
- SJ_Zhang
- Jun. 2, 2025
Abstract
Optical frequency division relies on optical frequency combs to translate ultrastable optical frequency references coherently to the microwave domain. This technology has enabled the synthesis of microwave signals with ultralow timing noise; however, the necessary instrumentation remains too bulky for practical applications. Recently, efforts have focused on leveraging microphotonic technologies to enhance system compactness. Here we develop an optical frequency division system using microresonator-based frequency references and comb generators. The soliton microcomb formed in an integrated Si3N4 microresonator is stabilized to two lasers referenced to an ultrahigh-quality-factor MgF2 microresonator. Photodetection of the soliton pulse train produces 25-GHz microwaves with an absolute phase noise of –141 dBc Hz–1 (546 zs Hz−1/2) at a 10-kHz offset frequency, which can be further referenced to an atomic clock for improved long-term stability. The synthesized microwave signals are evaluated as carrier waves in communication and radar applications, demonstrating enhanced fidelity and sensitivity against interference compared with those derived from electronic oscillators. Our work demonstrates unprecedented coherence in microphotonic microwave oscillators, providing key building blocks for next-generation timekeeping, navigation and satellite communication systems.
Main
Consumer microwave technologies are transitioning towards the X-band and beyond to accommodate the booming data traffic. However, these expanded radio-frequency channels will soon be overwhelmed by the exponential growth of satellite communications1,2,3. Furthermore, other microwave applications, including geodesy4, meteorological observations5 and marine monitoring6, are utilizing these same frequency ranges. It is envisioned that improving channel capacity and transmission fidelity would be the most critical task for the widespread implementation of next-generation communication technologies.
To this end, low-noise microwave oscillators have become the cornerstone for advanced communication systems, which can enable high-modulation formats and minimize interchannel cross-talk. They also play a critical role in enhancing radar accuracy, sensitivity and dynamic range7. Although electronic oscillators are facing bandwidth limitations and degraded performance at higher-frequency bands, photonic technologies can overcome this challenge by synthesizing microwaves through laser beatnotes, as in the form of optoelectronic oscillators8,9, Brillouin oscillators10,11, dual-frequency lasers12 and optical frequency combs13. Notably, optical frequency combs offer the unique ability to coherently connect optical and microwave signals through optical frequency division (OFD)14. This is usually achieved by stabilizing a set of equidistant comb lines—the comb structure—to optical frequency references, and the microwave-rate beatnote of comb lines sustains the relative stability of frequency references with remarkable fidelity15,16,17,18,19,20. The OFD of ultrastable frequency references derived from atoms, ions or high-finesse optical resonators has led to many performance milestones in microwave technology, including record-low absolute timing noise of 41 zs Hz−1/2 (ref. 17) and fractional stability of 10–18 (ref. 18).
The key components of an OFD system are frequency references and optical frequency combs, which are typically bulky and expensive. For example, conventional ultrastable resonators, such as Fabry–Pérot resonators made of ultralow-expansion glass or single-crystal silicon15,17,21,22, often require vacuum enclosures or cryogenic temperatures to minimize acoustic noise and thermal drifts. Moreover, table-top optical frequency combs constructed from free space or fibre-optic elements are usually too delicate for operation outside laboratories. Therefore, OFD systems have not yet been deployed for practical applications. Recently, OFD systems have started to incorporate microphotonic technologies23,24, which are motivated by the demonstration of soliton microcombs in microresonators25. Ultrastable resonators have also been redesigned to operate under ambient conditions. Remarkably, OFD systems using centimetre-scale mini-Fabry–Pérot resonators have achieved timing noise performance approaching 1 as Hz−1/2 at a 10-kHz offset frequency23.
