Journals >Piezoelectrics & Acoustooptics
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2024
Volume: 46 Issue 6
29 Article(s)
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Review of Surface Acoustic Wave-Based Gas Sensor
CUI Baile, YANG Qiming, and WANG Wen
Surface acoustic wave (SAW) gas sensing technology has the characteristics of high sensitivity, fast response, miniaturization and lightweight because of its unique acoustic sensing structure and force-acoustic-electric physical field coupling sensing mechanism, which makes it gradually become one of the emerging gas sSurface acoustic wave (SAW) gas sensing technology has the characteristics of high sensitivity, fast response, miniaturization and lightweight because of its unique acoustic sensing structure and force-acoustic-electric physical field coupling sensing mechanism, which makes it gradually become one of the emerging gas sensing technologies that people pay close attention to. Based on the SAW propagation and sensing theory, this paper introduces in detail the research progress of SAW gas sensing effect and mechanism, sensor device design and preparation, sensor signal acquisition and processing, etc. Besides, the potential application of SAW gas sensors in many fields such as new energy, aerospace, national defense, industrial control and intelligent manufacturing and its development trend are discussed..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 827 (2024)
Research on SAWR Sensing Based on Impedance-Loaded Principle
LIU Xiangyu, CHEN Zhijun, PANG Qiqi, LIU Qingrui, and XUE Xinshuo
As a new type of passive wireless sensor, surface acoustic wave resonator has application potential in many occasions, but it depends on the direct effect of the object to be measured on the resonator itself. In order to expand the application range, the reactance sensitive element is utilized as one of the components As a new type of passive wireless sensor, surface acoustic wave resonator has application potential in many occasions, but it depends on the direct effect of the object to be measured on the resonator itself. In order to expand the application range, the reactance sensitive element is utilized as one of the components of the impedance matching network, and the impedance-loaded resonator-type sensor based on the low-mismatch network is designed. The sensing principle and the implementation essence of the low-mismatch network are analyzed. Furthermore, the scheme including pre-bias device is proposed, which not only moves the resonant frequency of the resonator itself to the middle of the impedance measurement range, but also doubles the frequency sensitivity range. The low-mismatch network test circuit board is made and the theory is verified. Finally, the reasons for the deviation between the measurement and the theory are analyzed, and the improvement direction of the theoretical model is put forward..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 840 (2024)
Dual-Antenna Differential SAW RFID Positioning for Unmanned Trains
QIAO Liangying, TANG Zhengkai, DU Shan, WU Juan, XU Hua, LIU Yijiang, SHI Ruchuan, and HAN Tao
The unmanned driving of industrial trains are key links in the upgrading of traditional industries. However, the industry lacks positioning technology that fulfills the requirements of high reliability, high precision, and low maintenance in the face of harsh environments, such as high temperature, dust, and metal inteThe unmanned driving of industrial trains are key links in the upgrading of traditional industries. However, the industry lacks positioning technology that fulfills the requirements of high reliability, high precision, and low maintenance in the face of harsh environments, such as high temperature, dust, and metal interference. SAW RFID technology has the characteristics of wireless passivity, high-temperature resistance, and resistance to harsh environments. This paper proposes a positioning method based on dual-antenna time-delay difference. Compared with single antenna ranging positioning, the proposed positioning method offsets the influence of environmental temperature and improves positioning accuracy and reliability. A time-delay measurement method based on fractional Fourier transform was studied. Simulation and experimental results show that the delay measurement error can be reduced to one-third of that of the matched filtering method, with an accuracy of 0.35 ns. The experiment based on the built platform showed a positioning accuracy of 6.2 cm, and the error was reduced to 3.48 cm in a shorter interval. Finally, the system was preliminarily applied in a steel plant..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 846 (2024)
Research on High Sensitivity Wireless Surface Acoustic Wave Sensor Reading System
HUANG Honghui, CAO Junhao, TONG Ajian, HE Tianyi, GONG Zhirong, and LUO Wei
