Yuqing ZHAO, Zhishan GAO, Qun YUAN, Jianqiu MA, Yifeng SUN, Zhenyan GUO. Simulation and Analysis of Low-coherence Micro-interference Signal with High Aspect Ratio Trench Structure Based on FDTD[J]. Acta Photonica Sinica, 2023, 52(1): 0112001
- Acta Photonica Sinica
- Vol. 52, Issue 1, 0112001 (2023)
Fig. 1. Characteristics of low coherent micro-interference signal with high aspect ratio structure
Fig. 2. Simulation process
Fig. 3. Distribution of detecting light field at focal plane
Fig. 4. Simulation of imaging process
Fig. 5. Schematic of equivalent principle
Fig. 6. Simulation of vertical scanning process
Fig. 7. Schematic of attenuation factor and point spread function
Fig. 8. Location of tested sampling point of Si-based trench micro-structure with aspect ratio of 5∶1
Fig. 9. Simulated interference signals of Si-based trench micro-structure with aspect ratio of 5∶1 under different polarization directions
Fig. 10. Experimental results of Si-based MEMS trench micro-structure with aspect ratio of 5∶1（the interference signals are the result of CEEMDAN preprocessing）
Fig. 11. Simulated interference signals after splicing
Fig. 12. Experimental results of Si-based MEMS trench micro-structure with aspect ratio of 80∶3
Fig. 13. Experimental interference signal after splicing
Fig. 14. Comparison diagram of normalized experimental interference signal and simulated interference signal
Fig. 15. Envelope comparison of experimental interference signal and simulated interference signal
Fig. 16. Frequency distribution comparison of experimental interference signal and simulated interference signal
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20