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    Journals >Optics and Precision Engineering >Volume 12 >Issue z1 >Page 318 > Article
    • Optics and Precision Engineering
    • Vol. 12, Issue z1, 318 (2004)
    Technical research of Si3N4 film in SiH2Cl2-NH3-N2 system prepared by LPCVD
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    [in Chinese], [in Chinese]. Technical research of Si3N4 film in SiH2Cl2-NH3-N2 system prepared by LPCVD[J]. Optics and Precision Engineering, 2004, 12(z1): 318 Copy Citation Text show less

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    [in Chinese], [in Chinese]. Technical research of Si3N4 film in SiH2Cl2-NH3-N2 system prepared by LPCVD[J]. Optics and Precision Engineering, 2004, 12(z1): 318
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