At present, research on surface acoustic wave (SAW) sensor reading systems both domestically and internationally mainly focuses on the performance indicators of the sensors, with relatively less research on wireless transmission systems for readers. The performance of readers is often affected by factors such as isolatAt present, research on surface acoustic wave (SAW) sensor reading systems both domestically and internationally mainly focuses on the performance indicators of the sensors, with relatively less research on wireless transmission systems for readers. The performance of readers is often affected by factors such as isolation and timing control, which prevent their full potential and severely limit the system’s ability to read remotely. In response to this issue, this article conducts in-depth research on the factors that affect the performance of SAW wireless transmission systems, and analyzes and processes the exponential attenuation echo signal and system noise unique to SAW, further improving the signal-to-noise ratio of the echo signal and achieving a SAW reader system with high receiving sensitivity and high integration. The experimental results show that the wired receiving sensitivity of the SAW reader system can reach -110 dBm, and it can achieve wireless detection with demodulation accuracy of ±0.5 ℃ at a distance of 2 m, indicating its long-distance and high-precision reading capability..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 854 (2024)
A Two-Dimensional Dual-Path Orthogonal Surface Acoustic Wave Vector Magnetic Field Sensor
WU Yutong, JIA Yana, and WANG Wen
Surface acoustic wave (SAW) vector magnetic field sensors demonstrate considerable potential for a range of applications, given their ability to respond with high directionality to the direction of the magnetic field in space. However, single-pass sensors are afflicted with issues such as response randomness and low reSurface acoustic wave (SAW) vector magnetic field sensors demonstrate considerable potential for a range of applications, given their ability to respond with high directionality to the direction of the magnetic field in space. However, single-pass sensors are afflicted with issues such as response randomness and low reliability, which restrict their deployment in precise magnetic field measurements. In response to the need for high-sensitivity SAW magnetic field sensors for the detection of space vector magnetic fields, this study proposes a highly sensitive SAW vector magnetic field sensor and a two-dimensional dual-path orthogonal structure. The sensor employs a planar semiconductor process to deposit a metallic aluminum transducer on an ST-90°X quartz substrate, thereby forming a delay line structure. Additionally, an anisotropic CoFeB magneto-sensitive thin film is incorporated into the acoustic propagation path through magnetron sputtering. The experimental results demonstrate that the designed 200 MHz SAW magnetic field sensor exhibits a phase response sensitivity of 55.214（°）/Oe when the SAW propagation direction is perpendicular to the applied magnetic field. Furthermore, the directional phase response exhibits a notable difference under different directional magnetic fields, and the sensor demonstrates good repeatability and stability. The two-dimensional dual-path orthogonal structure preserves the high sensitivity characteristics of the single-path element, offering a novel approach to achieve high-precision two-dimensional all-plane magnetic field detection..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 860 (2024)
A High Performance SAW Torque Sensor
ZHOU Shuo, GAO Zihang, XIAO Qiang, WANG Weibiao, and FAN Yanping
Torque measurement is an essential method for assessing whether the output power of a power system meets operational requirements, serving as a critical source of information for equipment operational status and fault pre-warning. Surface Acoustic Waves (SAW) sensors, with their passive and wireless characteristics, arTorque measurement is an essential method for assessing whether the output power of a power system meets operational requirements, serving as a critical source of information for equipment operational status and fault pre-warning. Surface Acoustic Waves (SAW) sensors, with their passive and wireless characteristics, are particularly well-suited for torque measurement of rotating shafts, overcoming the challenges in energy and signal transmission encountered with active torque sensors in rotational applications. To achieve high-precision SAW torque sensing, this study focuses on the selection of piezoelectric substrate materials, the design of high-Q resonators, and the development of a high-accuracy frequency demodulation algorithm for SAW sensor echo signals. The designed SAW torque sensor was tested, achieving a load nonlinearity of 0.183%, unload nonlinearity of 0.160%, load repeatability of 0.260%, unload repeatability of 0.103%, and hysteresis of 0.299%, thereby demonstrating high-precision torque sensing capabilities..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 865 (2024)
Design and Simulation Analysis of Surface Acoustic Wave Cryogenic Sensors with Double-Electrode Interfingered Transducer
YE Mengying, CUI Yongjun, and WANG Hongliang
A 128°YX-cut lithium niobate (LiNbO3) delay-line-type surface acoustic wave (SAW) temperature sensor with a dual-electrode interdigitated transducer (IDT) was designed to meet the demand for temperature measurements in low-temperature, harsh environments. A temperature-sensor model was built using COMSOL software,A 128°YX-cut lithium niobate (LiNbO3) delay-line-type surface acoustic wave (SAW) temperature sensor with a dual-electrode interdigitated transducer (IDT) was designed to meet the demand for temperature measurements in low-temperature, harsh environments. A temperature-sensor model was built using COMSOL software, and the optimal model parameters were determined. The sensor was tested within a temperature range of -196 ℃ to 100 ℃. According to the simulation results, the electromechanical coupling coefficient of the sensor with the dual-electrode finger structure was 5.35%. Moreover, the sensor’s resonance frequency exhibits a strong linear relationship with temperature, with a temperature sensitivity of 26.2 kHz/℃ and a frequency temperature coefficient of -83.4×10-6/℃, demonstrating the reliability of LiNbO3 in low-temperature environments..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 871 (2024)
