Rotating Measurement Method for Inner Hole Parameters with Large Depth-to-Diameter Ratio Based on Spectral Confocal Principle

Rui Ma; Borong Wu; Baowen Li; Xinghui Li

doi:10.3788/LOP242214

Journals >Laser & Optoelectronics Progress >Volume 62 >Issue 7 >Page 0712003 > Article

Laser & Optoelectronics Progress
Vol. 62, Issue 7, 0712003 (2025)

Rotating Measurement Method for Inner Hole Parameters with Large Depth-to-Diameter Ratio Based on Spectral Confocal Principle

Rui Ma¹, Borong Wu², Baowen Li¹, and Xinghui Li^1、3、*

Author Affiliations

¹Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, Guangdong , China

²Chongqing University-University of Cincinnati Joint Co-op Institute, Chongqing University, Chongqing 400044, China

³Tsinghua-Berkeley Shenzhen Institute, Shenzhen 518055, Guangdong , China

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DOI: 10.3788/LOP242214 Cite this Article Set citation alerts

Rui Ma, Borong Wu, Baowen Li, Xinghui Li. Rotating Measurement Method for Inner Hole Parameters with Large Depth-to-Diameter Ratio Based on Spectral Confocal Principle[J]. Laser & Optoelectronics Progress, 2025, 62(7): 0712003 Copy Citation Text

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