Yijie LI, Jun XIAO, Yifang CHEN, Xujie TONG, Chengyang MU. Grating X-ray collimator supported by Si3N4 membrane with large aspect ratio written directly by electron beam[J]. Optics and Precision Engineering, 2022, 30(10): 1181
- Optics and Precision Engineering
- Vol. 30, Issue 10, 1181 (2022)
Fig. 1. Simulation results by ray tracing method
Fig. 2. Process of making suspended Au grating
Fig. 3. Electroplating and sample of Au grating
Fig. 4. Images of photoresist with and without fractures
Fig. 5. Contrast images of stiffener effect
Fig. 6. Simulation results and experimental results of EBL etching of different dose etching， the blue figure is the simulation result， and the gray figure is the SEM image of EBL experimental result at the same dose
Fig. 7. Testing system and results of Au grating
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