Using whispering-gallery-mode (WGM) microresonators as ultrastable frequency references have several advantages26,27,28. First, these microresonators are solid-state devices with exceptional mechanical stability. The optical modes are confined along the periphery through total internal reflections, resulting in a highly compact geometry that can be realized using thin discs or photonic chips. This mechanism also supports ultrahigh-quality (Q) factors exceeding 100 million29,30,31,32,33,34. Moreover, they can be fabricated using temperature-insensitive materials (with low thermo-optic and thermal expansion coefficients) using standard micromachining processes that do not require precise microassembly. These features enable the rapid production of optical references with appealing noise performance and compactness for OFD systems. Here we reference a soliton microcomb to a WGM microresonator, and the synthesized microwave features record-low timing noise among all microphotonic microwave oscillators. We also demonstrate communication and radar applications based on OFD systems, showing improved performance compared with those built on electronic oscillators.
Results
Principle
As depicted in Fig. 1a, the reference microresonator is fabricated from a MgF2 disc through mechanical grinding and polishing processes35, yielding a diameter of 29.146 mm and a free spectral range (FSR) of 2.365 GHz (Methods). MgF2 is chosen for its lowest thermo-optic coefficient among all low-loss optical materials (Extended Data Table 1). The trapezoid cross-section supports WGMs with mode areas over 1,000 µm2. Such a large mode volume, combined with a low thermo-optic coefficient of 0.9 × 10−6 K−1, provides a low thermorefractive noise that is at least 30 dB lower than silica and Si3N4 microresonators with the same FSR. On the other hand, Si3N4 microresonators are very suitable for soliton microcomb generation due to their strong Kerr nonlinearity and tight optical confinement. The Si3N4 microresonator used here is fabricated via standard photolithography and plasma-etching processes36, resulting in an FSR closely approximating 25 GHz.
Fig. 1: Conceptual illustration of microresonator-based OFD.
a, Photograph of a MgF2 reference microresonator. b, Photograph of a Si3N4 nonlinear microresonator. The insets show the cross-sectional profile of the fundamental mode of each microresonator. c, Concept of two-point OFD. d, OFD error signal generation and feedback control of the soliton microcomb. PD, photodetector.
Two-point OFD operations based on these two devices are described in Fig. 1c. Two lasers (fA and fB) are simultaneously stabilized to two modes of the MgF2 microresonator. The spatial overlap between these modes provides common-mode noise rejection once the residual locking noise is below the thermal noise. It results in a mutual phase noise for fB – fA that is lower than that of each laser, and we use fB – fA as the frequency reference for further division. As shown in Fig. 1d, the microresonator is excited by a continuous-wave pump laser to generate a soliton microcomb with repetition frequency fr. The reference lasers are combined with two adjacent comb lines indexed by m and n relative to the pump. The photodetected beatnotes are then downmixed to fB – fA – (m – n)fr and locked to a local oscillator (LO) with frequency fLO. This locking is commonly achieved by adjusting the pump frequency, which regulates fr through the Raman-induced soliton self-frequency shift37. Photodetection of the soliton pulse train provides the stabilized repetition frequency as
If the phase noise of the LO is not dominant, we can anticipate that the phase noise of fr is reduced by a factor of (m – n)2 compared with that of fB – fA.
Optical frequency references
We first characterize the performance of the frequency reference. To ensure stable operation, we enclose the MgF2 microresonator in a metallic package with a tapered fibre coupler and a thermoelectric cooler (Fig. 2a). The packaging process does not affect the resonator’s Q factors, which can reach nearly 3 billion under near-critical coupling conditions. The Q factor and coupling can sustain for months without degradation, even in vibrational environments (Extended Data Fig. 1).
Fig. 2: Characterization of optical frequency references.
a, Photograph of the packaged MgF2 reference microresonator. b, Typical transmission spectrum of resonance. The intrinsic quality factor Qo is derived from Lorentzian fitting as 2.8 billion. c, Transmission spectra spanning more than the FSR. d, Measured relative frequency noise of the free-running and locked reference lasers. The simulated individual and relative thermorefractive noise of the references are also plotted, between which lies the regime accessible via common-mode noise rejection.