High Rectangularity and Low Loss Trapezoidal SAW Filter Design
ZHANG Kun, and WANG Hongliang
In this study, a high rectangular and low loss trapezoidal SAW (Surface Acoustic Wave) filter based on Rayleigh wave mode is designed to ensure the spectrum isolation of the mid-frequency band between different IoT devices in the 5G era. The electric electrode of the filter is the Al electrode, and the piezoelectric maIn this study, a high rectangular and low loss trapezoidal SAW (Surface Acoustic Wave) filter based on Rayleigh wave mode is designed to ensure the spectrum isolation of the mid-frequency band between different IoT devices in the 5G era. The electric electrode of the filter is the Al electrode, and the piezoelectric material is 128° YX-LiNbO3. To realize the design requirement of low loss, the influence of electrode thickness, duty cycle, aperture, and reflector gate on the resonator performance is simulated by the finite element method. Simultaneously, a non-standard short-circuit gate structure is adopted to suppress the spurious in the passband. A new image topology is designed to improve the waviness on both sides of the passband of general topology filters. Furthermore, the design goal of high rectangularity is achieved by reducing the capacitance ratio of the filter (C0p/C0s). Finally, a six-step SAW filter with a center frequency of 315.03 MHz, -3 dB bandwidth of 11.62 MHz, minimum insertion loss of 0.758 dB, out-of-band rejection of 35.931 dB, and rectangular coefficient of 1.30 is designed..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 878 (2024)
Research Progress of Patterning Manipulation of Biological Particles Based on Surface Acoustic Waves
CAO Jianwei, and WANG Hongliang
Surface acoustic wave (SAW)-based manipulation of particles is an indispensable tool to manipulate micro/nanoparticle/cell populations owing to its structural simplicity, biocompatibility, non-invasiveness, scalability, and versatility. This paper presents a design method of a SAW-based particle control device containiSurface acoustic wave (SAW)-based manipulation of particles is an indispensable tool to manipulate micro/nanoparticle/cell populations owing to its structural simplicity, biocompatibility, non-invasiveness, scalability, and versatility. This paper presents a design method of a SAW-based particle control device containing two pairs of uniform interfingered transducers. A three-dimensional (3D) finite element model is established to simulate and analyze the SAW device, and various sound pressure field patterns are obtained. The particle tracking module of COMSOL software was used to simulate and verify that the particles can be arranged into patterns under various sound pressure field patterns. The proposed design is expected to be applied in tissue engineering, in-vitro cell research, creating 3D bionic tissue structures, and other applications..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 884 (2024)
Analysis of Acoustic Properties of LGS and Methods to Suppress Natural Unidirectionality
SUN Mingchen, HU Fanbing, CHENG Lina, and WANG Wen
(0°, 138.5°, 26.5°) Langasite (LGS) exhibits natural unidirectionality, resulting in the incomplete superposition of acoustic energy and energy leakage. This study analyzed the acoustic properties of (0°, 138.5°, 26.5°) LGS substrates when loaded with Pt thin films of varying thicknesses. (0°, 138.5°, 26.5°) Langasite (LGS) exhibits natural unidirectionality, resulting in the incomplete superposition of acoustic energy and energy leakage. This study analyzed the acoustic properties of (0°, 138.5°, 26.5°) LGS substrates when loaded with Pt thin films of varying thicknesses. The results indicate a remarkable improvement in the symmetry of the slowness curve of the LGS substrate when the normalized thickness of the Pt thin film is between 2% and 3%. The effectiveness of theoretical calculations was validated by simulations based on the finite element method combined with three-dimensional periodic model frequency response curves. Further analysis of Pt/LGS frequency response at normalized thicknesses ranging from 2.5% to 2.9% demonstrated complete disappearance of the second resonance peak at h/λ=2.7% and 2.8%, entirely suppressing the natural unidirectionality of the substrate. This study provides the optimal Pt electrode thickness to restrain the occurrence of dual resonance peaks, reduce energy leakage, and establish a theoretical basis for designing high-performance resonators..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 890 (2024)
Design of Low-Speed and High-Torque Ultrasonic Motor Based on Multi-Objective Optimization
LIU Jun, NIU Ruikun, ZHANG Yiming, and ZHU Hua
