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    Journals >Optics and Precision Engineering >Volume 16 >Issue 4 >Page 636 > Article
    • Optics and Precision Engineering
    • Vol. 16, Issue 4, 636 (2008)
    Fabrication process analysis for nano-positioning stage based on silicon bulk micromachining
    1, 1, 2, and 1
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  • 1[in Chinese]
  • 2[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication process analysis for nano-positioning stage based on silicon bulk micromachining[J]. Optics and Precision Engineering, 2008, 16(4): 636 Copy Citation Text show less

    Abstract

    作者简介：孙立宁(1964-),男,博士生导师,长江学者,主要从事纳米级微驱动及微操作机器人、高速高精度机构、工业机器人技术、并联机器人、医疗机器人、微小型机器人、仿人手臂及机器人机构与控制方面的研究工作.E-mail:Insun@hit.edu.cn
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication process analysis for nano-positioning stage based on silicon bulk micromachining[J]. Optics and Precision Engineering, 2008, 16(4): 636
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