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Special Issue on Lithium Niobate Based Photonic Devices|16 Article(s)
Hybrid mono-crystalline silicon and lithium niobate thin films [Invited]|Editors' Pick
Houbin Zhu, Qingyun Li, Huangpu Han, Zhenyu Li, Xiuquan Zhang, Honghu Zhang, and Hui Hu
The heterogeneous integration of silicon thin film and lithium niobate (LN) thin film combines both the advantages of the excellent electronics properties and mature micro-processing technology of Si and the excellent optical properties of LN, comprising a potentially promising material platform for photonic integrated circuits. Based on ion-implantation and wafer-bonding technologies, a 3 inch wafer-scale hybrid mono-crystalline Si/LN thin film was fabricated. A high-resolution transmission electron microscope was used to investigate the crystal-lattice arrangement of each layer and the interfaces. Only the H-atom-concentration distribution was investigated using secondary-ion mass spectroscopy. High-resolution X-ray-diffraction ω–2θ scanning was used to study the lattice properties of the Si/LN thin films. Raman measurements were performed to investigate the bulk Si and the Si thin films. Si strip-loaded straight waveguides were fabricated, and the optical propagation loss of a 5-μm-width waveguide was 6 dB/cm for the quasi-TE mode at 1550 nm. The characterization results provide useful information regarding this hybrid material. The heterogeneous integration of silicon thin film and lithium niobate (LN) thin film combines both the advantages of the excellent electronics properties and mature micro-processing technology of Si and the excellent optical properties of LN, comprising a potentially promising material platform for photonic integrated circuits. Based on ion-implantation and wafer-bonding technologies, a 3 inch wafer-scale hybrid mono-crystalline Si/LN thin film was fabricated. A high-resolution transmission electron microscope was used to investigate the crystal-lattice arrangement of each layer and the interfaces. Only the H-atom-concentration distribution was investigated using secondary-ion mass spectroscopy. High-resolution X-ray-diffraction ω–2θ scanning was used to study the lattice properties of the Si/LN thin films. Raman measurements were performed to investigate the bulk Si and the Si thin films. Si strip-loaded straight waveguides were fabricated, and the optical propagation loss of a 5-μm-width waveguide was 6 dB/cm for the quasi-TE mode at 1550 nm. The characterization results provide useful information regarding this hybrid material.
Chinese Optics Letters
- Publication Date: Jun. 10, 2021
- Vol. 19, Issue 6, 060017 (2021)
Wideband thin-film lithium niobate modulator with low half-wave-voltage length product|Fast Track
Xuecheng Liu, Bing Xiong, Changzheng Sun, Jian Wang, Zhibiao Hao, Lai Wang, Yanjun Han, Hongtao Li, Jiadong Yu, and Yi Luo
A novel thin-film lithium niobate (TFLN) electro-optic modulator is proposed and demonstrated. LiNbO3-silica hybrid waveguide is adopted to maintain low optical loss for an electrode spacing as narrow as 3 µm, resulting in a low half-wave-voltage length product of only 1.7 V·cm. Capacitively loaded traveling-wave electrodes are employed to reduce the microwave loss, while a quartz substrate is used in place of a silicon substrate to achieve velocity matching. The fabricated TFLN modulator with a 5-mm-long modulation region exhibits a half-wave voltage of 3.4 V and a merely less than 2 dB roll-off in an electro-optic response up to 67 GHz. A novel thin-film lithium niobate (TFLN) electro-optic modulator is proposed and demonstrated. LiNbO3-silica hybrid waveguide is adopted to maintain low optical loss for an electrode spacing as narrow as 3 µm, resulting in a low half-wave-voltage length product of only 1.7 V·cm. Capacitively loaded traveling-wave electrodes are employed to reduce the microwave loss, while a quartz substrate is used in place of a silicon substrate to achieve velocity matching. The fabricated TFLN modulator with a 5-mm-long modulation region exhibits a half-wave voltage of 3.4 V and a merely less than 2 dB roll-off in an electro-optic response up to 67 GHz.
