Lithium niobate planar and ridge waveguides fabricated by 3 MeV oxygen ion implantation and precise diamond dicing

Jinhua Zhao; Xueshuai Jiao; Yingying Ren; Jinjun Gu; Sumei Wang; Mingyang Bu; Lei Wang

doi:10.3788/COL202119.060009

Journals >Chinese Optics Letters >Volume 19 >Issue 6 >Page 060009 > Article

Chinese Optics Letters
Vol. 19, Issue 6, 060009 (2021)

Lithium niobate planar and ridge waveguides fabricated by 3 MeV oxygen ion implantation and precise diamond dicing

Jinhua Zhao^1、*, Xueshuai Jiao¹, Yingying Ren², Jinjun Gu¹, Sumei Wang¹, Mingyang Bu¹, and Lei Wang³

Author Affiliations

¹School of Science, Shandong Jianzhu University, Jinan 250101, China

²Shandong Provincial Engineering and Technical Center of Light Manipulations & Shandong Provincial Key Laboratory of Optics and Photonic Device, School of Physics and Electronics, Shandong Normal University, Jinan 250014, China

³School of Physics, Shandong University, Jinan 250100, China

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DOI: 10.3788/COL202119.060009 Cite this Article Set citation alerts

Jinhua Zhao, Xueshuai Jiao, Yingying Ren, Jinjun Gu, Sumei Wang, Mingyang Bu, Lei Wang, "Lithium niobate planar and ridge waveguides fabricated by 3 MeV oxygen ion implantation and precise diamond dicing," Chin. Opt. Lett. 19, 060009 (2021) Copy Citation Text

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