ZUO Wen, LIU Qicai, ZHANG Congchun, WANG Debo. Research on MEMS Microwave Power Sensor with Symmetric Double Cantilever Beams[J]. Microelectronics, 2021, 51(3): 418

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- Microelectronics
- Vol. 51, Issue 3, 418 (2021)
Abstract

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