Low-speed and high-torque are crucial characteristics of an ultrasonic motor, and they are positively correlated with the outer diameter of the motor. A multi-objective optimization method based on stator feature parameters is proposed to improve the low-speed and high-torque characteristics without increasing the outeLow-speed and high-torque are crucial characteristics of an ultrasonic motor, and they are positively correlated with the outer diameter of the motor. A multi-objective optimization method based on stator feature parameters is proposed to improve the low-speed and high-torque characteristics without increasing the outer diameter of the motor. For demonstration, this study considers a TRUM-70HA prototype motor as the research object. The ratio between the normal amplitude and tangential velocity of the stator teeth is used as the characterization for low-speed and high-torque characteristics. The parametric stator modeling of the 70HA is conducted using the ANSYS Workbench Environment. The multi-objective adaptive optimization of stator feature parameters is conducted. A second generation optimized prototype motor named TRUM-70HB is considered, and its mechanical performance is evaluated. The experimental results show that the maximum speed of the 70HB decreases from 65 r/min to 50 r/min, a decrease of 23.1%, and the maximum stall torque rises from 1.2 N·m to 2.4 N·m, an increase of 100%. The findings help save space in the manufacture of ultrasonic motors..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 894 (2024)
Low-Temperature Sintering and Properties of Lead Zirconate Titanate Piezoelectric Ceramics
ZHONG Chao, ZHAO Lianzhong, LI Jiang, YUAN Xi, and ZHANG Dou
To reduce the sintering temperature of lead zirconate titanate (PZT) piezoelectric ceramics, PZT-based piezoelectric ceramics were fabricated via a solid-state reaction with Li2CO3 and Bi2O3 as composite sintering aids. The effects of the doping amount of Li2CO3-Bi2O3 and the sintering temperature on the phase structurTo reduce the sintering temperature of lead zirconate titanate (PZT) piezoelectric ceramics, PZT-based piezoelectric ceramics were fabricated via a solid-state reaction with Li2CO3 and Bi2O3 as composite sintering aids. The effects of the doping amount of Li2CO3-Bi2O3 and the sintering temperature on the phase structure, microstructure, and electrical properties of PZT piezoelectric ceramics were comprehensively investigated. When the doping amount of Li2CO3-Bi2O3 is 1.3 wt%, the sintering temperature of PZT piezoelectric ceramics can be decreased from 1 250 ℃ to 900-950 ℃, which is a wide sintering temperature range, and the ceramics exhibit outstanding electrical properties. The piezoelectric strain constant d33 can reach 538 pC/N when the sintering temperature is 900 ℃, and the piezoelectric voltage constant g33 reaches a maximum of 43.27 mVm/N when the sintering temperature is 950 ℃. Simultaneously, low-temperature co-firing of the ceramics and electrodes is accomplished, and the d33 of the ceramic chip after co-firing reaches 530 pC/N..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 902 (2024)
Study on the Properties of Piezoelectric Materials at Low Temperature
HOU Yanqing, LIU Xiaochuan, LI Jianjun, WEI Xincheng, LI Qingchen, and GUO Shaorui
To address the application requirements of piezoelectric transducers in low-temperature environments, this study investigates the electromechanical properties of three different piezoelectric materials: PZT-5 ceramics, 1-3 composites and PMN-PT relaxer single crystals. The materials were tested at frequencies of 4 MHz To address the application requirements of piezoelectric transducers in low-temperature environments, this study investigates the electromechanical properties of three different piezoelectric materials: PZT-5 ceramics, 1-3 composites and PMN-PT relaxer single crystals. The materials were tested at frequencies of 4 MHz and 2.5 MHz, respectively, within a temperature range of 50-300 K. The experimental results reveal that the resonant frequency (Fs) and electromechanical coupling coefficient (Kt) of PZT ceramics and PMN-PT single crystals exhibit good temperature stability at low temperatures, with a rate of change below 10%. However, the Fs of 1-3 composites shifted toward higher frequencies by 17.0%, and Kt decreased by 24.4%. As temperature decreased, the dielectric properties of all piezoelectric materials declined, while the mechanical quality factors displayed varying trends. At low temperatures, piezoelectric materials exhibit reversible domain wall electrical charge “freezing”, providing important insights for selecting piezoelectric materials suitable for low-temperature transducer applications..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 910 (2024)
Research on Influence of New Backing Material on the Bandwidth of Needle Hydrophone
YANG Jinfeng, ZHU Yunsong, LI Yinfeng, and WANG Yuebing
A porous graphene/nano-tungsten powder/epoxy mixture is used as the acoustic absorption backing material to enhance the bandwidth of needle-type hydrophones. Using the KLM model, we found that thicker and higher-attenuation and medium acoustic impendence backings broadened the hydrophone bandwidth, enabling a flatter fA porous graphene/nano-tungsten powder/epoxy mixture is used as the acoustic absorption backing material to enhance the bandwidth of needle-type hydrophones. Using the KLM model, we found that thicker and higher-attenuation and medium acoustic impendence backings broadened the hydrophone bandwidth, enabling a flatter frequency response. Therefore, the new backing material should consider the above parameter characteristics. Finally, based on the above research findings, a needle-type hydrophone developed using the optimal new backing material achieved a 10.2 MHz bandwidth, which is consistent with the simulated value. Compared to needle hydrophones with air backing and copper rod backing, the bandwidth of the developed needle-type hydrophone was expanded by 410% and 75%, respectively, with a flatter frequency response within the bandwidth..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 916 (2024)
Preparing PVDF Multimodal Flexible Tactile Sensor Using Aerosol Jet Printing
WU Jijing, ZHAO Jiyuan, GAO Ling, FANG Tianle, ZHUO Pengtao, and LI Zhonghao
