• Study On Optical Communications
  • Vol. 49, Issue 1, 1 (2023)
Xiang-peng OU, Zai-li YANG, Bo TANG, Zhi-hua LI..., Jun LUO, Wen-wu WANG and Yan YANG*|Show fewer author(s)
Author Affiliations
  • Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
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    DOI: 10.13756/j.gtxyj.2023.01.001 Cite this Article
    Xiang-peng OU, Zai-li YANG, Bo TANG, Zhi-hua LI, Jun LUO, Wen-wu WANG, Yan YANG. Silicon Photonic 2.5D/3D Integration Technology and Its Applications[J]. Study On Optical Communications, 2023, 49(1): 1 Copy Citation Text show less
    Application of silicon-based photonics
    Fig. 1. Application of silicon-based photonics
    The number of photonic components integrated in a single PIC on three different platforms over time[22]
    Fig. 2. The number of photonic components integrated in a single PIC on three different platforms over time[22]
    Development trend of silicon-based photonic integration technology
    Fig. 3. Development trend of silicon-based photonic integration technology
    Silicon-based photonic integration structure
    Fig. 4. Silicon-based photonic integration structure
    2D integrated silicon-based photonic chip
    Fig. 5. 2D integrated silicon-based photonic chip
    High-speed integrated silicon optical transceiver chip
    Fig. 6. High-speed integrated silicon optical transceiver chip
    2.5D integrated silicon photonic chip
    Fig. 7. 2.5D integrated silicon photonic chip
    3D integrated silicon photonic chip
    Fig. 8. 3D integrated silicon photonic chip
    Monolithically integrated silicon photonic chip
    Fig. 9. Monolithically integrated silicon photonic chip
    Silicon photonic LiDAR based on OPA
    Fig. 10. Silicon photonic LiDAR based on OPA
    Silicon photonic neural network chip
    Fig. 11. Silicon photonic neural network chip
    Sensors based on silicon-based optoelectronic platform
    Fig. 12. Sensors based on silicon-based optoelectronic platform
    集成方式技术成熟度单通道速率/Gbit/s调制格式通道数尺寸功耗调制器类型参考文献
    2D25.0NRZ88 mm×12 mmTotal~2W,TXMZM[43]
    25.0NRZ5N/A5.34 pJ/bit, TXMRM[44]
    112.0PAM41N/A6.00 pJ/bit, TXMRM[45]
    1.6 Tbit/sPAM48N/AN/AMZM[21]
    2.5D50.0NRZ414 mm×8.5 mmN/AMZM[38]
    200.0QAM121.6 mm×13 mmTotal~4.9 WMZM[75]
    200.0PAM4128N/AN/AMZM[76]
    3D56.0NRZ24 mm×8 mm11.20 pJ/bitMZM[59]
    30NRZ1N/AN/AMZM[37]
    25.0NRZ1610 mm×11 mm5.91 pJ/bitMZM[60]
    100.0PAM44N/AN/AMZM[67]
    16.0N/A640.40 mm2 (Si area)N/AMDM[61]
    Monolithic10.0 NRZ4N/A65.50 pJ/bitMZM[72]
    2.50 NRZ42.9 mm×2.9 mm1.23 pJ/bit, TXMRM[77]
    25.0NRZ4N/A14.60 pJ/bitMZM[78]
    10.0NRZ10.015 mm2(Si area)1.91 pJ/bitMRM[74]
    Table 1. Silicon photonic chips based on four different integration technologies for communication
    Xiang-peng OU, Zai-li YANG, Bo TANG, Zhi-hua LI, Jun LUO, Wen-wu WANG, Yan YANG. Silicon Photonic 2.5D/3D Integration Technology and Its Applications[J]. Study On Optical Communications, 2023, 49(1): 1
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