The compact Gd-doped ceria (GDC) film can be applied to the barrier layer between the cathode LSCF and the electrolyte YSZ of solid oxide fuel cell (SOFC) to prevent the formation of the insulating phase SrZrO₃, thereby improving the fuel cell durability. In this paper, four (2,2,6,6-tetramethyl-3, 5-heptadione) cerium (Ce(DPM)₄) and three (2,2,6,6-tetramethyl-3, 5-heptadione) gadolinium (Gd(DPM)₃) were used as precursor, GDC barrier films were prepared on YSZ ceramic substrates using intelligent chemical vapor deposition equipment at 723~923 K. Effects of deposition temperatures on the phase composition, preferred orientation, macroscopic surface, microstructure and electrochemical properties of GDC barrier films were investigated, respectively. Light yellow GDC films with (200) preferred orientation are obtained at 748~923 K, and the GDC grains show an island growth pattern. A (200) preferred orientation light yellow GDC film with the best blocking ability is prepared at 873 K. The measured impedance of the LSCF/GDC/YSZ/GDC/LSCF fuel cell at 1 073 K is 0.08 Ω·cm², and the activation energy is 1.52 eV, indicating that 873 K is the best deposition temperature for GDC barrier film preparation using chemical vapor deposition.