Based on diffraction optical theory, diffraction of a laser beam with periodic amplitude modulation and phase distortion is derived in 3ω optics system. Influence of defocus distance and focal length of a focusing lens on intensity distribution of diffraction light is investigated by numerical simulation. The results show that appropriate distance away from the focus spot and increase the focal length in final optical systems are beneficial to control the modulation of light intensity fluctuations and reduce the optical components damage caused by small-scale self-focusing effect.