Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape

Xiangjun Dai; Tianyu Yuan; Hanyang Jiang; Xinxing Shao; Meiling Dai; Hai Yun; Fujun Yang; Xiaoyuan He

doi:10.3788/COL201816.031201

Journals >Chinese Optics Letters >Volume 16 >Issue 3 >Page 031201 > Article

Chinese Optics Letters
Vol. 16, Issue 3, 031201 (2018)

Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape

Xiangjun Dai^1,2,*, Tianyu Yuan¹, Hanyang Jiang², Xinxing Shao²..., Meiling Dai², Hai Yun¹, Fujun Yang² and Xiaoyuan He²|Show fewer author(s)

Author Affiliations

¹School of Transportation and Vehicle Engineering, Shandong University of Technology, Zibo 255049, China

²Department of Engineering Mechanics, Southeast University, Nanjing 210096, China

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DOI: 10.3788/COL201816.031201 Cite this Article Set citation alerts

Xiangjun Dai, Tianyu Yuan, Hanyang Jiang, Xinxing Shao, Meiling Dai, Hai Yun, Fujun Yang, Xiaoyuan He, "Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape," Chin. Opt. Lett. 16, 031201 (2018) Copy Citation Text

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