This study aims to address the problems of complex processes and unstable output performance in the traditional method of preparing flexible sensors. To this end, we prepared a flexible electrode layer based on silver nanoparticles via aerosol jet printing technology. A polyvinylidene fluoride (PVDF)-based aerosol ink This study aims to address the problems of complex processes and unstable output performance in the traditional method of preparing flexible sensors. To this end, we prepared a flexible electrode layer based on silver nanoparticles via aerosol jet printing technology. A polyvinylidene fluoride (PVDF)-based aerosol ink was configured, and the sensor was successfully printed. The conductivity of the flexible electrode was optimized by exploring the relationship between the printing speed and line width of the conductive silver wire. The results show that a weak signal was generated before polarization, and the response sensitivities to pressure, strain, and temperature were 1.29 mV/N, 1.38 mV/%, and 0.12 mV/℃, respectively. The flexible tactile sensor printed using PVDF-based aerosol ink showed a good output response after polarization. The output amplitude was 145 mV at a pressure of 10 N, an increase of nearly six times, and the pressure and strain sensitivity were 13.11 mV/N and 4.13 mV/%, respectively. Its superior performance was still stable under 1 000 cycles. The sensor was fixed on the finger of a dexterous hand for flexion and extension and pressing for application verification, which confirmed the potential and broad application prospect of the flexible multi-modal tactile sensor in various fields, such as in electronic skin technology..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 924 (2024)
Optimized Design of a Large Stroke-High Frequency Piezoelectric Driven Nanopositioning Platform
ZHANG Meng, LIU Shicheng, ZHANG Songlin, ZHU Yuqing, and WU Yao
The scanning range and scanning speed of the atomic force microscope are limited by the size of the working stroke and intrinsic frequency of the flexible mechanism; however, it is challenging for the flexible mechanism to account for the large working stroke and high intrinsic frequency in the design to solve the probThe scanning range and scanning speed of the atomic force microscope are limited by the size of the working stroke and intrinsic frequency of the flexible mechanism; however, it is challenging for the flexible mechanism to account for the large working stroke and high intrinsic frequency in the design to solve the problem. This study proposes a nanopositioning platform based on the bridge-type amplification mechanism and optimizes its configuration and main parameters. First, a new type of double-bridge flexible amplification mechanism is established through the study of the influence of the number and thickness of flexible arms on the intrinsic frequency and amplification ratio of the bridge mechanism. Subsequently, the discretization of the nanopositioning platform is realized based on the matrix displacement method, and the overall stiffness matrix of the nanopositioning platform and the mechanical model of the system are constructed. Finally, the optimization of the main parameters of the flexible amplification mechanism is carried out with respect to the frequency response and the stroke of the nanopositioning platform, and simulation analysis is performed. Finally, the main parameters of the flexible amplification mechanism are optimized for the frequency response and travel of the nanopositioning platform and simulated. The simulation results show that the optimized piezoelectric-driven nanopositioning platform has a first-order intrinsic frequency of 4.4 kHz and a working travel of more than 30 μm×30 μm..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 934 (2024)
Research on Control System of Adhesive Sliding Piezoelectric Driver Based on DSP and FPGA
WEN Shanglin, LIU Yuetao, YU Zhiyong, ZHU Baocai, and ZOU Dalin
To improve the output performance and repeat positioning accuracy of a stick-slip piezoelectric actuator, a controller based on digital signal processor (DSP) and field-programmable gate array (FPGA) was proposed. The hardware and software of the FPGA and DSP were developed, with the FPGA utilizing direct digital synthTo improve the output performance and repeat positioning accuracy of a stick-slip piezoelectric actuator, a controller based on digital signal processor (DSP) and field-programmable gate array (FPGA) was proposed. The hardware and software of the FPGA and DSP were developed, with the FPGA utilizing direct digital synthesis (DDS) technology to generate driving signals. Combined with a high-voltage dynamic amplification circuit, the piezoelectric ceramic was rapidly charged and discharged, enabling stick-slip motion. This motion controlled the signal generator, allowing it to produce driving signals with varying frequencies and voltages by calculating and interpreting the received input and feedback signals. The feedback module incoperates an appropriate grating encoder to form a closed-loop control system. An experimental platform was built to conduct performance testing. When the driving frequency was 2.5 kHz, the driving voltage amplitude was 120 V, and the load was 4 g, the maximum speed achieved was 9.782 mm/s, and the repeat positioning accuracy reached 0.1 μm..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 942 (2024)
Multi-Modal Energy Harvesting Performance Analysis of Piezoelectric Energy Harvester with Force Amplification Function
XIE Jianhong, LIU Liexin, and ZHU Liqing
