Zhipeng ZHOU, Yingtian LOU, ShengFan WANG, Yu CHEN, Benyong CHEN. Error compensation for laser heterodyne interferometric displacement measurement based on Kalman filter[J]. Optics and Precision Engineering, 2024, 32(3): 357
- Optics and Precision Engineering
- Vol. 32, Issue 3, 357 (2024)
Fig. 1. Block diagram of Kalman filter flow
Fig. 2. Kalman filter simulation effect
Fig. 3. Laser heterodyne interferometric displacement measurement and angle compensation system
Fig. 4. Compensation devices of laser heterodyne interference displacement measurement
Fig. 5. Experimental results of spot position stability measurement
Fig. 6. Experimental results for comparison of angle measurement
Fig. 7. Angle of measuring mirror measured by laser heterodyne interferometric displacement measuring system
Fig. 8. Comparison before and after displacement compensation
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