Modeling of removal function and optimization of process parameters for robotic polishing M-ZnS

Yikai ZANG; Beibei ZHU; Lin QIN; Yao SHANG; Junhao SHANG; Zhongdi SHE; Xiao CHEN; Junfeng XIAO; Jianfeng XU

doi:10.37188/OPE.20243215.2387

[1] 王敦青，焦秀玲，陈代荣. 硫化锌性质、用途及制备方法概述［J］. 山东化工， 2003， 32（2）：12-15.WANGD Q， JIAOX L， CHEND R. Brief introduction on properties， synthesis and applications of zinc sulfide［J］. Shandong Chemical Industry， 2003， 32（2）：12-15.（in Chinese）

[2] 罗贞礼. 红外光学材料硫化锌概览［J］. 新材料产业， 2012（8）： 41-44.LUOZH L. Overview of infrared optical material zinc sulfide［J］. Advanced Materials Industry， 2012（8）： 41-44.（in Chinese）

[3] 李跃龙，黎建明，苏小平，等. 红外窗口和整流罩材料研究现状与发展趋势［J］. 人工晶体学报， 2007， 36（4）： 877-884.LIY L， LIJ M， SUX P， et al. Research trends and current status in infrared window and dome materials［J］. Journal of Synthetic Crystals， 2007， 36（4）： 877-884.（in Chinese）

[4] 刘珂，李丽娟. 空空导弹与红外导引系统发展评述［J］. 激光与红外， 2016， 46（1）： 5-10. doi: 10.3969/j.issn.1001-5078.2016.01.001LIUK， LIL J. Development analysis of air to air missile and infrared guidance［J］. Laser & Infrared， 2016， 46（1）： 5-10.（in Chinese）. doi: 10.3969/j.issn.1001-5078.2016.01.001

[5] 刘蒙，张伟科，黄立，等. 高超声速飞行器红外波段及窗口选择（特邀）［J］. 红外与激光工程， 2022， 51（4）： 3788/IRLA20220161. doi: 10.3788/IRLA20220161LIUM， ZHANGW K， HUANGL， et al. Infrared waveband and window selection for hypersonic vehicle（Invited）［J］. Infrared and Laser Engineering， 2022， 51（4）： 3788/IRLA20220161.（in Chinese）. doi: 10.3788/IRLA20220161

[6] 黄金库，李军，黄建东，等. 不同粒径金刚石固结磨料抛光硫化锌晶体研究［J］. 机械制造与自动化， 2017， 46（2）： 13-15.HUANGJ K， LIJ， HUANGJ D， et al. Research on diamond fixed polishing abrasive size for ZnS crystal［J］. Machine Building & Automation， 2017， 46（2）： 13-15.（in Chinese）

[7] 张羽斐. 固结磨料研磨硫化锌亚表面损伤的评价与预测［D］. 南京：南京航空航天大学， 2022.ZHANGY F. Evaluation and Prediction of Subsurface Damage of Zinc Sulfide by Consolidated Abrasive Grinding［D］.Nanjing： Nanjing University of Aeronautics and Astronautics， 2022. （in Chinese）

[8] 陈琦. 硫化锌晶体加工工艺技术研究［D］. 长春：长春理工大学， 2013. doi: 10.3969/j.issn.1672-9870.2013.03.036CHENQ. Study on Processing Technology of Zinc Sulfide Crystal［D］.Changchun： Changchun University of Science and Technology， 2013. （in Chinese）. doi: 10.3969/j.issn.1672-9870.2013.03.036

[9] R A JONES. Rapid optical fabrication with computer-controlled optical surfacing. Optical Engineering, 30, 1962(1991).

[10] J ZHANG, H WANG. Generic model of time-variant tool influence function and dwell-time algorithm for deterministic polishing. International Journal of Mechanical Sciences, 211, 106795(2021).

[11] D D WALKER, R FREEMAN, G MCCAVANA et al. Zeeko/UCL process for polishing large lenses and prisms, 4411, 106-111(2002).

[12] A SCHINDLER, T HÄNSEL, F FROST et al. Ion beam finishing technology for high precision optics production(2002).

[13] A B SHOREY, W KORDONSKI, M TRICARD. Magnetorheological finishing and subaperture stitching interferometry of large and lightweight optics, 5494, 81-90(2004).

[14] X KE, Y YU, K LI et al. Review on robot-assisted polishing： Status and future trends. Robotics and Computer-integrated manufacturing, 80, 102482(2023).

[15] C FAN, Y LU, K J WANG et al. Surface removal characteristic of computer-controlled dual-rotor polishing. The International Journal of Advanced Manufacturing Technology, 111, 2189-2199(2020).

[16] L ZHANG, Q Z ZHAO, C FAN. Dwell time algorithm in deterministic polishing of a free-form surface based on the continuous tool influence function. Applied Optics, 60, 2704-2715(2021).

[17] F PRESTON. The theory and design of plate glass polishing machine. J. Soc. Glass. Tech., 11(1927).

[18] Z C DONG, H B CHENG, H Y TAM. Modified subaperture tool influence functions of a flat-pitch polisher with reverse-calculated material removal rate. Applied Optics, 53, 2455(2014).

[19] A G LU, T JIN, Z F GUO et al. Characterization of the tool influence function in a dual-axis wheel polishing process to achieve high material removal rates. Precision Engineering, 52, 276-290(2018).

[20] J B ZHAO, S WANG, H YIN et al. Investigation of influence function model and polished surface characteristics during belt polishing polycrystalline aluminate magnesium spinel （PAMS） ceramics. Journal of Materials Processing Technology, 320, 118129(2023).

[21] X P HUANG, Z Z WANG, L C LI et al. Research on the modification of the tool influence function for robotic bonnet polishing with stiffness modeling. Robotics and Computer-Integrated Manufacturing, 86, 102674(2024).

[22] J DEGROOTE-NELSON, J A DRUCKER, A A HAEFNER et al. Varying electro-kinetic interactions to achieve predictable removal rates and smooth surfaces on ZnS, 7426, 82-91(2009).

[23] S SALZMAN, H J ROMANOFSKY, L J GIANNECHINI et al. Magnetorheological finishing of chemical-vapor deposited zinc sulfide via chemically and mechanically modified fluids. Applied Optics, 55, 1481(2016).

[24] 席燕飞. 硫化锌光学元件射频离子束刻蚀技术研究［D］. 西安：西安工业大学， 2019.XIY F. Study on RF Ion Beam Etching Technology of Zinc Sulfide Optical Elements［D］.Xi'an： Xi'an Technological University， 2019. （in Chinese）

[25] 陈琦，付秀华，贾宗合，等. 硫化锌晶体加工工艺技术研究［J］. 长春理工大学学报（自然科学版）， 2013， 36（3）： 120-123， 119.CHENQ， FUX H， JIAZ H， et al. Research on processing technology of ZnS crystal［J］. Journal of Changchun University of Science and Technology （Natural Science Edition）， 2013， 36（3）： 120-123， 119.（in Chinese）

[26] 饶志敏. 轮式工具抛光硫化锌非球面关键技术研究［D］. 哈尔滨：哈尔滨工业大学， 2017.RAOZH M. Research on Key Technology of Polishing Zinc Sulfide Aspheric Surface with Wheeled tools［D］.Harbin： Harbin Institute of Technology， 2017. （in Chinese）