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    Journals >Optics and Precision Engineering >Volume 12 >Issue z1 >Page 31 > Article
    • Optics and Precision Engineering
    • Vol. 12, Issue z1, 31 (2004)
    Micro-gyroscope technology based on MEMS microfabrication
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    DOI: Cite this Article
    [in Chinese], [in Chinese]. Micro-gyroscope technology based on MEMS microfabrication[J]. Optics and Precision Engineering, 2004, 12(z1): 31 Copy Citation Text show less

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    [in Chinese], [in Chinese]. Micro-gyroscope technology based on MEMS microfabrication[J]. Optics and Precision Engineering, 2004, 12(z1): 31
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