This study aimed to achieve precise measurements for spherical grid geometrical features and screen the qualified parts for electron optical design requirements. Thus, the characteristics of the measuring equipment, its accessories, grid size design requirements, and common overproof problems caused by processing were studied. First, the optical measuring machine with a laser-assisted focusing system was selected, owing to its grid measurement features, efficiency, and accuracy. Then, an automatic measurement program was compiled, which automatically turned the coarse zero and orientation to the precise values and completed the automatic measurement of all the spherical grid geometrical features. Subsequently, in view of the ‘big radius, small arc’ measurement difficulty, quantitative analysis and calculations were performed to obtain the formula for the uncertainty of the curvature radius measurement. Finally, the sources of measurement uncertainty were discussed, and the methods for eliminating error sources were analyzed. In a practical application, the automatic and precise measurements of the spherical grid curvature radius, profile of the grids spherical surface, circular grating wire concentricity, radial grating wire circle indexing, grating wire widths, outer diameter and its roundness, and the end surface flatness have been achieved. The measurement duration was approximately two thirds of the traditional method, and the number of measuring points was up to 2 094, which is considerably larger than the hand-operated method.