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    Journals >Acta Photonica Sinica >Volume 35 >Issue 7 >Page 981 > Article
    • Acta Photonica Sinica
    • Vol. 35, Issue 7, 981 (2006)
    Study of Integrator Rod in Step-and-scan Lithography
    Guo Liping1,2,*, Huang Huijie1, and Wang Xiangzhao1
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  • 1[in Chinese]
  • 2[in Chinese]
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    Guo Liping, Huang Huijie, Wang Xiangzhao. Study of Integrator Rod in Step-and-scan Lithography[J]. Acta Photonica Sinica, 2006, 35(7): 981 Copy Citation Text show less
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    Guo Liping, Huang Huijie, Wang Xiangzhao. Study of Integrator Rod in Step-and-scan Lithography[J]. Acta Photonica Sinica, 2006, 35(7): 981
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