Li TANG, Zhili CHEN, Yuzhao LIU, Qian BI, Yingxue XI, Weiguo LIU. Metal-assisted Low-energy Ar+ Ion Beam Induces Self-organized Nanostructure of Sapphire[J]. Acta Photonica Sinica, 2021, 50(2): 183
- Acta Photonica Sinica
- Vol. 50, Issue 2, 183 (2021)
Fig. 1. Schematic diagram of the working principle of the microwave cyclotron resonance ion source
Fig. 2. Ridge structure impurity target
Fig. 3. AFM topography and Fourier transform of sapphire sputtered by Ar+ ion beam with or without impurities
Fig. 4. PSD curve graph of Ar+ ion beam sputtering sapphire surface with or without impurity assistance（U ![]()
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Fig. 5. Schematic diagram of island structure formation process
Fig. 6. AFM image and Fourier transform of the sapphire sample surface after etching with different incident energ（α ![]()
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Fig. 7. PSD curves and trends of height and RMS of nanostructures on the surface of sapphire samples after etching with different incident energy (α ![]()
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Fig. 8. Surface topography of sapphire sample etched with 1200 eV energy
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Table 1. Process experiment parameters
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