• Journal of Terahertz Science and Electronic Information Technology
  • Vol. 22, Issue 3, 331 (2024)
CHEN Xing*, ZHANG Chao, LI Xiaolin, and ZHAO Yongzhi
Author Affiliations
  • [in Chinese]
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    DOI: 10.11805/tkyda2023208 Cite this Article
    CHEN Xing, ZHANG Chao, LI Xiaolin, ZHAO Yongzhi. A T/R module based on silicon-based MEMS 3D integration technology[J]. Journal of Terahertz Science and Electronic Information Technology , 2024, 22(3): 331 Copy Citation Text show less
    References

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    [4] LIU Enda, WU Hongjiang, ZHAO Yongzhi. Design of phased array T/R component microsystem based on heterogeneous integration technology[J]. Journal of Physics: Conference Series, 2019(1325):012010. doi:10.1088/1742-6596/1325/1/012010.

    [5] LUCERO R, QUTTENEH W, PAVIO A, et al. Design of an LTCC switch diplexer front-end module for GSM/DCS/PCS applications[C]// 2001 IEEE Radio Frequency Integrated Circuits(RFIC) Symposium. Phoenix: IEEE, 2001: 213-216. doi: 10.1109/RFIC.2001.935678.

    [9] ZHAO Yongzhi,WANG Shaodong,WU Hongjiang. A novel dual channel receive front-end module with MEMS technology[C]// 2018 IEEE International Symposium on Electromagnetic Compatibility and 2018 IEEE Asia-Pacific Symposium on Electromagnetic Compatibility. Suntec City:IEEE, 2018:674-677. doi:10.1109/ISEMC.2018.8393866.

    CHEN Xing, ZHANG Chao, LI Xiaolin, ZHAO Yongzhi. A T/R module based on silicon-based MEMS 3D integration technology[J]. Journal of Terahertz Science and Electronic Information Technology , 2024, 22(3): 331
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