Chengli Guo, Dekang Zheng, Deyan Zhu, Xiaofei Yang, Yuanzheng Li, Jian Zhang, Liefeng Zhao. Testing of aspheric surface with low reflectivity using hybrid type computer-generated hologram (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220547
- Infrared and Laser Engineering
- Vol. 51, Issue 9, 20220547 (2022)
Fig. 1. Optical path of off-axis aspheric surface interferometric testing by CGH
Fig. 2. Design residuals of main area
Fig. 3. Model of linear grating
Fig. 4. Relationship between reflectivity of alignment holographic and fringe contrast
Fig. 5. Relationship between etching depth and reflectivity when fringe contrast maintains 1
Fig. 6. Fabrication process of hybrid type CGH
Fig. 7. Physical of hybrid type CGH
Fig. 8. Optical path of CGH testing
Fig. 9. Refracive fringe in CGH alignment area
Fig. 10. (a) Fringe in main area (b) Detection results of main area
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Table 1. Parameters of off-axis aspheric surface
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