Yikai ZANG, Beibei ZHU, Lin QIN, Yao SHANG, Junhao SHANG, Zhongdi SHE, Xiao CHEN, Junfeng XIAO, Jianfeng XU. Modeling of removal function and optimization of process parameters for robotic polishing M-ZnS[J]. Optics and Precision Engineering, 2024, 32(15): 2387
- Optics and Precision Engineering
- Vol. 32, Issue 15, 2387 (2024)
Fig. 1. Working priniciple of robotic polishing
Fig. 2. FEA contact model of polishing pad
Fig. 3. Pressure distribution at bottom of pitch pad under different loads
Fig. 4. （a） Comparison of pressure cross-section curves； （b） Comparison of pressure cross-section curve fits for F =5 N
Fig. 5. Comparison between modified removal function and unmodified removal function with different polishing parameters
Fig. 6. Comparison of corrected removal function with polished removal function
Fig. 7. Experimental setup
Fig. 8. Removal profile of ZnS for different polishing pressures
Fig. 9. Effect of pressure on M-ZnS material removal
Fig. 10. Removal profile for different speed ratios
Fig. 11. M-ZnS material removal rate for different speed ratios
Fig. 12. M-ZnS flat optic
Fig. 13. Polishing simulation results
Fig. 14. Comparison between before and after robotic polishing of M-Zn flat optic
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Table 1. Mechanical parameters of simulated materials
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Table 2. Determination coefficients for different orders of fitted curves
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Table 3. Experimental parameters of pressure test
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Table 4. Experimental parameters of speed ratio test
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