To improve the energy-conversion efficiency of piezoelectric energy harvesters, a piezoelectric stack was intergrated with a force-amplification framework structure to construct a piezoelectric energy harvester featuring force amplification. Mechanical analysis and theoretical modeling of the force amplification coeffiTo improve the energy-conversion efficiency of piezoelectric energy harvesters, a piezoelectric stack was intergrated with a force-amplification framework structure to construct a piezoelectric energy harvester featuring force amplification. Mechanical analysis and theoretical modeling of the force amplification coefficient were conducted, and Sobol sensitivity analysis and genetic algorithm optimization were applied to the structural parameters of the framework. Based on the optimal structure of the force-amplification framework, a lumped-parameter theoretical model of the piezoelectric energy harvester was established. The energy-harvesting performance of this energy harvester under non-resonant and multi-modal resonant excitations was compared and analyzed. The research results indicate that the open circuit output voltage peak and maximum output power of the piezoelectric energy harvester at the third and fourth natural frequency excitations are 55.07 V, 124.19 V and 1.63 W, 14.97 W, respectively. These values are 12.9, 29.1, 2 999.77, and 27 550 times greater than the open-circuit output voltage peak and maximum output power under 10 Hz non-resonant low-frequency excitation. Compared to non-resonant excitation, operating the harvester at the resonant excitation frequency significantly increases its output voltage and power. Moreover, the inclusion of mass blocks in energy harvesters effectively reduces their resonant frequency and increases output voltage, thereby enabling low-frequency extension applications for piezoelectric energy harvesters..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 950 (2024)
Design and Simulation of a Dual-Resonant Hybrid Piezoelectric-Triboelectric Energy Harvester
WEI Zusheng, CHEN Renwen, ZHENG Boyu, HU Chenyu, and CAO Wenbin
To address the inefficiency of single piezoelectric energy harvesters in broadband vibration environments and the significant space requirements of composite energy harvesters, a spatially multiplexed, dual-resonance, piezoelectric-friction hybrid vibration energy harvester was designed. This innovative harvester emploTo address the inefficiency of single piezoelectric energy harvesters in broadband vibration environments and the significant space requirements of composite energy harvesters, a spatially multiplexed, dual-resonance, piezoelectric-friction hybrid vibration energy harvester was designed. This innovative harvester employs a dual-cantilever beam structure. The upper cantilever beam produces electricity using piezoelectric materials, whereas the lower cantilever beam features a PDMS film affixed to its surface. During vibrations, the upper cantilever beam makes contact with and separates from the PDMS film, generating triboelectricity and thereby achieving a hybrid system of piezoelectric and frictional energy harvesting. This design optimizes space usage and expands the harvesting bandwidth. COMSOL software was used to analyze the stress and displacement at different frequencies, confirm the structural viability, and simulate the electrical output characteristics. The experiments validated the accuracy of the theoretical and simulation findings, showing that at an excitation frequency of 7 Hz, the frictional voltage output of the harvester reached a maximum of 1.40 V. At an excitation frequency of 63 Hz, the maximum piezoelectric and frictional voltage outputs were 7.70 and 11.81 V, respectively..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 956 (2024)
Design and Performance Analysis of Piezoelectric-Actuated Aerostatic Gap Adjustment Mechanism
ZHU Yuanshen, SHI Minghui, QIN Dongchen, CHEN Jiangyi, and SHEN Peng
This paper proposes a design for aerostatic gap adjustment to address the limitation of traditional aerostatic spindles being unable to adjust the aerostatic gap to accommodate various operational states or external loads. A piezoelectric micro-displacement amplification mechanism is employed as the actuator to adjust This paper proposes a design for aerostatic gap adjustment to address the limitation of traditional aerostatic spindles being unable to adjust the aerostatic gap to accommodate various operational states or external loads. A piezoelectric micro-displacement amplification mechanism is employed as the actuator to adjust the aerostatic gap. Theoretical derivations and simulations are conducted to analyze both the designed piezoelectric micro-displacement amplification and overall aerostatic gap adjustment mechanisms. An experimental prototype is developed and tested. The experimental results indicate that the output displacement of the designed piezoelectric micro-displacement amplification mechanism is 518.739 μm at a driving voltage of 120 V, and the corresponding output displacement of the aerostatic gap is 189 μm with a response time of approximately 0.38 s..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 963 (2024)
The Design of an Ultra Narrowband Band-Pass Crystal Filter at 10.7 MHz
LI Shiguo, PENG Shengchun, YANG Hao, QIU Zelin, and TANG Ping
