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    Journals >Optics and Precision Engineering >Volume 10 >Issue 3 >Page 271 > Article
    • Optics and Precision Engineering
    • Vol. 10, Issue 3, 271 (2002)
    Research on the structure design of a precision stage based on magnetic levitation technology and used in micro-electron manufacturing field
    1, 2, 1, 1, and 1
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  • 1[in Chinese]
  • 2[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research on the structure design of a precision stage based on magnetic levitation technology and used in micro-electron manufacturing field[J]. Optics and Precision Engineering, 2002, 10(3): 271 Copy Citation Text show less

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research on the structure design of a precision stage based on magnetic levitation technology and used in micro-electron manufacturing field[J]. Optics and Precision Engineering, 2002, 10(3): 271
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