The lithium tantalate crystal material was etched by the ion etching process, and an inverted-mesa structure wafer was obtained, the thickness of which was about 31.3 μm, which can be used to fabricate high fundamental frequency crystal resonators. A high frequency broadband crystal filter with a center frequency of 63 MHz, 3 dB bandwidth of 780 kHz, stopband attenuation of greater than 75 dB and the operating temperature of -55 to +95 ℃ is designed by using the fabricated resonator and the differential bridge circuit in the circuit. The experimental results show that the upper limit of the operating frequency of the crystal filter can be greatly increased by using the ion beam etching process.