Microstructure evolution from silicon core to surface in electronic-grade polycrystalline silicon

Jinyue Peng; Yuxuan Yang; Yang Zhang; Xinlu Xue; Bochen Lu; Rong Qin; Haijun Wu

doi:10.1142/S2010135X2440006X

Journals >Journal of Advanced Dielectrics >Volume 14 >Issue 3 >Page 2440006 > Article

Journal of Advanced Dielectrics
Vol. 14, Issue 3, 2440006 (2024)

Microstructure evolution from silicon core to surface in electronic-grade polycrystalline silicon

Jinyue Peng¹, Yuxuan Yang¹, Yang Zhang^1、3、*, Xinlu Xue², Bochen Lu¹, Rong Qin^2、**, and Haijun Wu¹

Author Affiliations

¹State Key Laboratory for Mechanical Behavior of Materials, Electronic Materials Research Laboratory, (Key Lab of Education Ministry) and School of Electronic and Information Engineering, Xi’an Jiaotong University, 710049 Xi’an, China

²Qinghai Xince Technology Co., Ltd., Huanghe Hydropower, Development Co., Ltd., 810007 Xining, China

³Instrumental Analysis Center, Xi’an Jiaotong University, Xi’an, China

show less

DOI: 10.1142/S2010135X2440006X Cite this Article

Jinyue Peng, Yuxuan Yang, Yang Zhang, Xinlu Xue, Bochen Lu, Rong Qin, Haijun Wu. Microstructure evolution from silicon core to surface in electronic-grade polycrystalline silicon[J]. Journal of Advanced Dielectrics, 2024, 14(3): 2440006 Copy Citation Text

show less

References

Download Citation

Save the article for my favorites

Paper Information