Two fibre lasers at wavelengths of 1,540 nm and 1,560 nm are stabilized to the MgF2 microresonator using the Pound–Drever–Hall technique (Extended Data Fig. 2). Servo control is applied to the laser piezos and acousto-optic frequency shifters, providing a locking bandwidth of up to 300 kHz. Although the microresonator can support several transverse modes within an FSR, we stabilize the lasers to a pair of modes belonging to the same longitudinal mode family (Fig. 2c). The relative frequency noises of these lasers are characterized by using a multifrequency delayed self-heterodyne interferometer38,39 (Methods). The relative frequency noise of the reference lasers is shown in Fig. 2d, where locking to the microresonator results in a noise reduction of more than 50 dB. In particular, the relative noise at offset frequencies ranging from 10 Hz to 1 kHz exhibits white noise characteristics, which is more than 10 dB below the thermorefractive noise of the microresonator. This behaviour indicates common-mode noise rejection, necessitating that both modes belong to the same longitudinal mode family. Consequently, the relative frequency noise between the two lasers within this frequency range is limited by residual noises in the Pound–Drever–Hall locking setup. An additional reduction of over 20 dB is anticipated by further minimizing these residual locking noises.
OFD
The detailed experimental setup to realize OFD is described in the Methods and Extended Data Fig. 3. The soliton microcomb exhibits a characteristic spectral envelope of sech2 and a 3-dB bandwidth spanning over 30 nm (Fig. 3a). This bandwidth is sufficient to bridge the frequency gap between reference lasers (20 nm, or equivalently 2.5 THz), and dividing it to the 25-GHz repetition frequency should provide a noise reduction factor of 40 dB. The radio-frequency beatnotes of the free-running and stabilized soliton microcombs acquired with an electrical spectral analyser are compared in Fig. 3b,c. The former is susceptible to various technical noise sources, including noise transduced from the pump laser and temperature fluctuations within the microresonator, leading to a broader linewidth and frequency drift. By contrast, the repetition frequency of the stabilized soliton microcomb primarily follows the frequency references and exhibits a notable reduction in linewidth.
Fig. 3: OFD characterization.
a, Optical spectra of the soliton microcomb and the reference lasers. b, Beatnote of the free-running soliton microcomb. c, Beatnote of the locked soliton microcomb. RBW, resolution bandwidth. d, Single-sideband phase noise of the free-running and locked beatnotes of the soliton microcomb. The projected contribution (scaled by 40 dB) from the optical frequency references is also plotted. The dashed black line indicates the timing jitter level of 1 as Hz−1/2. The grey-shaded area represents the noise floor of the PNA during the measurement. e, Characterization of ADEV. Top: setup for referencing the OFD signals to clocks. Bottom: fractional ADEV of the clock reference (green), the original OFD signal (blue) and the OFD signal referenced to the clock (red). Measurements below and above 100-ms averaging time are performed using a PNA and a frequency counter, respectively. The vertical bars indicate the 1σ error of the fractional ADEV. TEC, thermoelectric cooler.
Figure 3d presents a more quantitative phase noise comparison. The stabilized repetition frequency’s phase noise aligns closely with the divided frequency references. Within an offset frequency range from 10 Hz to 1 kHz, OFD leads to a noise reduction exceeding 60 dB compared with the free-running case, following the 1/f2 trend, where f is the offset frequency. A noise level of –85 dBc Hz–1 at 10 Hz to –141 dBc Hz–1 at 10-kHz offset frequency is achieved. Above the corner frequencies of approximately 300 kHz, its phase noise converges to the shot-noise-limited level of –152 dBc Hz–1.
Figure 3e shows the fractional Allan deviation (ADEV) of the OFD-generated microwave signals. We observe that the ADEV reaches its minimum value of 6.5 × 10−13 at an averaging time of 50 ms. Beyond this point, the ADEV increases due to the long-term temperature drift of the MgF2 microresonator. We implement a secondary feedback loop to suppress long-term frequency drifts. Once the primary feedback loop (the phase-locked loop (PLL) of the OFD) is engaged, the soliton beatnote is sent to a mixer along with a microwave synthesizer operating at 25 GHz to generate a low-frequency signal. This signal is then fed into a secondary PLL for active adjustments of the LO frequency of the primary PLL (fLO in equation (1)) and the temperature of the reference microresonator (influencing fB – fA). By referencing the microwave synthesizer to an Rb clock and tuning the secondary PLL to respond only to low-frequency deviations, the long-term stability of the Rb clock is coherently transferred to the OFD-generated microwave without interfering with the short-term stability provided by the MgF2 microresonator. Consequently, the hybrid system can surpass the performance of the clock reference below an averaging time of 100 ms, and then converge to the performance of the clock reference and achieve a minimum ADEV of 5.5 × 10−13 at an integration time of 3.2 s.
