• Journal of Terahertz Science and Electronic Information Technology
  • Vol. 22, Issue 1, 17 (2024)
ZHANG Min*, ZHANG Ke, and YANG Pengyun
Author Affiliations
  • [in Chinese]
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    DOI: 10.11805/tkyda2023289 Cite this Article
    ZHANG Min, ZHANG Ke, YANG Pengyun. Study on the characteristics of mini-cathode anti-emission coating based on THz vacuum devices[J]. Journal of Terahertz Science and Electronic Information Technology , 2024, 22(1): 17 Copy Citation Text show less

    Abstract

    In order to meet the demand of THz vacuum devices for miniature electron beam with high current density, a kind of miniature cathode has been prepared by depositing Ta/Zr coating on impregnated scandate cathode surface via dual Ion-Beam-Assisted Deposition (Dual IBAD) and etching an emission zone with a diameter of 100 m via Focus Ion Beam(FIB). Based on the previous study, this paper focuses on the characteristics of anti-emission coating. It is shown in the experimental results that Ta/Zr coating prepared by dual Ion Beam Assisted Deposition(Dual IBAD) can suppress electron emission more effectively and has a longer life time than that prepared by magnetron sputtering. The reasons for the sound anti-emission performance are that composition with high work function is formed in the process of Barium diffusion into the Ta/Zr coating, and that Barium diffusion is effectively suppressed by the high dense Ta/Zr coating.
    ZHANG Min, ZHANG Ke, YANG Pengyun. Study on the characteristics of mini-cathode anti-emission coating based on THz vacuum devices[J]. Journal of Terahertz Science and Electronic Information Technology , 2024, 22(1): 17
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