To meet the application requirements for small size, low insertion loss, and high stopband suppression in intermediate frequency ultra-narrowband filters, AT-cut thickness vibration fundamental mode piezoelectric quartz crystal resonators, configured with a differential bridge-type circuit, have been utilized. This desTo meet the application requirements for small size, low insertion loss, and high stopband suppression in intermediate frequency ultra-narrowband filters, AT-cut thickness vibration fundamental mode piezoelectric quartz crystal resonators, configured with a differential bridge-type circuit, have been utilized. This design achieves a working frequency of 10.7 MHz, a 3 dB bandwidth of 0.8 kHz, in-band fluctuations of less than 0.5 dB, an insertion loss of less than 4 dB, and stopband suppression greater than 70 dB. The resulting crystal filter fulfills the project requirements and offers a design framework for the development of future ultra-narrowband crystal filters..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 968 (2024)
Design of Ultra-Wideband Filter with Reconfigurable Notch Frequency
SUN Wenjie, ZHANG Xu, ZHAO Mengchen, and HE Ming
The design of a notch reconfigurable ultra-wideband filter based on a multimode resonator is presented in this paper. The structure of the multi-mode resonator is designed based on transmission line theory and odd-even mode theory. The dimension parameters of the filter are determined via the joint simulation of HFSS aThe design of a notch reconfigurable ultra-wideband filter based on a multimode resonator is presented in this paper. The structure of the multi-mode resonator is designed based on transmission line theory and odd-even mode theory. The dimension parameters of the filter are determined via the joint simulation of HFSS and ADS. The notch of the filter is reconfigurable by loading varactor-diodes on the filter branches. The center frequency of the designed ultra wideband filter is 3.35 GHz, with a 3 dB relative bandwidth of 68.7%, and the notch frequency is independently adjustable. The simulation results show that the adjustable range of notch frequency in the passband is 3.2-4 GHz, with a relative adjustable range of 33%. The insertion loss in the passband is within 0.5 dB. After processing and actual measurement of the filter, the tunable range of the notch obtained is 3.3-4.02 GHz, which is consistent with the simulation results. The designed reconfigurable ultra-wideband filter has a simple structure, small size, wide notch adjustable range, and can effectively suppress interference signals in the system..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 973 (2024)
Low-Profile Magneto-Electric Dipole Filtering Antenna Loaded with Metasurface
ZHAO Enhui, ZHANG Sheng, LIU Hai, QIAO Hongliang, and WU Xilong
Thisstudy proposesa low-profile filtering antenna based on a magneto-electric dipole. The antennashowed good out-of-band rejection performance without introducing additional filtering circuits and maintainsa lower profile. The filtering performance of the proposed antenna wasintroduced by three radiation zeros. The oneThisstudy proposesa low-profile filtering antenna based on a magneto-electric dipole. The antennashowed good out-of-band rejection performance without introducing additional filtering circuits and maintainsa lower profile. The filtering performance of the proposed antenna wasintroduced by three radiation zeros. The one radiation zero at high frequency wasthe intrinsic radiation null of the magneto-electric dipole, and the other two radiation nulls wereobtained by a fork-shaped feed structure extended at both ends. The profile of the proposed antenna wasreduced to 0.035λ0 using the in-phase reflection characteristics of the metasurface structure. Both simulation and measurement results demonstratedthat the proposed filter antenna showedhigh realized gain in the passband and good out-of-band rejection performance in the rejection band..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 979 (2024)
Research on the Generation Technology of High-Speed All-Digital Ultra-Wideband Comb-Spectrum Signal
LI Qinghong, HUANG Zhilei, YANG Dong, and TANG Yunbo
As a new type of radar jamming signal, the signal quality of ultra-wideband (UWB) comb spectrum interferes with the performance of electronic countermeasures. Considering the low operating frequency range, large resource consumption, and slow data generation of a traditional digital comb spectrum generator, a high-speeAs a new type of radar jamming signal, the signal quality of ultra-wideband (UWB) comb spectrum interferes with the performance of electronic countermeasures. Considering the low operating frequency range, large resource consumption, and slow data generation of a traditional digital comb spectrum generator, a high-speed digital UWB generation method of the comb spectrum is proposed in this paper. In the proposed method, the simulation data are stored in the mass memory chip, and the flexible configuration of the comb spectrum signal is realized by using the table lookup method. Concurrently, we confirm that the rate of single transmission can reach 12 Gbps using the JESD204B high-speed interface, and the operating frequency of the comb spectrum signal generator reaches up to the C-band under the first Nyquist region. Our proposed method saves computing resources during field-programmable gate array operation, enables operation at higher frequencies, and generates signals faster. Finally, a verification platform is developed to verify the effectiveness of the proposed method..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 985 (2024)
Design and Process of 2.7 μm Diametry Film
ZHOU Yangzhou, ZHANG Zehong, HE Xiaoliang, and XIE Qiang