Chinese Optics Letters
- Publication Date: Jun. 10, 2021
- Vol. 19, Issue 6, 060016 (2021)
Effect of dimension variation for second-harmonic generation in lithium niobate on insulator waveguide [Invited]
Xiao-Hui Tian, Wei Zhou, Kun-Qian Ren, Chi Zhang, Xiaoyue Liu, Guang-Tai Xue, Jia-Chen Duan, Xinlun Cai, Xiaopeng Hu, Yan-Xiao Gong, Zhenda Xie, and Shi-Ning Zhu
We study the effect of dimension variation for second-harmonic generation (SHG) in lithium niobate on insulator (LNOI) waveguides. Non-trivial SHG profiles in both type-0 and type-I quasi-phase matching are observed during the wavelength tuning of the fundamental light. Theoretical modeling shows that the SHG profile and efficiency can be greatly affected by the waveguide cross-section dimension variations, especially the thickness variations. In particular, our analysis shows that a thickness variation of tens of nanometers is in good agreement with the experimental results. Such investigations could be used to evaluate fabrication performance of LNOI-based nonlinear optical devices. We study the effect of dimension variation for second-harmonic generation (SHG) in lithium niobate on insulator (LNOI) waveguides. Non-trivial SHG profiles in both type-0 and type-I quasi-phase matching are observed during the wavelength tuning of the fundamental light. Theoretical modeling shows that the SHG profile and efficiency can be greatly affected by the waveguide cross-section dimension variations, especially the thickness variations. In particular, our analysis shows that a thickness variation of tens of nanometers is in good agreement with the experimental results. Such investigations could be used to evaluate fabrication performance of LNOI-based nonlinear optical devices.
Chinese Optics Letters
- Publication Date: Jun. 10, 2021
- Vol. 19, Issue 6, 060015 (2021)
Broadband and lossless lithium niobate valley photonic crystal waveguide [Invited]|Editors' Pick
Rui Ge, Xiongshuo Yan, Yuping Chen, and Xianfeng Chen
We investigate the influences of structure parameters and interface shapes on the bandwidth of the edge state of lithium niobate valley photonic crystals. By increasing the size difference of two air holes in the same unit cell, we find that the bandwidth of the lossless nontrivial edge state possesses a peak value of 0.0201(a/λ), which can be used to construct broadband valley photonic crystal waveguides. Mode field distributions verify that the waveguide is robust against sharp bends and exhibits chirality. When the unit cell is arranged in a bearded interface with the top and bottom components showing negative and positive valley Chern numbers, respectively, we find that the lithium niobate valley photonic crystal is more likely to exhibit a lossless edge state, which is difficult to be realized in valley waveguides with low refractive index materials. This work can provide guidance on the design of the high-performance topological waveguide. We investigate the influences of structure parameters and interface shapes on the bandwidth of the edge state of lithium niobate valley photonic crystals. By increasing the size difference of two air holes in the same unit cell, we find that the bandwidth of the lossless nontrivial edge state possesses a peak value of 0.0201(a/λ), which can be used to construct broadband valley photonic crystal waveguides. Mode field distributions verify that the waveguide is robust against sharp bends and exhibits chirality. When the unit cell is arranged in a bearded interface with the top and bottom components showing negative and positive valley Chern numbers, respectively, we find that the lithium niobate valley photonic crystal is more likely to exhibit a lossless edge state, which is difficult to be realized in valley waveguides with low refractive index materials. This work can provide guidance on the design of the high-performance topological waveguide.
Chinese Optics Letters
- Publication Date: Jun. 10, 2021
- Vol. 19, Issue 6, 060014 (2021)
Surface lattice resonances in dielectric metasurfaces for enhanced light-matter interaction [Invited]
Yuechen Jia, Yingying Ren, Xingjuan Zhao, and Feng Chen
Lithium niobate (LiNbO3) is a versatile crystalline material for various photonic applications. With the recent advances in LiNbO3-on-insulator (LNOI) thin film technology, LiNbO3 has been regarded as one of the most promising platforms for multi-functional integrated photonics. In this work, we present the field enhancement due to collective resonances in arrayed LiNbO3 nanoantennas. These resonances arise from the enhanced radiative coupling of localized Mie resonances in the individual nanoparticles and Rayleigh anomalies due to in-plane diffraction orders of the lattice. We describe the pronounced differences in field enhancement and field distributions for electric and magnetic dipoles, offering valuable information for the design and optimization of high-quality-factor optical metasurfaces based on LiNbO3. Lithium niobate (LiNbO3) is a versatile crystalline material for various photonic applications. With the recent advances in LiNbO3-on-insulator (LNOI) thin film technology, LiNbO3 has been regarded as one of the most promising platforms for multi-functional integrated photonics. In this work, we present the field enhancement due to collective resonances in arrayed LiNbO3 nanoantennas. These resonances arise from the enhanced radiative coupling of localized Mie resonances in the individual nanoparticles and Rayleigh anomalies due to in-plane diffraction orders of the lattice. We describe the pronounced differences in field enhancement and field distributions for electric and magnetic dipoles, offering valuable information for the design and optimization of high-quality-factor optical metasurfaces based on LiNbO3.
