Lihua Lei, Yujie Zhang, Yunxia Fu. Displacement measurement error of grating interferometer based on vector diffraction theory[J]. Infrared and Laser Engineering, 2024, 53(2): 20230536
- Infrared and Laser Engineering
- Vol. 53, Issue 2, 20230536 (2024)
Fig. 1. Schematic of grating interferometer displacement measurement
Fig. 2. Assembled state diagram of the grating relative displacement table
Fig. 3. Analogue measurement error at a displacement of 100 mm
Fig. 4. Readhead assembly error diagram
Fig. 5. Grating vector incidence plane view
Fig. 6. Effect of β -angle on measurement error when other effects are absent
Fig. 7. Effect of β -angle on measurement error when other effects are present
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