[1] RUDOLPH T. Why I am optimistic about the silicon-photonic route to quantum computing[J]. APL Photonics, 2017, 2(3): 030901-1-030901-19.
[2] RAHIM A, SPUESENS T, BAETS R, et al. Open-access silicon photonics: current status and emerging initiatives[J]. Proceedings of the IEEE, 2018, 106(12): 2313-2330.
[3] WANGUEMERT-PEREZ J G, HADIJ-ELHOUATI A, SANCHEZ- POSTIGO A, et al. Subwavelength structures for silicon photonics bios-ensing[J]. Optics & Laser Technology, 2019, 109: 437-448.
[4] SIEW S Y, LI B, GAO F, et al. Review of silicon photonics technology and platform development[J]. Journal of Lightwave Technology, 2021, 39(13): 4374-4389.
[5] MARCHETTI R, LACAVA C, CARROLL L, et al. Coupling strategies for silicon photonics integrated chips[J]. Photonics Research, 2019, 7(2): 201-239.
[6] CHENG L, MAO S, LI Z, et al. Grating couplers on silicon photonics: design principles, emerging trends and practical issues[J]. Micromachines, 2020, 11(7): 666-680.
[7] VERMEULEN D, SELVARAJA S, VERHEYEN P, et al. High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platform[J]. Optics Express, 2010, 18(17): 18278-18283.
[8] RAHIM A, RYCKEBOER E, SUBRAMANIAN A Z, et al. Expanding the silicon photonics portfolio with silicon nitride photonic integrated circuits[J]. Journal of Lightwave Technology, 2017, 35(4): 639-649.
[9] BLUMENTHAL D J, HEIDEMAN R, GEUZEBROEK D, et al. Silicon nitride in silicon photonics[J]. Proceedings of the IEEE, 2018, 106(12): 2209-2231.
[13] NAMBIAR S, KUMAR A, KALLEGA R, et al. High-efficiency grating coupler in 400 nm and 500 nm PECVD silicon nitride with bottom reflector[J]. IEEE Photonics Journal, 2019, 11(5): 1-13.
[14] SACHER W D, HUANG Y, DING L, et al. Wide bandwidth and high coupling efficiency Si3N4-on-SOI dual-level grating coupler[J]. Optics Express, 2014, 22(9): 10938-10947.
[15] HUANG Y, SONG J, LUO X, et al. CMOS compatible monolithic multi-layer Si3N4-on-SOI platform for low-loss high performance silicon photonics dense integration[J]. Optics Express, 2014, 22 (18): 21859-21865.
[16] SACHER W D, HUANG Y, LO G Q, et al. Multilayer silicon nitride-on-silicon integrated photonic platforms and devices[J]. Journal of light-wave technology, 2015, 33(4): 901-910.