This paper addresses the coating requirements for 2.7 m acousto-optic Q-switches and details the design, fabrication process, and performance testing of 2.7 m anti-reflective coatings. The substrate material for the 2.7 m anti-reflective coating is lithium niobate crystal, with hafnium oxide selected as the high-refracThis paper addresses the coating requirements for 2.7 μm acousto-optic Q-switches and details the design, fabrication process, and performance testing of 2.7 μm anti-reflective coatings. The substrate material for the 2.7 μm anti-reflective coating is lithium niobate crystal, with hafnium oxide selected as the high-refractive-index material and ytterbium fluoride as the low-refractive-index material. A four-layer narrowband high-transmittance film design was employed in this study. The resulting samples exhibited a transmittance of 98.6% at a wavelength of 2.7 μm. The coated samples maintained their stable performance after 48 h of high- and low-temperature experiments and 24 h of immersion in common solvents such as acetone and anhydrous ethanol..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 990 (2024)
Design of a Transmissive Deformable Lens for Compensating Optical Aberrations of Lithography Object Lens
ZOU Youyun, BU Yifan, DU Wenjie, DENG Jie, and MA Jianqiang
A transmission deformable lens structure with large aperture, small deformation, and high precision is proposed to solve the problem of low-order aberration of the objective lens of a deep ultraviolet (DUV) lithography machine following a period of operation. The correction performance of the deformable lens was simulaA transmission deformable lens structure with large aperture, small deformation, and high precision is proposed to solve the problem of low-order aberration of the objective lens of a deep ultraviolet (DUV) lithography machine following a period of operation. The correction performance of the deformable lens was simulated via finite element analysis, and the number of actuators, thickness of the glass, and width of the inner and outer rings were determined. The simulation results show that the normalized residual error is less than 0.2% when reconstructing the Zernike aberration of Z3-Z9 terms. The overall correction of the object image error of 193 nm DUV lithography machine is satisfied. Moreover, the effects of gravity field and thermal absorption on lens aberrations were studied, and it was found that both have the largest defocus aberration but small values, which can be corrected using deformable lens..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 995 (2024)
Research on Temperature Sensing Technology of Ultra-Short Thin Film Cavity Based on Fiber-Optic Fabry-Pérot Interferometer
XING Meihua, YANG Di, LIU Bo, YAN Cheng, and LIU Qinpeng
To address the challenges in manufacturing ultrashort thin-film cavities, an ultrathin-film optical fiber temperature sensor based on a Fabry-Prot interferometer (FPI) constructed using liquid adhesive is proposed. A miniature, high-sensitivity, and high-accuracy fiber-optic temperature sensor was developed and experimTo address the challenges in manufacturing ultrashort thin-film cavities, an ultrathin-film optical fiber temperature sensor based on a Fabry-Pérot interferometer (FPI) constructed using liquid adhesive is proposed. A miniature, high-sensitivity, and high-accuracy fiber-optic temperature sensor was developed and experimentally validated by optimizing the relationship between the material structure, film thickness, and cavity length. A structural model with an ultrashort Fabry-Pérot (FP) cavity length was successfully established. The experimental results reveal that the sensor has a temperature sensitivity of 342.05 pm/℃ and a linearity of 0.997 within the temperature range of 40-120 ℃. The sensor features a compact design, simple fabrication process, low production cost, and excellent temperature-response performance. It holds promise for applications in temperature detection within complex environments and manufacture of ultrashort FP thin films..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 1001 (2024)
Digital Boost Power Supply and Amplifier for Underwater Communication System
SHAO Zhen, and WANG Hongwei
Power supplies and amplifiers constitute the most critical components of underwater communication systems. In this paper, a booster power supply and amplifier circuit are designed for a hydroacoustic communication system. It has the characteristics of high output capacity and small size compared with the traditional trPower supplies and amplifiers constitute the most critical components of underwater communication systems. In this paper, a booster power supply and amplifier circuit are designed for a hydroacoustic communication system. It has the characteristics of high output capacity and small size compared with the traditional transmitter of hydroacoustic communication systems. The improved booster supply is based on the classic Boost circuit for STM32-based digital control power supply. A twice boost is then applied to achieve an output of 100 V for a 10 kΩ load and 70 V for a 100 Ω load. Two secondary boost modules can be connected in series to output a voltage of ±70 V, which supplies power to the amplifier module. The amplifier module has a maximum operating frequency of 1 MHz and maximum output power of 40 W. The dimensions of the final circuit are 120 mm×120 mm×150 mm. We designed a complete hydroacoustic communication experiment to verify that the fabricated high-voltage power supply and amplifier module design are reasonable and feasible and found that the receiver successfully demodulated the baseband signal..
Piezoelectrics & Acoustooptics
- Publication Date: Feb. 13, 2025
- Vol. 46, Issue 6, 1007 (2024)
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