• Optics and Precision Engineering
  • Vol. 33, Issue 7, 1091 (2025)
Xuanshuo LIU1、2, Chuanyu LI1、2, Chunxiao JIAO1、2, Runhu HUANG1、2, Lianqun ZHOU1、2、*, and Zhen GUO1、2、*
Author Affiliations
  • 1University of Science and Technology of China, Hefei230026, China
  • 2Suzhou Institute of Biomedical Engineering and Technology, Chinese Academy of Sciences, Suzhou15163, China
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    DOI: 10.37188/OPE.20253307.1091 Cite this Article
    Xuanshuo LIU, Chuanyu LI, Chunxiao JIAO, Runhu HUANG, Lianqun ZHOU, Zhen GUO. Development of zero-mode waveguide device with micro-reflector for high signal-to-noise fluorescence detection[J]. Optics and Precision Engineering, 2025, 33(7): 1091 Copy Citation Text show less

    Abstract

    This study addresses the limitations of low signal collection efficiency and suboptimal signal-to-noise ratio in zero-mode waveguide (ZMW) devices employed for fluorescence detection. A micro-reflector ZMW device was designed and fabricated to enhance the signal-to-noise ratio in fluorescence measurements. Finite element electromagnetic simulations demonstrated a significant improvement in the spatial distribution and intensity of excitation and emission fields within the device. The ZMW apertures and a three-stage micro-reflector structure, with a height of 6.48 μm and a bottom diameter of 4.24 μm, were fabricated using a thick adhesive process followed by exposure etching, complemented by focused ion beam perforation and additional micro-nano fabrication techniques. Fluorescence performance was evaluated using fluorescent microspheres, and detection efficiency was assessed through fluorescence imaging. Quantitative analysis of grayscale intensity and signal-to-noise ratio revealed that the developed device achieved a fluorescence detection signal-to-noise ratio of 119.6, representing an approximate 4.27-fold enhancement compared to conventional ZMW devices without the micro-reflector. This high signal-to-noise ratio ZMW device demonstrates significant potential for applications in weak fluorescence detection and related fields.
    Xuanshuo LIU, Chuanyu LI, Chunxiao JIAO, Runhu HUANG, Lianqun ZHOU, Zhen GUO. Development of zero-mode waveguide device with micro-reflector for high signal-to-noise fluorescence detection[J]. Optics and Precision Engineering, 2025, 33(7): 1091
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