Jupu YANG, Jialin DU, Fanxing LI, Qingrong CHEN, Simo WANG, Wei YAN. Deep Learning Based Method for Automatic Focus Detection in Digital Lithography[J]. Acta Photonica Sinica, 2022, 51(6): 0611002
- Acta Photonica Sinica
- Vol. 51, Issue 6, 0611002 (2022)
Fig. 1. Schematic diagram of a deep learning based digital lithography autofocus system
Fig. 2. Image of the centroid of each out-of-focus range on the CCD
Fig. 3. Coarse check focus network structure
Fig. 4. Bottleneck modules
Fig. 5. Confusion matrix for network models with different layer structures on the test set
Fig. 6. Training results of ResNet28+FF
Fig. 7. Normalized evaluation curves for different definition evaluation functions in a set of out-of-focus images
Fig. 8. Search algorithm flow chart
Fig. 9. Experimental system diagram
Fig. 10. Coarse focus check process display
Fig. 11. Precision check focus process display
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Table 1. Accuracy of network models with different layer structures on the test set
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Table 2. Accuracy of different layer structured network models with added feature fusion modules on the test set
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Table 3. Time required to process images with different definition evaluation functions
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Table 4. Focus detection performance of the same pattern in different out-of-focus situations using the proposed method
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Table 5. Focus detection performance of the same pattern in different out-of-focus situations using conventional methods
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Table 6. Comparison of focus detection performance of different patterns at 28 μ m out of focus
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Table 7. Comparison of focus detection performance of different patterns at -18 μ m out of focus
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Table 8. Results of the coarse and precise focus detection errors in 20 tests
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