An organic-inorganic hybrid sol-gel material by using Tetraethylorthosilicate (Teos) and phenyltriethoxysilane(Phtes) as precursors was synthesized,and a planar optical waveguide was fabricated by using spin-coating on silicon substrate. A rib strip waveguide was formed by inductively coupled plasma(ICP). A relation between refractive index and composition of the precursors was obtained by M-line method;the optical loss of the planar waveguide was measured to be 0.23 dB/cm at 632.8 nm wavelength.