• Journal of Applied Optics
  • Vol. 43, Issue 4, 707 (2022)
Xin LIU, Cong WANG, Yongqiang LIU, Yang YUAN..., Xiaolei CHEN, Yu ZHANG, Juanni HAN and Chaofan ZHANG|Show fewer author(s)
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    DOI: 10.5768/JAO202243.0403003 Cite this Article
    Xin LIU, Cong WANG, Yongqiang LIU, Yang YUAN, Xiaolei CHEN, Yu ZHANG, Juanni HAN, Chaofan ZHANG. Rapid Ritchey-Common measurement method of large-aperture flat mirror[J]. Journal of Applied Optics, 2022, 43(4): 707 Copy Citation Text show less
    Optical path diagram of Ritchey-Common test
    Fig. 1. Optical path diagram of Ritchey-Common test
    Schematic diagram of coordinate conversion
    Fig. 2. Schematic diagram of coordinate conversion
    Relationship between defocus and radius of spherical mirror
    Fig. 3. Relationship between defocus and radius of spherical mirror
    Relationship between defocus and position of flat mirror
    Fig. 4. Relationship between defocus and position of flat mirror
    Wavefront aberration for test
    Fig. 5. Wavefront aberration for test
    Simulation parameters setting
    Fig. 6. Simulation parameters setting
    Direct measuring surface,Wave aberration and Restored surface
    Fig. 7. Direct measuring surface,Wave aberration and Restored surface
    波像差复原面形/μm瑞奇角误差/(°)
    θRMS−1−0.100.11
    30°<λ/25PV0.246 30.248 60.248 80.249 10.251 5
    RMS0.028 90.029 20.029 20.029 20.029 5
    30°<λ/120PV0.036 40.036 70.036 80.036 80.037 1
    RMS0.006 10.006 20.006 20.006 20.006 3
    45°<λ/25PV0.299 30.303 90.304 40.305 00.309 9
    RMS0.032 90.033 40.033 50.033 50.034 0
    45°<λ/120PV0.042 10.042 80.042 80.043 00.043 7
    RMS0.007 20.007 30.007 30.007 30.007 4
    Table 1. Wavefront restoration under condition of Ritchey angle error
    序号位置偏移/mm平面镜与焦点距离/mm离焦量
    1−0.1799.9−3.649 8
    2−0.05799.95−1.819 4
    3−0.01799.99−0.362 8
    4−0.005799.995−0.208 4
    5−0.001799.999−0.036 2
    60.001800.0010.036 2
    70.005800.0050.181 2
    80.01800.010.362 4
    90.05800.051.807 8
    100.1800.13.604 6
    Table 2. Variation of defocus with FA length
    序号Xs旋转/(°)离焦像散
    1−0.050.075 40.062
    2−0.010.003 10.002 4
    3−0.0050.000 80.000 6
    4−0.0020.000 10.000 1
    50.0020.000 10.000 1
    60.0050.000 80.000 6
    70.010.003 10.002 4
    80.050.075 40.062
    Table 3. Variation of defocus and astigmatism with Xs-axis angle
    序号Ys旋转/(°)离焦像散
    1−0.05−0.009 20.045 2
    3−0.005−0.000 10.000 5
    4−0.00200.000 1
    50.00200.000 1
    60.005−0.000 10.000 5
    70.01−0.000 40.001 8
    80.05−0.009 20.045 2
    Table 4. Variation of defocus and astigmatism with Ys-axis angle
    复原面形
    组号PVRMS
    第1组0.123 30.014 3
    第2组0.114 10.015 9
    第3组0.102 60.017 5
    第4组0.113 70.015 7
    第5组0.114 00.015 2
    5组平均0.113 50.015 7
    Table 5. Restored surface μm
    Xin LIU, Cong WANG, Yongqiang LIU, Yang YUAN, Xiaolei CHEN, Yu ZHANG, Juanni HAN, Chaofan ZHANG. Rapid Ritchey-Common measurement method of large-aperture flat mirror[J]. Journal of Applied Optics, 2022, 43(4): 707
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