Rui Ma, Borong Wu, Baowen Li, Xinghui Li. Rotating Measurement Method for Inner Hole Parameters with Large Depth-to-Diameter Ratio Based on Spectral Confocal Principle[J]. Laser & Optoelectronics Progress, 2025, 62(7): 0712003
- Laser & Optoelectronics Progress
- Vol. 62, Issue 7, 0712003 (2025)
Fig. 1. Measurement system for inner hole parameters based on spectral confocal principle. (a) Designed system; (b) spectral confocal principle; (c) helical scan trajectory; (d) solving perpendicularity; (e) fit the center coordinates
Fig. 2. Principle of circle fitting by spectral confocal data
Fig. 3. Measure device for inner hole parameters based on spectral confocal principle. (a) Front of measurement system; (b) back of measurement system
Fig. 4. Influence of rotation velocity on the scanning trajectory of the inner hole profile. (a) 20 (°)/s; (b) 40 (°)/s; (c) 80 (°)/s; (d) 200 (°)/s; (e) 400 (°)/s; (f) 800 (°)/s
Fig. 5. Influence of rotation velocity on measurement result of inner hole radius
Fig. 6. Fitted radii of the inner holes
Fig. 7. Distributions of fitted circle centers
Fig. 8. Distribution of perpendicularities
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Table 1. Experimental parameter setting of inner hole workpiece
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