Chinese Optics Letters
- Publication Date: Jun. 10, 2021
- Vol. 19, Issue 6, 060013 (2021)
Recent progress of second harmonic generation based on thin film lithium niobate [Invited]
Yang Li, Zhijin Huang, Wentao Qiu, Jiangli Dong, Heyuan Guan, and Huihui Lu
Recently, nonlinear photonics has attracted considerable interest. Among the nonlinear effects, second harmonic generation (SHG) remains a hot research topic. The recent development of thin film lithium niobate (TFLN) technology has superior performances to the conventional counterparts. Herein, this review article reveals the recent progress of SHG based on TFLN and its integrated photonics. We mainly discuss and compare the different techniques of TFLN-based structures to boost the nonlinear performances assisted by localizing light in nanostructures and structured waveguides. Moreover, our conclusions and perspectives indicate that more efficient methods need to be further explored for higher SHG conversion efficiency on the TFLN platform. Recently, nonlinear photonics has attracted considerable interest. Among the nonlinear effects, second harmonic generation (SHG) remains a hot research topic. The recent development of thin film lithium niobate (TFLN) technology has superior performances to the conventional counterparts. Herein, this review article reveals the recent progress of SHG based on TFLN and its integrated photonics. We mainly discuss and compare the different techniques of TFLN-based structures to boost the nonlinear performances assisted by localizing light in nanostructures and structured waveguides. Moreover, our conclusions and perspectives indicate that more efficient methods need to be further explored for higher SHG conversion efficiency on the TFLN platform.
Chinese Optics Letters
- Publication Date: Jun. 10, 2021
- Vol. 19, Issue 6, 060012 (2021)
Nonlinear Talbot self-healing in periodically poled LiNbO3 crystal [Invited]|On the Cover
Bingxia Wang, Shan Liu, Tianxiang Xu, Ruwei Zhao, Peixiang Lu, Wieslaw Krolikowski, and Yan Sheng
The nonlinear Talbot effect is a near-field nonlinear diffraction phenomenon in which the self-imaging of periodic objects is formed by the second harmonics of the incident laser beam. We demonstrate the first, to the best of our knowledge, example of nonlinear Talbot self-healing, i.e., the capability of creating defect-free images from faulty nonlinear optical structures. In particular, we employ the tightly focused femtosecond infrared optical pulses to fabricate LiNbO3 nonlinear photonic crystals and show that the defects in the form of the missing points of two-dimensional square and hexagonal periodic structures are restored in the second harmonic images at the first nonlinear Talbot plane. The observed nonlinear Talbot self-healing opens up new possibilities for defect-tolerant optical lithography and printing. The nonlinear Talbot effect is a near-field nonlinear diffraction phenomenon in which the self-imaging of periodic objects is formed by the second harmonics of the incident laser beam. We demonstrate the first, to the best of our knowledge, example of nonlinear Talbot self-healing, i.e., the capability of creating defect-free images from faulty nonlinear optical structures. In particular, we employ the tightly focused femtosecond infrared optical pulses to fabricate LiNbO3 nonlinear photonic crystals and show that the defects in the form of the missing points of two-dimensional square and hexagonal periodic structures are restored in the second harmonic images at the first nonlinear Talbot plane. The observed nonlinear Talbot self-healing opens up new possibilities for defect-tolerant optical lithography and printing.
