Fig. 1. Principle of adaptive interferometer. (a) ARCC-based adaptive interferometer; (b) TSRC-based adaptive interferometer

Fig. 2. Astigmatism compensation capacity of the TSRC and ARCC. (a) Compensation astigmatism X; (b) Compensation astigmatism Y

Fig. 3. Coma compensation capacity of the TSRC and ARCC. (a) Compensation coma X; (b) Compensation coma Y

Fig. 4. Spherical aberration compensation capacity of the TSRC and ARCC

Fig. 5. DM surface figure in ARCC and TSRC，and the aperture is normalized. (a)-(e) DM surface figure in ARCC that can compensate astigmatism X, astigmatism Y, coma X, coma Y and spherical aberration with 1 respectively; (f)-(j) DM surface figure in TSRC that can compensate astigmatism X, astigmatism Y, coma X, coma Y and spherical aberration with 1 respectively ARCC和 TSRC两种补偿结构中的DM面形（口径为归一化的）。(a)~(e)分别为利用ARCC补偿大小均为1 的X像散、Y像散、X彗差、Y彗差所需的DM像差分布；(f)~(j)分别为利用TSRC补偿大小均为1 的X像散、Y像散、X彗差、Y彗差和球差所需的DM的像差分布

Fig. 6. DM deformation(PV) required by ARCC and TSRC respectively when compensating for 1 single aberration ARCC与TSRC补偿被测面1 低阶像差所需的DM形变量(PV)

Fig. 7. Experiment device

Fig. 8. Interferograms of 1#-4# freeform. (a), (d), (g), (j) are the initial interferograms when testing the 1#, 2#, 3# and 4# freeform surface without aberration compensation, respectively; (b), (c) are the interferograms of 1# freeform when compensated by TSRC and ARCC respectively under the same DM stroke; (e), (f) are the interferograms of 2# freeform when compensated by TSRC and ARCC respectively under the same DM stroke; (h), (i) are the interferograms of 3# freeform when compensated by TSRC and ARCC respectively under the same DM stroke; (k), (l) are the interferograms of 4# freeform when compensated by TSRC and ARCC respectively under the same DM stroke

Table 1. Range of the each low-order aberration on the DM surface in simulation (Unit: λ)

Table 2. Ratio of low-order aberration compensation between ARCC and TSRC