1National Center for International Joint Research of Electronic Materials and Systems, School of Information Engineering, Zhengzhou University, Zhengzhou 450001, Henan, China
2Research Institute of Sensors, Zhengzhou University, Zhengzhou 450001, Henan, China
3Zhengzhou Way Do Electronics Technology Co., Ltd., Zhengzhou 450001, Henan, China
4Industrial Technology Research Institute Co., Ltd., Zhengzhou University, Zhengzhou 450001, Henan, China