• Piezoelectrics & Acoustooptics
  • Vol. 46, Issue 6, 865 (2024)
ZHOU Shuo1, GAO Zihang2, XIAO Qiang3, WANG Weibiao4, and FAN Yanping1
Author Affiliations
  • 1School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
  • 2School of Perception Science and Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
  • 3The 26th Institute of China Electronics Technology Group Corporation, Chongqing 400060, China
  • 4Wuxi Haoda Electronics Co., Ltd., Wuxi 214124, China
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    DOI: 10.11977/j.issn.1004-2474.2024.06.006 Cite this Article
    ZHOU Shuo, GAO Zihang, XIAO Qiang, WANG Weibiao, FAN Yanping. A High Performance SAW Torque Sensor[J]. Piezoelectrics & Acoustooptics, 2024, 46(6): 865 Copy Citation Text show less

    Abstract

    Torque measurement is an essential method for assessing whether the output power of a power system meets operational requirements, serving as a critical source of information for equipment operational status and fault pre-warning. Surface Acoustic Waves (SAW) sensors, with their passive and wireless characteristics, are particularly well-suited for torque measurement of rotating shafts, overcoming the challenges in energy and signal transmission encountered with active torque sensors in rotational applications. To achieve high-precision SAW torque sensing, this study focuses on the selection of piezoelectric substrate materials, the design of high-Q resonators, and the development of a high-accuracy frequency demodulation algorithm for SAW sensor echo signals. The designed SAW torque sensor was tested, achieving a load nonlinearity of 0.183%, unload nonlinearity of 0.160%, load repeatability of 0.260%, unload repeatability of 0.103%, and hysteresis of 0.299%, thereby demonstrating high-precision torque sensing capabilities.
    ZHOU Shuo, GAO Zihang, XIAO Qiang, WANG Weibiao, FAN Yanping. A High Performance SAW Torque Sensor[J]. Piezoelectrics & Acoustooptics, 2024, 46(6): 865
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