Fabrication of the high-Q Si3N4 microresonators for soliton microcombs

Shuai Wan; Rui Niu; Jin-Lan Peng; Jin Li; Guang-Can Guo; Chang-Ling Zou; Chun-Hua Dong

doi:10.3788/COL202220.032201

Journals >Chinese Optics Letters >Volume 20 >Issue 3 >Page 032201 > Article

Chinese Optics Letters
Vol. 20, Issue 3, 032201 (2022)

Q

Si₃N₄ microresonators for soliton microcombs

Shuai Wan^1,2, Rui Niu^1,2, Jin-Lan Peng³, Jin Li^1,2..., Guang-Can Guo^1,2, Chang-Ling Zou^1,2 and Chun-Hua Dong^1,2,*|Show fewer author(s)

Author Affiliations

¹CAS Key Laboratory of Quantum Information, University of Science and Technology of China, Hefei 230026, China

²CAS Center For Excellence in Quantum Information and Quantum Physics, University of Science and Technology of China, Hefei 230026, China

³Center for Micro and Nanoscale Research and Fabrication, University of Science and Technology of China, Chinese Academy of Sciences, Hefei 230026, China

show less

DOI: 10.3788/COL202220.032201 Cite this Article Set citation alerts

Shuai Wan, Rui Niu, Jin-Lan Peng, Jin Li, Guang-Can Guo, Chang-Ling Zou, Chun-Hua Dong, "Fabrication of the high-

Q

Si₃N₄ microresonators for soliton microcombs," Chin. Opt. Lett. 20, 032201 (2022) Copy Citation Text

EndNote(RIS)

BibTex

Plain Text

show less

Cited By

Article index updated: Feb. 7, 2025

Citation counts are provided from Web of Science. The counts may vary by service, and are reliant on the availability of their data.

The article is cited by 11 article(s) from Web of Science.

The article is cited by 4 article(s) CLP online library. (Some content might be in Chinese.)

Shuai Wan, Rui Niu, Jin-Lan Peng, Jin Li, Guang-Can Guo, Chang-Ling Zou, Chun-Hua Dong, "Fabrication of the high-

Q

Si₃N₄ microresonators for soliton microcombs," Chin. Opt. Lett. 20, 032201 (2022)

Download Citation

EndNote(RIS)

BibTex

Plain Text

Set citation alerts for the article

Tools

Set citation alerts for the article

Save the article for my favorites

Paper Information

微信扫一扫：分享

微信扫一扫：分享