Anti-interference experiments
We compare the performance of our OFD system with a high-end electronic oscillator (Keysight PSG E8257D, referred to as PSG hereafter) as the LOs in three anti-interference experiments. The first objective is to test the anti-interference performance of the LOs under conditions of intense communication jamming40, such as satellite communications disturbed by millimetre waves for 5G communications and autonomous vehicles (Fig. 4a). We start the experiments by upmixing a pair of frequency-close single-tone signals—one serving as the strong interference (–20 dBm) and the other as the weak information (–97 dBm)—with the local oscillation signal generated by PSG and OFD, respectively (Extended Data Fig. 5a). As shown in Fig. 4b, when PSG is used as the LO, the noise floor of the converted interference is so high that the information signal is drowned out. When shifting from PSG to OFD-based LO, a previously obscured information signal can be observed, attributed to the ultralow-phase-noise characteristics of the OFD-based LO. We then compare the signal-to-noise ratio of the information signals for the two cases at different frequency separations. In particular, our OFD system provides a 20-dB advantage over the PSG when the two signals are 10 kHz apart (Fig. 4c).
Fig. 4: Anti-interference experiments.
a, Conceptual diagram of an interfered communication channel. b, Electrical spectra of the signals after upconversion using PSG and OFD-based LOs. The black dashed line in the top panel indicates the inferred information signal. c, Differences in the signal-to-noise ratio (SNR) of the information signal for PSG and OFD-based LOs. The x axis is the frequency difference between the information and interference signals. d, Constellation diagram of interfered 64-QAM data transmission experiments using PSG and OFD-based LOs. The normalized symbol density is indicated by colour. e, Conceptual diagram of a Doppler radar. f, Electrical spectra of the echoes using PSG and OFD-based radar signals. The two targets move towards the receiver at 0.78 m s–1 (left) and 1.05 m s–1 (right).
We then replace the single-tone information signal with communication data in the 64-QAM (QAM, quadrature amplitude modulation) format, with a symbol rate of 50 kBd to imitate a real communication scenario (Extended Data Fig. 5b). The frequency gap between the information and interference signals is 35 kHz. The upmixed information signal is analysed using a vector signal analyser for constellation diagram construction and error vector magnitude (EVM) measurement. As shown in Fig. 4d, using the PSG-based LO yields an EVM of 12.06%, exceeding the 8% threshold for standard 64-QAM telecommunication. By contrast, using the OFD-based LO yields an EVM of only 4.38%, maintaining an adequate signal fidelity under heavy jamming due to its lower phase noise. These experimental results suggest that our system can outperform table-top electronic microwave oscillators in the quest for robust communication systems.
OFD can also enhance Doppler radar systems that harvest the velocity of moving targets by Doppler shift (Fig. 4e). When the carrier frequency is set to 25 GHz, a velocity of 1 m s–1 only induces a Doppler shift up to 167 Hz. Detecting objects with such slow speed from strong static background reflections necessitates radar signals with ultralow phase noise at low offset frequencies. We evaluate the sensitivities of Doppler radars using signals provided by OFD and PSG. A rectangular reflector placed near the transmitting and receiving antennas serves as the static background, whereas a small object mounted on a rotational stage acts as the target (Extended Data Fig. 5c). Two targets with different rotation radii (0.89 m/1.2 m) are tested in sequence, with the rotation speed set to 50° s–1. As shown in Fig. 4f, both targets are detectable only when using the OFD-based radar signal, owing to its substantially lower noise floor at low offset frequencies. Moreover, the rest of the equally spaced spurious signals are introduced by the a.c. utility power at 50 Hz.