Chinese Optics Letters
- Publication Date: Jun. 10, 2021
- Vol. 19, Issue 6, 060011 (2021)
High-Q lithium niobate microring resonators using lift-off metallic masks [Invited]
Ke Zhang, Zhaoxi Chen, Hanke Feng, Wing-Han Wong, Edwin Yue-Bun Pun, and Cheng Wang
High-Q lithium niobate (LN) optical micro-resonators are an excellent platform for future applications in optical communications, nonlinear optics, and quantum optics. To date, high-Q factors are typically achieved in LN using either dielectric masks or femtosecond laser ablation, while the more standard and commonly available lift-off metallic masks are often believed to lead to rough sidewalls and lowered Q factors. Here, we show that LN microring resonators with strong light confinement and intrinsic Q factors over 1 million can be fabricated using optimized lift-off metallic masks and dry etching processes, corresponding to a waveguide propagation loss of ～0.3 dB/cm. The entire process is fully compatible with wafer-scale production and could be transferred to other photonic materials. High-Q lithium niobate (LN) optical micro-resonators are an excellent platform for future applications in optical communications, nonlinear optics, and quantum optics. To date, high-Q factors are typically achieved in LN using either dielectric masks or femtosecond laser ablation, while the more standard and commonly available lift-off metallic masks are often believed to lead to rough sidewalls and lowered Q factors. Here, we show that LN microring resonators with strong light confinement and intrinsic Q factors over 1 million can be fabricated using optimized lift-off metallic masks and dry etching processes, corresponding to a waveguide propagation loss of ～0.3 dB/cm. The entire process is fully compatible with wafer-scale production and could be transferred to other photonic materials.
Chinese Optics Letters
- Publication Date: Jun. 10, 2021
- Vol. 19, Issue 6, 060010 (2021)
Lithium niobate planar and ridge waveguides fabricated by 3 MeV oxygen ion implantation and precise diamond dicing
Jinhua Zhao, Xueshuai Jiao, Yingying Ren, Jinjun Gu, Sumei Wang, Mingyang Bu, and Lei Wang
We report on the fabrication and optimization of lithium niobate planar and ridge waveguides at the wavelength of 633 nm. To obtain a planar waveguide, oxygen ions with an energy of 3.0 MeV and a fluence of 1.5×1015 ions/cm2 are implanted in the polished face of LiNbO3 crystals. For planar waveguides, a loss of 0.5 dB/cm is obtained after annealing at 300°C for 30 min. The ridge waveguide is fabricated by the diamond blade dicing method on optimized planar waveguides. The guiding properties are investigated by prism coupling and end-face coupling methods. We report on the fabrication and optimization of lithium niobate planar and ridge waveguides at the wavelength of 633 nm. To obtain a planar waveguide, oxygen ions with an energy of 3.0 MeV and a fluence of 1.5×1015 ions/cm2 are implanted in the polished face of LiNbO3 crystals. For planar waveguides, a loss of 0.5 dB/cm is obtained after annealing at 300°C for 30 min. The ridge waveguide is fabricated by the diamond blade dicing method on optimized planar waveguides. The guiding properties are investigated by prism coupling and end-face coupling methods.
Chinese Optics Letters
- Publication Date: Jun. 10, 2021
- Vol. 19, Issue 6, 060009 (2021)
On-chip erbium-doped lithium niobate waveguide amplifiers [Invited]
Qiang Luo, Chen Yang, Zhenzhong Hao, Ru Zhang, Dahuai Zheng, Fang Bo, Yongfa Kong, Guoquan Zhang, and Jingjun Xu
Lithium niobate on insulator (LNOI), as an emerging and promising optical integration platform, faces shortages of on-chip active devices including lasers and amplifiers. Here, we report the fabrication of on-chip erbium-doped LNOI waveguide amplifiers based on electron beam lithography and inductively coupled plasma reactive ion etching. A net internal gain of ～30 dB/cm in the communication band was achieved in the fabricated waveguide amplifiers under the pump of a 974 nm continuous laser. This work develops new active devices on LNOI and may promote the development of LNOI integrated photonics. Lithium niobate on insulator (LNOI), as an emerging and promising optical integration platform, faces shortages of on-chip active devices including lasers and amplifiers. Here, we report the fabrication of on-chip erbium-doped LNOI waveguide amplifiers based on electron beam lithography and inductively coupled plasma reactive ion etching. A net internal gain of ～30 dB/cm in the communication band was achieved in the fabricated waveguide amplifiers under the pump of a 974 nm continuous laser. This work develops new active devices on LNOI and may promote the development of LNOI integrated photonics.
Chinese Optics Letters
- Publication Date: Jun. 10, 2021
- Vol. 19, Issue 6, 060008 (2021)
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