Qiuyue Yu, Xiaohua Zhou, Guoyan Wang, Guobao Qiao, Tianbin Lv, Zhaojian Zhang, Jinghua Wang, Jianye Shao, Yuntao Cheng. Reduction of grid effect in ultra-light mirror machining by inflatable balanced method (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220389
- Infrared and Laser Engineering
- Vol. 51, Issue 9, 20220389 (2022)
Fig. 1. Structural diagram of Ø 350 mm ULE mirror
Fig. 2. Simulation analysis model of the mirror
Fig. 3. (a) Surface precision simulation result under 2000 Pa pressure; (b) Simulation result of Gaussian filtering (Frequency band error greater than 30 mm)
Fig. 4. Processing flow
Fig. 5. Polishing surface B by manipulator
Fig. 6. (a) Surface detection result of surface A; (b) Surface detection result of surface B
Fig. 7. (a) Gaussian filtering result of surface A; (b) Gaussian filtering result of surface B
Fig. 8. Surface precision comparison of surface A and surface B in the area of two support ribs
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Table 1. Mechanical property parameters of ULE primary mirror
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Table 2. Analysis of PV and RMS values of surface shape at support ribs
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