Conclusion and outlook
The phase noise (scaled to a 10-GHz carrier) and absolute timing noise of microphotonic microwave oscillators are summarized in Table 1 and Fig. 5. The benefit of introducing frequency references is very obvious: it reduces the absolute timing noise of free-running oscillators by more than 10 dB to a level not attainable by commercial electronic oscillators. In particular, our findings represent the lowest timing noise at offset frequencies ranging from 10 Hz to 10 kHz among all the microphotonic microwave oscillators. A remarkable milestone is the realization of timing noise below 546 zs Hz−1/2 at a 10-kHz offset frequency. Such a zeptosecond-timing-noise regime was previously only accessible by referencing microcombs to a table-top ultrastable laser41.
Fig. 5: Comparison of microwaves synthesized using microphotonic microwave oscillators, scaled to 10 GHz.
Performance of an integrated optoelectronic oscillator9, OEwaves OE3700 X-band optoelectronic oscillator (*), a Brillouin laser oscillator in silica10, a Brillouin laser oscillator in Si3N4 (ref. 11), a self-injection-locked-laser-based oscillator12, a free-running microcomb in Si3N4 (ref. 56), a free-running microcomb in MgF2 (ref. 32), a free-running microcomb in silica33, an optical parametric oscillator in Si3N4-referenced microcomb in Si3N4 (ref. 57), a Si3N4-coil-cavity-referenced microcomb in Si3N4 (ref. 24), a mini-Fabry–Pérot-cavity-referenced microcomb in Si3N4 (ref. 23) and a MgF2-microresonator-referenced microcomb in Si3N4 (this work) are compared. All of the phase noise is scaled to a 10-GHz carrier frequency. The grey-shaded area indicates the noise performance of commercial electronics (PSG). The dashed black line indicates the timing jitter level of 1 as Hz−1/2.
Although state-of-the-art one-point OFD systems provide more than an order of magnitude lower timing noise using self-referenced table-top optical frequency combs17, such a configuration can also be potentially implemented in microcombs through a combination of dispersion engineering and efficient pumping schemes42,43. Additionally, optimizing the residual amplitude modulation in the phase modulator may improve common-mode noise rejection, potentially providing over 20-dB lower timing noise (Fig. 2d).
Further integration of the OFD system is viable. By leveraging thin-film lithium niobate technology44, key components such as phase modulators45 and acousto-optic modulators46 can be implemented on chips. Integrated lasers11,29,47 and soliton microcombs29,48,49,50,51 with competitive noise performance have also been recently demonstrated, and their low noise amplification for photodetection can be realized using erbium-doped waveguide amplifiers52. In addition, electro-optic comb generators can also be chosen as the frequency divider such that the desired microwaves can be directly read out from the driving voltage-controlled oscillator16. As for the optical references, integrated waveguide couplers have been developed to interface with ultrahigh-Q crystalline microresonators53,54. They should enable laser self-injection locking to the microresonators, such that the Pound–Drever–Hall locking setup can be eliminated to reduce the form factors and electrical power consumption55. These advances would extend the impact of OFD technologies to consumer markets such as high-resolution radars for autonomous vehicles and transceivers for high-speed wireless communications, providing exceptional performance, compact size, robust operation and mass production. They can also facilitate many scientific tasks, including very long baseline interferometry for space-based radio astronomy and high-fidelity manipulation of superconducting qubits.
Methods
Fabrication and packaging of the MgF2 microresonator
Low-defect MgF2 single crystals are wire sawed into discs and precisely machined using angled moulds and diamond abrasive paper. Cross-sectional geometry is microscopically monitored to ensure design accuracy. A multistage polishing process follows, using diamond-based grinding fluids (5 µm to 50 nm) with multivacancy pads, and concludes with optical polishing using cerium oxide and silicon dioxide. The entire machining process takes approximately 8 h.
The microresonator is then bonded to a glass liner and coupled with a tapered fibre, with polarization and coupling strength finely adjusted. The assembly, including the thermoelectric cooler and liner, is enclosed within a metallic shield. After passing comprehensive thermal and optical testing, the device is ready for deployment.
