• Opto-Electronic Engineering
  • Vol. 51, Issue 10, 240164 (2024)
Guangsheng Deng1、2, Aoran Guo2, Xinqi Cheng2, Jun Yang1、2, and Fei Cai1、*
Author Affiliations
  • 1Special Display and Imaging Technology Innovation Center of Anhui Province,Academy of Opto-Electronic Technology,Hefei University of Technology,Hefei,Anhui 230009,China
  • 2Anhui Province Key Laboratory of Measuring Theory and Precision Instrument,School of Instrument Science and Optoelectronics Engineering,Hefei University of Technology,Hefei,Anhui 230009,China
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    DOI: 10.12086/oee.2024.240164 Cite this Article
    Guangsheng Deng, Aoran Guo, Xinqi Cheng, Jun Yang, Fei Cai. Dual-layer 3D terahertz metamaterial based multifunctional sensor[J]. Opto-Electronic Engineering, 2024, 51(10): 240164 Copy Citation Text show less

    Abstract

    The versatility of sensors,as a crucial part of integrated devices,is receiving increasing attention. Here,a terahertz metamaterial multifunctional sensor based on the coupling of a two-layer 3D resonant structure is introduced. The sensor consists of an upper and lower polyimide film substrate,a graphite layer attached to the lower polyimide film substrate,and a periodic double-layer 3D toothed coupling resonant structure between the graphite layer and the upper polyimide film substrate,which consists of a symmetric mountain-shaped structure in the lower layer and a symmetric concave structure in the upper layer. The three-dimensional metamaterial can achieve multifunctional measurements: the refractive index change of the liquid medium can be detected with high sensitivity by measuring the resonant frequency of the structure. Therefore,it is possible to detect the liquid medium with such a design. Meanwhile,in terms of micro displacement sensing,a high micro displacement measurement sensitivity can be realized in both the z-axis and y-axis directions,respectively. The 3D metamaterial sensor proposed in this paper provides an idea for the design of a functionally integrated sensor in the terahertz region.
    Guangsheng Deng, Aoran Guo, Xinqi Cheng, Jun Yang, Fei Cai. Dual-layer 3D terahertz metamaterial based multifunctional sensor[J]. Opto-Electronic Engineering, 2024, 51(10): 240164
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