based on PZT
SONG Shoupeng, and SHAO Wenjin
The signal-receiving method of the addressing ultrasonic transducer array differs from that of the traditional ultrasonic transducer array. The number and distribution range of receiving array elements can be flexibly selected to achieve variable receiving aperture with a simplified circuit scale. In this study, an 8+8The signal-receiving method of the addressing ultrasonic transducer array differs from that of the traditional ultrasonic transducer array. The number and distribution range of receiving array elements can be flexibly selected to achieve variable receiving aperture with a simplified circuit scale. In this study, an 8+8 (64 element) scale addressing excitation ultrasonic array receiving strategy based on lead zirconate titanate (PZT) is proposed, and an addressing receiving circuit based on a microprocessor and PMOS electronic switch is designed. The electrical characteristics of the ultrasonic array are tested and analyzed. The echo signals of the bottom surface of aluminum and steel blocks are tested in four addressing receiving modes: single-array element, whole-row array elements, whole-column array elements, and all array elements..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 813 (2024)
Investigation of Exponential Horns in Flexural Mode Vibrations
FU Zhiqiang, WANG Hanlve, MU Ziyi, CHEN Dongmin, XIAO Yang, and LIU Xinghao
In this paper, an approximate method for calculating the resonance frequency of anexponential horn is proposed. Using the principle of equal mass, the exponential horn is approximated as a cylindrical bar. Frequency equations for flexural vibration are derivedbased onboth Euler-Bernoulli theory and Timoshenko theory. TIn this paper, an approximate method for calculating the resonance frequency of anexponential horn is proposed. Using the principle of equal mass, the exponential horn is approximated as a cylindrical bar. Frequency equations for flexural vibration are derivedbased onboth Euler-Bernoulli theory and Timoshenko theory. The first three resonance frequencies of flexural vibration are calculated using Pythonforboth theoriesand are compared with resultsobtained via the finite element method (FEM). Theproposedapproximate method is shown to be suitable for calculating the resonance frequency of anexponential horn, providedthat the difference in radius between its two ends is minimal..
Piezoelectrics & Acoustooptics
- Publication Date: Jan. 17, 2025
- Vol. 46, Issue 5, 822 (2024)