Jiani Liu, Anhe Chen, Zhiyong Li, Fangyuan Xia, Bingcai Liu, Shijie Li. High-precision shape measurement technology for convex aspheric with small aperture and large convex asphericity[J]. Infrared and Laser Engineering, 2022, 51(9): 20220190
- Infrared and Laser Engineering
- Vol. 51, Issue 9, 20220190 (2022)
Fig. 1. Schematic diagram of testing convex aspheric with CGH method
Fig. 2. Convex aspheric parameters and simulation results. (a) Convex aspheric parameters; (b) Simulation results of vector height and asphericity
Fig. 3. Optical path structure parameters of convex aspheric detected by CGH
Fig. 4. Test CGH design results. (a) Residual wavefront; (b) CGH phase and fringe frequency distribution
Fig. 5. Alignment CGH design results. (a) Residual wavefront; (b) CGH phase and fringe frequency distribution
Fig. 6. Diagram of CGH design simulation and processing object
Fig. 7. Measurement of convex aspheric by CGH method. (a) Test site; (b) Test result of surface shape
Fig. 8. Measurement of convex aspheric by Luphoscan method. (a) Test site; (b) Surface shape test results
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Table 1. CGH design result and its manufacturing parameter
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