[1] Wang Z L. Zinc oxide nanostructures: growth, properties and applications［J］. Journal of Physics Condensed Matter, 2004, 16(25): 829-858.

[2] Ranjith K S, Nivedita L R, Asokan K, et al. Robust water repellent ZnO nanorod array by Swift heavy ion irradiation: effect of electronic excitation induced local chemical state modification［J］. Scientific Reports, 2017, 7(1): 3251-3262.

[3] olak H, Karakse E. Green synthesis and characterization of nanostructured ZnO thin films using Citrus aurantifolia, (lemon) peel extract by spin-coating method［J］. Journal of Alloys & Compounds, 2017, 690: 658-662.

[4] Sun Y H, Wang H L, Chen J, et al. Structural and optoelectronic properties of AZO thin films prepared by RF magnetron sputtering at room temperature［J］. Transactions of Nonferrous Metals Society of China, 2016, 26(6): 1655-1662.

[5] Zhang Q, Dandeneau C S, Zhou X, et al. ZnO nanostructures for dye-sensitized solar cells［J］. Advanced Materials, 2009, 21(41): 4087-4108.

[6] Wang H, Sun Y, Fang L, et al. Growth and characterization of high transmittance GZO films prepared by sol-gel method［J］. Thin Solid Films, 2016, 615: 19-24.

[8] Tsai T Y, Chen T H， Tu S L, et al. Effect of annealing temperature on the optoelectronic characteristic of Al and Ga co-doping ZnO thin films［J］. Optical & Quantum Electronics, 2016, 48(10): 475-476.

[9] Liu W S, Hsieh W T, Chen S Y, et al. Improvement of CIGS solar cells with high performance transparent conducting Ti-doped GaZnO thin fifilms［J］. Solar Energy, 2018, 174: 83-86

[10] Kim D, Yun I, Kim H， et al. Fabrication of rough Al doped ZnO films deposited by low pressure chemical vapor deposition for high efficiency thin film solar cells［J］. Current Applied Physics, 2010, 10(3): s459-s462.

[11] Qian X, Cao Y, Guo B, et al. Atomic layer deposition of Al-doped ZnO films using aluminum isopropoxide as the Al precursor［J］. Chemical Vapor Deposition, 2013, 19(4-6): 180-185.

[12] Taabouche A, Bouabellou A, Kermiche F, et al. Effect of substrates on the properties of ZnO thin films grown by pulsed laser deposition［J］. Advances in Materials Physics & Chemistry, 2013, 3(4): 209-213.

[13] Cui X Z, Zhang T C, Mei Z X, et al. Growth of single-crystalline ZnO film with two-dimensional periodic structure on Si(111) substrate by molecular beam epitaxy［J］. Journal of Crystal Growth, 2008, 310(24): 5428-5431.

[14] Hou Y, Jayatissa A H. Effect of laser irradiation on gas sensing properties of sol-gel derived nanocrystalline Al-doped ZnO thin films［J］. Thin Solid Films, 2014, 562: 585-591.

[15] Monemdjou A, Ghodsi F E, Mazloom J. The effects of surface morphology on optical and electrical properties of nanostructured AZO thin films:fractal and phase imaging analysis［J］. Superlattices and Microstructures, 2014, 74: 19-33.

[16] Rao T P, Kumar M C S, Hussain N S. Effects of thickness and atmospheric annealing on structural, electrical and optical properties of GZO thin films by spray pyrolysis［J］. Journal of Alloys and Compounds, 2012, 541: 495-504.

[17] Xu Z Q, Deng H, Xie J， et al. Al-doping effects on optical properties of c-axis orientated ZnO∶Al thin films prepared by the sol-gel method［J］. Journal of Optoelectronics Laser, 2006, 17(3): 257-260.

[18] Kang J H, Lee M H, Kim D W, et al. The annealing effect on damp heat stability of AGZO thin films prepared by DC moving magnetron sputtering［J］. Current Applied Physics, 2011, 11(3):333-336.

[19] Agashe C, Kluth O, Schpe G, et al. Optimization of the electrical properties of magnetron sputtered aluminum-doped zinc oxide films for opto-electronic applications［J］. Thin Solid Films, 2003, 442(1-2): 167-172.

[20] Chen J, Sun Y H, Lv X, et al. Preparation and characterization of high-transmittance AZO films using RF magnetron sputtering at room temperature[J]. Applied Surface Science, 2014, 317: 1000-1003.

[21] Wu F, Fang L, Pan Y J, et al. Seebeck and magnetoresistive effects of Ga-doped ZnO thin films prepared by RF magnetron sputtering［J］. Applied Surface Science, 2009, 255(21): 8855-8859.

[22] Cebulla R, Wendt R, Ellmer K. Al-doped zinc oxide films deposited by simultaneous RF and DC excitation of a magnetron plasma: relationships between plasma parameters and structural and electrical film properties［J］. Journal of Applied Physics, 1998, 83(2): 1084-1095.

[23] Li Z Z, Chen Z Z, Huang W, et al. The transparence comparison of Ga- and Al-doped ZnO thin films［J］. Applied Surface Science, 2011, 257(20): 8486-8489.

[24] Tsay C Y, Fan K S, Lei C M. Synthesis and characterization of sol-gel derived gallium-doped zinc oxide thin films［J］. Journal of Alloys and Compounds, 2012, 512(1): 222.

[25] Jun M C, Park S U, Koh J H. Comparative studies of Al-doped ZnO and Ga-doped ZnO transparent conducting oxide thin films［J］. Nanoscale Research Letters, 2012, 7(1): 639.

[26] Shinde S S, Shinde P S, Oh Y W, et al. Structural, optoelectronic, luminescence and thermal properties of Ga-doped zinc oxide thin films［J］. Applied Surface Science, 2012, 258(24): 9969-9976.

[27] Yang W, Liu Z, Peng D L, et al. Room-temperature deposition of transparent conducting Al-doped ZnO films by RF magnetron sputtering method［J］. Applied Surface Science, 2009, 255(11): 5669-5673.

[28] Berggren K F, Semelius B E. Band-gap narrowing in heavily doped many-valley semiconductors［J］. Physics Review B, 1981, 24(4): 1971-1986.

[29] Neil P Dasgupta, Sebastian Neubert, Wonyoung Lee, et al. Atomic layer deposition of Al-doped ZnO films: effect of grain orientation on conductivity［J］. Dissertations & Theses Gradworks, 2010, 50(9):5914-5919.

[30] Wang M, Liang W, Yang Y, et al. Sol-gel derived transparent conducting ZnO∶Al thin films:effect of crystallite orientation on conductivity and self-assembled network texture［J］. Materials Chemistry & Physics, 2012, 134(2/3):845-850.