Xinrui Fan, Xiaofei Diao, Jianwei Wu, Yanhui Kang. High-precision profile measurement method for axisymmetric aspheric mirror (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220500
- Infrared and Laser Engineering
- Vol. 51, Issue 9, 20220500 (2022)
Fig. 1. Schematic diagram of the optical probe normal tracking trajectory
Fig. 2. Schematic diagram of coordinate scanning device with separate metrology frames
Fig. 3. Schematic diagram of optical probe interference principle
Fig. 4. Positioning and measuring principle of scanning mechanism
Fig. 5. Non-contact scanning measurement device
Fig. 6. Image of reflector under test
Fig. 7. Measurement errors of ϕ 25 mm standard ball
Fig. 8. Measurement standard deviation ofϕ 25 mm standard ball
Fig. 9. Measurement errors of aspheric mirror
Fig. 10. Measurement standard deviation of aspheric mirror
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Table 1. Characteristic parameters of different non-contact scanning probes
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