This paper investigates the impedance spectroscopy of monocrystalline silicon solar cells (MSSC) and dye-sensitized solar cells (DSSC) using solar cell dynamic equivalent resistor-capacitance (RC) and capacitor sum capacitor (CSC) circuits. Firstly, these circuits effectively represent the dynamic behavior of MSSC and DSSC. Secondly, the measurement method significantly impacts the accuracy of impedance measurements in the high-frequency region. Finally, the series resistance affects the distance between the left end of the impedance spectroscopy and the origin, while the parallel resistance influences the size of the impedance spectroscopy. In the CSC circuit, the relative magnitudes of dielectric relaxation capacitance and chemical capacitance affect the number and position of arc in the impedance spectroscopy. The value of the dielectric relaxation capacitor determines the number of impedance spectroscopy arcs. These conclusions provide guidelines for improving the accuracy of solar cell impedance measurements.