Simulation of thermorefractive noise
The thermorefractive noise is numerically simulated using a finite-element method based on the fluctuation–dissipation theorem58. The parameters of MgF2 used in the simulations are heat capacity of 920 J kg−1 K−1, thermal conductivity of 20.98 W m−1 K−1, material density of 3.18 × 103 kg m−3, refractive index of 1.37 and thermal-optic coefficient of 0.9 × 10−6 K−1. In the simulations, the ambient temperature is 300 K. In our analysis, we have neglected thermo-expansion noise, as it is predominantly associated with the overall physical volume of the microresonator. Instead, the primary contribution to thermal noise in WGM microresonators arises from thermorefractive noise, which is governed by the much smaller mode volume.
Characterization of reference laser noise
The two reference lasers are combined and sent to acousto-optic frequency shifters driven by a 55-MHz LO. The zeroth-order and first-order diffraction lights travel in two arms of an unbalanced Mach–Zehnder interferometer before again being combined and separated by a bandpass filter according to their wavelength. The two reference lasers, along with their frequency-shifted counterparts, are detected using two photodetectors, yielding two 55-MHz beatnotes containing the phase fluctuation of the respective reference lasers. Simultaneous extraction of the phases of the beatnotes is realized using two methods. Hilbert transform of the oscilloscope traces provides fast sampling rates but limited recording length; acquiring in-phase/quadrature-demodulated beatnotes using a datalogger provides a very long recording length at limited sampling rates (<800 kHz). Such a combination allows a noise measurement bandwidth from 10 Hz to 1 MHz.
OFD experiment
The detailed experimental setup is illustrated in Extended Data Fig. 3. Soliton microcombs are generated by pumping a packaged Si3N4 microresonator at 1,550 nm using an amplified fibre laser. A single soliton state is achieved by manually tuning the frequency of the pump laser from a multisoliton state. We use bandpass filters to select the frequency components near 1,540 nm and 1,560 nm of the amplified soliton microcomb to beat with the reference lasers separately. The beatnotes are amplified and then downmixed to generate the OFD error signal. To increase the locking range, the OFD error signal is electrically divided by a factor of 8 before sending it into the PLL. Adding an acousto-optic frequency shifter to the pump laser can extend the locking bandwidth to 300 kHz. Finally, the amplified soliton microcomb is sent into a fast photodetector with proper dispersion compensation to suppress the Gordon–Haus jitter introduced by the amplification process59.
Characterization of microwave phase noise and ADEV
As shown in Extended Data Fig. 4a, phase noise at offset frequencies above 1 kHz is directly measured using the cross-correlation mode of a phase noise analyser (PNA; Rohde & Schwarz FSWP50). For offset frequencies below 1 kHz, the microwave signal is downmixed to approximately 600 MHz before entering the PNA. This downmixing is achieved using another microwave signal derived by dividing a narrow-linewidth laser with an octave-spanning fibre comb.
As depicted in Extended Data Fig. 4b, the optical reference consists of a fibre laser operating at 1,556 nm, stabilized to a packaged MgF2 microresonator. A single comb line from the octave-spanning fibre comb is locked to this reference laser. By stabilizing the carrier-envelope offset frequency of the fibre comb, the comb’s repetition rate (200 MHz) inherits the reference laser’s relative stability. To enhance the photodetected microwave signal power, a fibre interleaver comprising seven 50/50 beamsplitters and delay fibres increases the repetition rate of the output pulse train to 25.6 GHz (ref. 17), boosting the signal power by 19 dB.
For averaging times below 100 ms, the OFD signal is downmixed to 600 MHz using ultralow-noise microwaves generated through one-point OFD, and the fractional ADEV is calculated from the phase noise traces. For averaging times exceeding 100 ms, to mitigate drift, the microwave signals are downmixed using synthesizers referenced to a hydrogen maser and subsequently analysed with a frequency counter (Keysight 53230A), as illustrated in Extended Data Fig. 4a.
Note added in proof: We would like to note two related papers that appeared during the preparation of this paper60,61.
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