WU Pengcheng, TSANG Wei Mong, LI Xin, AN Xing, ZHU Xin, YI Yongjie, HUANG Xiangjun, DI Xiao. Study on the Effect of Parylene Encapsulation for the Performance of MEMS Acoustic Sensor[J]. Piezoelectrics & Acoustooptics, 2022, 44(3): 435

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- Piezoelectrics & Acoustooptics
- Vol. 44, Issue 3, 435 (2022)
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